JPS6428378A - Device for forming thin film with mist - Google Patents

Device for forming thin film with mist

Info

Publication number
JPS6428378A
JPS6428378A JP18600687A JP18600687A JPS6428378A JP S6428378 A JPS6428378 A JP S6428378A JP 18600687 A JP18600687 A JP 18600687A JP 18600687 A JP18600687 A JP 18600687A JP S6428378 A JPS6428378 A JP S6428378A
Authority
JP
Japan
Prior art keywords
soln
vessel
nozzle
starting material
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18600687A
Other languages
Japanese (ja)
Inventor
Mitsuaki Kato
Kikuji Fukai
Atsuo Ito
Michiyo Munetsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Yuden Co Ltd
Original Assignee
Taiyo Yuden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Yuden Co Ltd filed Critical Taiyo Yuden Co Ltd
Priority to JP18600687A priority Critical patent/JPS6428378A/en
Publication of JPS6428378A publication Critical patent/JPS6428378A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B05B13/025—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the objects or work being present in bulk
    • B05B13/0257—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the objects or work being present in bulk in a moving container, e.g. a rotatable foraminous drum

Abstract

PURPOSE:To form thin films having a uniform thickness and uniform properties by placing a prescribed soln. separating chamber between a nozzle for spraying a starting material soln. and a vessel contg. substrates to be sprayed so as to stick only mist of fine particles to the substrates. CONSTITUTION:This device for forming thin films has a basketlike vessel 12 contg. granular substrates (a) placed in a heating furnace 11 and a means of feeding a misty starting material soln. into the vessel 12. A soln. separating chamber 16 is placed between the vessel 12 receiving the fed soln. and a nozzle 14 for spraying a starting material soln. The cross-sectional area of the passage of the chamber 16 is suddenly increased from that of the nozzle 14. The upper part of the chamber 16 is connected to the vessel 12.
JP18600687A 1987-07-24 1987-07-24 Device for forming thin film with mist Pending JPS6428378A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18600687A JPS6428378A (en) 1987-07-24 1987-07-24 Device for forming thin film with mist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18600687A JPS6428378A (en) 1987-07-24 1987-07-24 Device for forming thin film with mist

Publications (1)

Publication Number Publication Date
JPS6428378A true JPS6428378A (en) 1989-01-30

Family

ID=16180719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18600687A Pending JPS6428378A (en) 1987-07-24 1987-07-24 Device for forming thin film with mist

Country Status (1)

Country Link
JP (1) JPS6428378A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0336279A (en) * 1989-06-30 1991-02-15 Taiyo Yuden Co Ltd Fog supplying device for atomization thin film formation
US5474463A (en) * 1993-07-26 1995-12-12 Greystone Peripherals, Inc. Bay for receiving removable peripheral device
JP2007077433A (en) * 2005-09-13 2007-03-29 Fujikura Ltd Film deposition system
JP2007216903A (en) * 2006-02-20 2007-08-30 Mazda Motor Corp Lower vehicle body structure for automobile

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0336279A (en) * 1989-06-30 1991-02-15 Taiyo Yuden Co Ltd Fog supplying device for atomization thin film formation
US5474463A (en) * 1993-07-26 1995-12-12 Greystone Peripherals, Inc. Bay for receiving removable peripheral device
JP2007077433A (en) * 2005-09-13 2007-03-29 Fujikura Ltd Film deposition system
JP2007216903A (en) * 2006-02-20 2007-08-30 Mazda Motor Corp Lower vehicle body structure for automobile

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