JPH0521982B2 - - Google Patents

Info

Publication number
JPH0521982B2
JPH0521982B2 JP60265070A JP26507085A JPH0521982B2 JP H0521982 B2 JPH0521982 B2 JP H0521982B2 JP 60265070 A JP60265070 A JP 60265070A JP 26507085 A JP26507085 A JP 26507085A JP H0521982 B2 JPH0521982 B2 JP H0521982B2
Authority
JP
Japan
Prior art keywords
bombarded
filament
crucible
steam
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60265070A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62127463A (ja
Inventor
Hiromoto Ito
Yasuki Kuze
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP26507085A priority Critical patent/JPS62127463A/ja
Publication of JPS62127463A publication Critical patent/JPS62127463A/ja
Publication of JPH0521982B2 publication Critical patent/JPH0521982B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP26507085A 1985-11-27 1985-11-27 溶融物質の蒸気噴出装置の制御方法 Granted JPS62127463A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26507085A JPS62127463A (ja) 1985-11-27 1985-11-27 溶融物質の蒸気噴出装置の制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26507085A JPS62127463A (ja) 1985-11-27 1985-11-27 溶融物質の蒸気噴出装置の制御方法

Publications (2)

Publication Number Publication Date
JPS62127463A JPS62127463A (ja) 1987-06-09
JPH0521982B2 true JPH0521982B2 (https=) 1993-03-26

Family

ID=17412171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26507085A Granted JPS62127463A (ja) 1985-11-27 1985-11-27 溶融物質の蒸気噴出装置の制御方法

Country Status (1)

Country Link
JP (1) JPS62127463A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2623819A1 (fr) * 1987-11-26 1989-06-02 Thomson Csf Four a bombardement electronique pour evaporation sous vide

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928701B2 (ja) * 1980-09-30 1984-07-14 三和機工株式会社 杭圧入機におけるモンケン支持装置

Also Published As

Publication number Publication date
JPS62127463A (ja) 1987-06-09

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