DE69003182T2 - Zerstäuber zur Bildung einer dünnen Schicht. - Google Patents

Zerstäuber zur Bildung einer dünnen Schicht.

Info

Publication number
DE69003182T2
DE69003182T2 DE90112300T DE69003182T DE69003182T2 DE 69003182 T2 DE69003182 T2 DE 69003182T2 DE 90112300 T DE90112300 T DE 90112300T DE 69003182 T DE69003182 T DE 69003182T DE 69003182 T2 DE69003182 T2 DE 69003182T2
Authority
DE
Germany
Prior art keywords
atomizers
thin layer
thin
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE90112300T
Other languages
English (en)
Other versions
DE69003182D1 (de
Inventor
Mizuho Imai
Atsuo Ito
Mikio Sekiguchi
Hideyo Iida
Kikuji Fukai
Komei Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Yuden Co Ltd
Original Assignee
Taiyo Yuden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP17049389A external-priority patent/JPH0332760A/ja
Priority claimed from JP1170492A external-priority patent/JPH0336279A/ja
Application filed by Taiyo Yuden Co Ltd filed Critical Taiyo Yuden Co Ltd
Publication of DE69003182D1 publication Critical patent/DE69003182D1/de
Application granted granted Critical
Publication of DE69003182T2 publication Critical patent/DE69003182T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/0012—Apparatus for achieving spraying before discharge from the apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B14/00—Arrangements for collecting, re-using or eliminating excess spraying material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S261/00—Gas and liquid contact apparatus
    • Y10S261/65—Vaporizers
DE90112300T 1989-06-30 1990-06-27 Zerstäuber zur Bildung einer dünnen Schicht. Expired - Fee Related DE69003182T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP17049389A JPH0332760A (ja) 1989-06-30 1989-06-30 薄膜作製用霧化装置
JP1170492A JPH0336279A (ja) 1989-06-30 1989-06-30 霧化薄膜形成用霧供給装置

Publications (2)

Publication Number Publication Date
DE69003182D1 DE69003182D1 (de) 1993-10-14
DE69003182T2 true DE69003182T2 (de) 1994-04-28

Family

ID=26493475

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90112300T Expired - Fee Related DE69003182T2 (de) 1989-06-30 1990-06-27 Zerstäuber zur Bildung einer dünnen Schicht.

Country Status (4)

Country Link
US (1) US5114076A (de)
EP (1) EP0405527B1 (de)
AU (1) AU622816B2 (de)
DE (1) DE69003182T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69218974T2 (de) * 1991-02-04 1997-11-06 Agfa Gevaert Nv 4verfahren zum auftragen eines photographischen materials und station zur steuerung von stromzerstäubung
US5531831A (en) * 1994-12-12 1996-07-02 Minnesota Mining And Manufacturing Company Static blending device
JP4727355B2 (ja) * 2005-09-13 2011-07-20 株式会社フジクラ 成膜方法
DE602006016280D1 (de) * 2005-06-29 2010-09-30 Boehringer Ingelheim Int Verfahren und vorrichtung zum zerstäuben einer flüssigkeit
CN113634420B (zh) * 2021-09-24 2022-08-23 安徽柳溪智能装备有限公司 一种冷却管粉末喷涂机

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE513052C (de) * 1930-11-21 Ernst Silten Dr Regelbare Verneblerduese
US2709577A (en) * 1951-07-28 1955-05-31 Nat Welding Equipment Co Oxygen therapy humidifier
US3097645A (en) * 1960-03-22 1963-07-16 Victor E Lester Nebulizer
US3404843A (en) * 1967-01-23 1968-10-08 G S Internat Lab Corp Aerosol apparatus for inhalation therapy
AU2572467A (en) * 1967-08-09 1969-02-13 Ohg Supplies Limited Improvements in stencil spraying
NL142338B (nl) * 1968-02-28 1974-06-17 Showa Denko Kk Toestel ten gebruike bij een inrichting voor het bereiden van een aerosol van een chemische verbinding.
DE1951812A1 (de) * 1969-10-14 1971-04-22 Heimo Geraetebau Gmbh Verfahren und Vorrichtung zur feineren Zerstaeubung von in einem Nebelstrahl befindlichen Fluessigkeitstropfen und Pflanzenschutznebelgeraetes
FR2291800A1 (fr) * 1974-11-22 1976-06-18 Bertin & Cie Procede pour produire et distribuer un brouillard de particules liquides en suspension dans un milieu gazeux et dispositifs de mise en oeuvre du procede
US4007238A (en) * 1976-02-25 1977-02-08 Glenn Joseph G Nebulizer for use with IPPB equipment
US4116387A (en) * 1976-05-11 1978-09-26 Eastfield Corporation Mist generator
FR2573985B1 (fr) * 1984-11-30 1989-03-17 Diffusion Tech Fse Appareil nebulisateur perfectionne pour l'administration d'aerosols medicamenteux
US4792097A (en) * 1987-03-31 1988-12-20 Mallinckrodt, Inc. Non-sputtering nebulizer

Also Published As

Publication number Publication date
DE69003182D1 (de) 1993-10-14
AU5803190A (en) 1991-02-07
AU622816B2 (en) 1992-04-16
EP0405527B1 (de) 1993-09-08
US5114076A (en) 1992-05-19
EP0405527A2 (de) 1991-01-02
EP0405527A3 (en) 1991-07-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee