JPH0522293B2 - - Google Patents

Info

Publication number

JPH0522293B2

JPH0522293B2 JP25284886A JP25284886A JPH0522293B2 JP H0522293 B2 JPH0522293 B2 JP H0522293B2 JP 25284886 A JP25284886 A JP 25284886A JP 25284886 A JP25284886 A JP 25284886A JP H0522293 B2 JPH0522293 B2 JP H0522293B2

Authority

JP

Japan

Prior art keywords

vapor

winding

magnetic

atmosphere

magnetic recording

Prior art date

1986-10-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Fee Related

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• 238000004804 winding Methods 0.000 claims description 19
• 239000000758 substrate Substances 0.000 claims description 16
• 229910052751 metal Inorganic materials 0.000 claims description 12
• 239000002184 metal Substances 0.000 claims description 12
• 238000000034 method Methods 0.000 claims description 12
• 239000010409 thin film Substances 0.000 claims description 9
• 238000007740 vapor deposition Methods 0.000 claims description 9
• 229910045601 alloy Inorganic materials 0.000 claims description 5
• 239000000956 alloy Substances 0.000 claims description 5
• 238000004519 manufacturing process Methods 0.000 claims description 5
• 230000003647 oxidation Effects 0.000 claims description 5
• 238000007254 oxidation reaction Methods 0.000 claims description 5
• 239000007789 gas Substances 0.000 description 9
• 239000010408 film Substances 0.000 description 8
• -1 polyethylene terephthalate Polymers 0.000 description 5
• 230000001590 oxidative effect Effects 0.000 description 4
• 238000001816 cooling Methods 0.000 description 3
• 238000000151 deposition Methods 0.000 description 3
• 150000002739 metals Chemical class 0.000 description 3
• 229910020630 Co Ni Inorganic materials 0.000 description 2
• 229910002440 Co–Ni Inorganic materials 0.000 description 2
• FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
• RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
• 238000006243 chemical reaction Methods 0.000 description 2
• 230000001276 controlling effect Effects 0.000 description 2
• 230000008021 deposition Effects 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 230000004907 flux Effects 0.000 description 2
• JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
• 239000004033 plastic Substances 0.000 description 2
• 229920003023 plastic Polymers 0.000 description 2
• 229920000139 polyethylene terephthalate Polymers 0.000 description 2
• 239000005020 polyethylene terephthalate Substances 0.000 description 2
• 238000003860 storage Methods 0.000 description 2
• 229920002284 Cellulose triacetate Polymers 0.000 description 1
• 229910020637 Co-Cu Inorganic materials 0.000 description 1
• 229910017061 Fe Co Inorganic materials 0.000 description 1
• 229910017060 Fe Cr Inorganic materials 0.000 description 1
• 229910002544 Fe-Cr Inorganic materials 0.000 description 1
• 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
• 229910018054 Ni-Cu Inorganic materials 0.000 description 1
• 229910018487 Ni—Cr Inorganic materials 0.000 description 1
• 229910018481 Ni—Cu Inorganic materials 0.000 description 1
• CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
• 239000004952 Polyamide Substances 0.000 description 1
• 239000004642 Polyimide Substances 0.000 description 1
• 229910052777 Praseodymium Inorganic materials 0.000 description 1
• 229910052772 Samarium Inorganic materials 0.000 description 1
• NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
• 230000001133 acceleration Effects 0.000 description 1
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
• 239000011230 binding agent Substances 0.000 description 1
• 229910052804 chromium Inorganic materials 0.000 description 1
• UPHIPHFJVNKLMR-UHFFFAOYSA-N chromium iron Chemical compound [Cr].[Fe] UPHIPHFJVNKLMR-UHFFFAOYSA-N 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 229910017052 cobalt Inorganic materials 0.000 description 1
• 239000010941 cobalt Substances 0.000 description 1
• GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
• 230000007423 decrease Effects 0.000 description 1
• 230000008020 evaporation Effects 0.000 description 1
• 238000001704 evaporation Methods 0.000 description 1
• 229910052742 iron Inorganic materials 0.000 description 1
• 239000006247 magnetic powder Substances 0.000 description 1
• 239000013081 microcrystal Substances 0.000 description 1
• 229910052759 nickel Inorganic materials 0.000 description 1
• 238000005121 nitriding Methods 0.000 description 1
• 229910052760 oxygen Inorganic materials 0.000 description 1
• 239000001301 oxygen Substances 0.000 description 1
• 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
• 229920002647 polyamide Polymers 0.000 description 1
• 229920000515 polycarbonate Polymers 0.000 description 1
• 239000004417 polycarbonate Substances 0.000 description 1
• 229920006267 polyester film Polymers 0.000 description 1
• 239000011112 polyethylene naphthalate Substances 0.000 description 1
• 229920001721 polyimide Polymers 0.000 description 1
• 229920000915 polyvinyl chloride Polymers 0.000 description 1
• 239000004800 polyvinyl chloride Substances 0.000 description 1
• 238000004321 preservation Methods 0.000 description 1
• 230000001105 regulatory effect Effects 0.000 description 1
• 229910052703 rhodium Inorganic materials 0.000 description 1
• 239000011780 sodium chloride Substances 0.000 description 1
• 230000003685 thermal hair damage Effects 0.000 description 1
• 230000037303 wrinkles Effects 0.000 description 1