JPH0520505B2 - - Google Patents

Info

Publication number
JPH0520505B2
JPH0520505B2 JP1170492A JP17049289A JPH0520505B2 JP H0520505 B2 JPH0520505 B2 JP H0520505B2 JP 1170492 A JP1170492 A JP 1170492A JP 17049289 A JP17049289 A JP 17049289A JP H0520505 B2 JPH0520505 B2 JP H0520505B2
Authority
JP
Japan
Prior art keywords
mist
chamber
fog
film forming
spray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1170492A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0336279A (ja
Inventor
Mizuho Imai
Atsuo Ito
Mikio Sekiguchi
Hideyo Iida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Yuden Co Ltd
Original Assignee
Taiyo Yuden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Yuden Co Ltd filed Critical Taiyo Yuden Co Ltd
Priority to JP1170492A priority Critical patent/JPH0336279A/ja
Priority to DE90112300T priority patent/DE69003182T2/de
Priority to EP90112300A priority patent/EP0405527B1/en
Priority to AU58031/90A priority patent/AU622816B2/en
Publication of JPH0336279A publication Critical patent/JPH0336279A/ja
Priority to US07/726,622 priority patent/US5114076A/en
Publication of JPH0520505B2 publication Critical patent/JPH0520505B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Chemically Coating (AREA)
  • Electrodes Of Semiconductors (AREA)
JP1170492A 1989-06-30 1989-06-30 霧化薄膜形成用霧供給装置 Granted JPH0336279A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP1170492A JPH0336279A (ja) 1989-06-30 1989-06-30 霧化薄膜形成用霧供給装置
DE90112300T DE69003182T2 (de) 1989-06-30 1990-06-27 Zerstäuber zur Bildung einer dünnen Schicht.
EP90112300A EP0405527B1 (en) 1989-06-30 1990-06-27 Atomizer for forming a thin film
AU58031/90A AU622816B2 (en) 1989-06-30 1990-06-29 Atomizer for forming a thin film
US07/726,622 US5114076A (en) 1989-06-30 1991-06-27 Atomizer for forming a thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1170492A JPH0336279A (ja) 1989-06-30 1989-06-30 霧化薄膜形成用霧供給装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP22476892A Division JP2534977B2 (ja) 1992-07-31 1992-07-31 霧化薄膜形成用霧供給装置

Publications (2)

Publication Number Publication Date
JPH0336279A JPH0336279A (ja) 1991-02-15
JPH0520505B2 true JPH0520505B2 (cs) 1993-03-19

Family

ID=15905969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1170492A Granted JPH0336279A (ja) 1989-06-30 1989-06-30 霧化薄膜形成用霧供給装置

Country Status (1)

Country Link
JP (1) JPH0336279A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007032143A1 (ja) * 2005-09-13 2007-03-22 Fujikura Ltd. 成膜装置および成膜方法
JP2007077433A (ja) * 2005-09-13 2007-03-29 Fujikura Ltd 成膜装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3814322A (en) * 1973-07-12 1974-06-04 Amchem Prod Mist coating of strip material
GB8319227D0 (en) * 1983-07-15 1983-08-17 Ici Plc Electrostatic spraying
JPS6428378A (en) * 1987-07-24 1989-01-30 Taiyo Yuden Kk Device for forming thin film with mist

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007032143A1 (ja) * 2005-09-13 2007-03-22 Fujikura Ltd. 成膜装置および成膜方法
JP2007077433A (ja) * 2005-09-13 2007-03-29 Fujikura Ltd 成膜装置

Also Published As

Publication number Publication date
JPH0336279A (ja) 1991-02-15

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