JPH0520915B2 - - Google Patents

Info

Publication number
JPH0520915B2
JPH0520915B2 JP2168488A JP2168488A JPH0520915B2 JP H0520915 B2 JPH0520915 B2 JP H0520915B2 JP 2168488 A JP2168488 A JP 2168488A JP 2168488 A JP2168488 A JP 2168488A JP H0520915 B2 JPH0520915 B2 JP H0520915B2
Authority
JP
Japan
Prior art keywords
ceramic
ceramic substrate
green sheet
cavity
laminate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2168488A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01196191A (ja
Inventor
Wakichi Tsukamoto
Yasunobu Yoneda
Yukio Sakabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2168488A priority Critical patent/JPH01196191A/ja
Publication of JPH01196191A publication Critical patent/JPH01196191A/ja
Publication of JPH0520915B2 publication Critical patent/JPH0520915B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
JP2168488A 1988-02-01 1988-02-01 セラミクス基板の製造方法 Granted JPH01196191A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2168488A JPH01196191A (ja) 1988-02-01 1988-02-01 セラミクス基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2168488A JPH01196191A (ja) 1988-02-01 1988-02-01 セラミクス基板の製造方法

Publications (2)

Publication Number Publication Date
JPH01196191A JPH01196191A (ja) 1989-08-07
JPH0520915B2 true JPH0520915B2 (Direct) 1993-03-22

Family

ID=12061893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2168488A Granted JPH01196191A (ja) 1988-02-01 1988-02-01 セラミクス基板の製造方法

Country Status (1)

Country Link
JP (1) JPH01196191A (Direct)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101327307B1 (ko) * 2006-11-27 2013-11-11 주식회사 미코 다층 기판 제조 방법 및 이를 이용한 정전척 제조 방법
US8974891B2 (en) 2007-10-26 2015-03-10 Coi Ceramics, Inc. Thermal protection systems comprising flexible regions of inter-bonded lamina of ceramic matrix composite material and methods of forming the same
JP5333308B2 (ja) * 2009-05-11 2013-11-06 株式会社デンソー セラミック積層体の製造方法

Also Published As

Publication number Publication date
JPH01196191A (ja) 1989-08-07

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Legal Events

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