JPS62127463A - 溶融物質の蒸気噴出装置の制御方法 - Google Patents

溶融物質の蒸気噴出装置の制御方法

Info

Publication number
JPS62127463A
JPS62127463A JP26507085A JP26507085A JPS62127463A JP S62127463 A JPS62127463 A JP S62127463A JP 26507085 A JP26507085 A JP 26507085A JP 26507085 A JP26507085 A JP 26507085A JP S62127463 A JPS62127463 A JP S62127463A
Authority
JP
Japan
Prior art keywords
crucible
filament
vapor
bombarded
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26507085A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521982B2 (https=
Inventor
Hiromoto Ito
弘基 伊藤
Yasumi Kuze
耕己 久世
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP26507085A priority Critical patent/JPS62127463A/ja
Publication of JPS62127463A publication Critical patent/JPS62127463A/ja
Publication of JPH0521982B2 publication Critical patent/JPH0521982B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP26507085A 1985-11-27 1985-11-27 溶融物質の蒸気噴出装置の制御方法 Granted JPS62127463A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26507085A JPS62127463A (ja) 1985-11-27 1985-11-27 溶融物質の蒸気噴出装置の制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26507085A JPS62127463A (ja) 1985-11-27 1985-11-27 溶融物質の蒸気噴出装置の制御方法

Publications (2)

Publication Number Publication Date
JPS62127463A true JPS62127463A (ja) 1987-06-09
JPH0521982B2 JPH0521982B2 (https=) 1993-03-26

Family

ID=17412171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26507085A Granted JPS62127463A (ja) 1985-11-27 1985-11-27 溶融物質の蒸気噴出装置の制御方法

Country Status (1)

Country Link
JP (1) JPS62127463A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2623819A1 (fr) * 1987-11-26 1989-06-02 Thomson Csf Four a bombardement electronique pour evaporation sous vide

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5761113A (en) * 1980-09-30 1982-04-13 Sanwa Kiko Kk Monkey supporter for pile driver

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5761113A (en) * 1980-09-30 1982-04-13 Sanwa Kiko Kk Monkey supporter for pile driver

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2623819A1 (fr) * 1987-11-26 1989-06-02 Thomson Csf Four a bombardement electronique pour evaporation sous vide

Also Published As

Publication number Publication date
JPH0521982B2 (https=) 1993-03-26

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