DE69002502T2 - Verfahren zur Herstellung einer Metalloxidschicht. - Google Patents

Verfahren zur Herstellung einer Metalloxidschicht.

Info

Publication number
DE69002502T2
DE69002502T2 DE90106030T DE69002502T DE69002502T2 DE 69002502 T2 DE69002502 T2 DE 69002502T2 DE 90106030 T DE90106030 T DE 90106030T DE 69002502 T DE69002502 T DE 69002502T DE 69002502 T2 DE69002502 T2 DE 69002502T2
Authority
DE
Germany
Prior art keywords
producing
metal oxide
oxide layer
layer
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE90106030T
Other languages
English (en)
Other versions
DE69002502D1 (de
Inventor
Yutaka Hayashi
Atsuo Ito
Mizuho Imai
Hideyo Iida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
National Institute of Advanced Industrial Science and Technology AIST
Taiyo Yuden Co Ltd
Original Assignee
Agency of Industrial Science and Technology
Research Development Corp of Japan
Taiyo Yuden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Research Development Corp of Japan, Taiyo Yuden Co Ltd filed Critical Agency of Industrial Science and Technology
Publication of DE69002502D1 publication Critical patent/DE69002502D1/de
Application granted granted Critical
Publication of DE69002502T2 publication Critical patent/DE69002502T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/407—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/229—Non-specific enumeration
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
DE90106030T 1989-03-31 1990-03-29 Verfahren zur Herstellung einer Metalloxidschicht. Expired - Fee Related DE69002502T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1080956A JPH02258691A (ja) 1989-03-31 1989-03-31 透明導電膜の製造方法

Publications (2)

Publication Number Publication Date
DE69002502D1 DE69002502D1 (de) 1993-09-09
DE69002502T2 true DE69002502T2 (de) 1993-11-18

Family

ID=13732960

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90106030T Expired - Fee Related DE69002502T2 (de) 1989-03-31 1990-03-29 Verfahren zur Herstellung einer Metalloxidschicht.

Country Status (5)

Country Link
US (1) US5009928A (de)
EP (1) EP0390150B1 (de)
JP (1) JPH02258691A (de)
AU (1) AU621260B2 (de)
DE (1) DE69002502T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5433971A (en) * 1991-03-29 1995-07-18 Eastman Kodak Company Hydrogen sulfide gas sensor and precursor compounds for manufacture of same
US5900275A (en) * 1992-07-15 1999-05-04 Donnelly Corporation Method for reducing haze in tin oxide transparent conductive coatings
DE4337986C2 (de) * 1993-11-06 1996-06-05 Schott Glaswerke Verwendungen von Sn(IV)-Carboxylaten als Ausgangsverbindungen für Tauchlösungen zur Herstellung transparenter, elektrisch leitfähiger Einkomponentenschichten aus reinem oder dotiertem SnO¶2¶ auf Glassubstraten
WO2000015572A2 (en) 1998-09-17 2000-03-23 Libbey-Owens-Ford Co. Heat strengthened coated glass article and method for making same
JP2002038270A (ja) * 2000-07-27 2002-02-06 Murata Mfg Co Ltd 複合酸化物薄膜の製造方法及び製造装置
KR100905478B1 (ko) * 2001-10-05 2009-07-02 가부시키가이샤 브리지스톤 투명 전도성 필름 및 터치패널
CN100410198C (zh) * 2006-02-08 2008-08-13 中国科学院广州能源研究所 无光污染的二层膜结构镀膜玻璃
CN101619484B (zh) * 2009-07-29 2011-11-23 济南大学 一种在导电基体上生长单晶氧化铟薄膜的方法
JP2012150904A (ja) * 2011-01-17 2012-08-09 Sharp Corp 透明導電膜
JP7131739B2 (ja) * 2017-08-24 2022-09-06 株式会社Flosfia コロンバイトの結晶構造を有する単結晶膜、電子機器及び光学機器
JP7453605B2 (ja) * 2017-08-24 2024-03-21 株式会社Flosfia 単結晶膜の製造方法
JP6947047B2 (ja) * 2018-01-16 2021-10-13 トヨタ自動車株式会社 燃料電池用セパレータ及びその製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE879189A (fr) * 1978-10-19 1980-04-04 Bfg Glassgroup Procede de formation d'un revetement d'oxyde d'etain sur un support de verre chaud et produits ainsi obtenus
JPS59195531A (ja) * 1983-04-19 1984-11-06 Agency Of Ind Science & Technol ＳｎＯ↓２膜連続成長装置
US4571350A (en) * 1984-09-24 1986-02-18 Corning Glass Works Method for depositing thin, transparent metal oxide films
US4548836A (en) * 1985-02-25 1985-10-22 Ford Motor Company Method of making an infrared reflective glass sheet-II
KR920007956B1 (ko) * 1985-05-14 1992-09-19 엠 앤드 티 케미칼즈 인코포레이션 헤이즈가 없는 투명한 산화주석코팅막의 제조방법
US4776870A (en) * 1985-08-05 1988-10-11 Ford Motor Company Method for improving emmissivity value of a pyrolytically applied film
JPS6264007A (ja) * 1985-09-17 1987-03-20 松下電器産業株式会社 透明導電膜及びその形成方法
US4788079A (en) * 1985-10-30 1988-11-29 M&T Chemicals Inc. Method of making haze-free tin oxide coatings
US4880664A (en) * 1987-08-31 1989-11-14 Solarex Corporation Method of depositing textured tin oxide

Also Published As

Publication number Publication date
DE69002502D1 (de) 1993-09-09
AU5142490A (en) 1990-10-04
EP0390150B1 (de) 1993-08-04
JPH02258691A (ja) 1990-10-19
EP0390150A1 (de) 1990-10-03
US5009928A (en) 1991-04-23
AU621260B2 (en) 1992-03-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee