JPH0522176B2 - - Google Patents
Info
- Publication number
- JPH0522176B2 JPH0522176B2 JP57191637A JP19163782A JPH0522176B2 JP H0522176 B2 JPH0522176 B2 JP H0522176B2 JP 57191637 A JP57191637 A JP 57191637A JP 19163782 A JP19163782 A JP 19163782A JP H0522176 B2 JPH0522176 B2 JP H0522176B2
- Authority
- JP
- Japan
- Prior art keywords
- solid
- state image
- test pattern
- image sensor
- color
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012360 testing method Methods 0.000 claims description 28
- 238000007689 inspection Methods 0.000 claims description 20
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000003384 imaging method Methods 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 2
- 238000005286 illumination Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 229910052724 xenon Inorganic materials 0.000 description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000003909 pattern recognition Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Solid State Image Pick-Up Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57191637A JPS5980965A (ja) | 1982-10-29 | 1982-10-29 | 固体撮像素子検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57191637A JPS5980965A (ja) | 1982-10-29 | 1982-10-29 | 固体撮像素子検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5980965A JPS5980965A (ja) | 1984-05-10 |
| JPH0522176B2 true JPH0522176B2 (xx) | 1993-03-26 |
Family
ID=16277963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57191637A Granted JPS5980965A (ja) | 1982-10-29 | 1982-10-29 | 固体撮像素子検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5980965A (xx) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61187672A (ja) * | 1985-02-15 | 1986-08-21 | Nec Corp | 密着型イメ−ジセンサの欠陥検査方法および欠陥検査装置 |
| JPS63311584A (ja) * | 1987-06-15 | 1988-12-20 | Fujitsu Ltd | イメ−ジセンサの読取試験方法 |
| KR100275719B1 (ko) * | 1996-07-24 | 2001-01-15 | 윤종용 | 반도체장치의제조공정평가방법 |
| JP2006010316A (ja) * | 2004-06-22 | 2006-01-12 | Yokogawa Electric Corp | 検査用光源装置 |
| US10222294B2 (en) * | 2015-03-31 | 2019-03-05 | Mellanox Technologies Silicon Photonics Inc. | Wafer level testing of optical devices |
| CN105866589B (zh) * | 2016-05-16 | 2019-06-04 | 中国电子科技集团公司第四十一研究所 | 一种透射式单元探测器成像及电性参数测试系统 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55121120A (en) * | 1979-03-12 | 1980-09-18 | Nec Corp | Measuring instrument for photo-detecting semiconductor element |
| JPS56119583A (en) * | 1980-02-25 | 1981-09-19 | Hitachi Ltd | Image sensor checking machine |
| JPS57113244A (en) * | 1980-12-29 | 1982-07-14 | Yoshie Hasegawa | Inspecting device of wafer surface |
-
1982
- 1982-10-29 JP JP57191637A patent/JPS5980965A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55121120A (en) * | 1979-03-12 | 1980-09-18 | Nec Corp | Measuring instrument for photo-detecting semiconductor element |
| JPS56119583A (en) * | 1980-02-25 | 1981-09-19 | Hitachi Ltd | Image sensor checking machine |
| JPS57113244A (en) * | 1980-12-29 | 1982-07-14 | Yoshie Hasegawa | Inspecting device of wafer surface |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5980965A (ja) | 1984-05-10 |
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