JPH05198B2 - - Google Patents
Info
- Publication number
- JPH05198B2 JPH05198B2 JP59034855A JP3485584A JPH05198B2 JP H05198 B2 JPH05198 B2 JP H05198B2 JP 59034855 A JP59034855 A JP 59034855A JP 3485584 A JP3485584 A JP 3485584A JP H05198 B2 JPH05198 B2 JP H05198B2
- Authority
- JP
- Japan
- Prior art keywords
- robot
- work robot
- work
- power supply
- supply rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 description 11
- 239000000843 powder Substances 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 238000005192 partition Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 229910001111 Fine metal Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
Landscapes
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
- Manipulator (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59034855A JPS60180789A (ja) | 1984-02-25 | 1984-02-25 | クリ−ンル−ム内作業ロボツト装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59034855A JPS60180789A (ja) | 1984-02-25 | 1984-02-25 | クリ−ンル−ム内作業ロボツト装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60180789A JPS60180789A (ja) | 1985-09-14 |
JPH05198B2 true JPH05198B2 (sv) | 1993-01-05 |
Family
ID=12425786
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59034855A Granted JPS60180789A (ja) | 1984-02-25 | 1984-02-25 | クリ−ンル−ム内作業ロボツト装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60180789A (sv) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62166412A (ja) * | 1986-01-18 | 1987-07-22 | Fanuc Ltd | 移動型産業用ロボツト |
JP2609588B2 (ja) * | 1986-05-14 | 1997-05-14 | 株式会社東芝 | 浮上式搬送装置 |
JPH0627349Y2 (ja) * | 1987-05-21 | 1994-07-27 | 三菱電機株式会社 | ロボツトハンド |
JPH0251085U (sv) * | 1988-09-30 | 1990-04-10 | ||
DE4430846C2 (de) * | 1994-08-31 | 1997-04-10 | Jenoptik Jena Gmbh | Einrichtung zur Umsetzung eines Transportobjektes zwischen zwei Endlagen |
DE4430844C1 (de) * | 1994-08-31 | 1996-02-22 | Jenoptik Technologie Gmbh | Beschickungseinrichtung für Halbleiterbearbeitungsanlagen |
JPH08294883A (ja) * | 1995-04-26 | 1996-11-12 | Enshu Ltd | 多関節アーム式搬送方法 |
JP2009248197A (ja) * | 2008-04-01 | 2009-10-29 | Denso Wave Inc | ロボット及び生産システム |
JP2012101869A (ja) * | 2010-11-08 | 2012-05-31 | Okamura Corp | 物品搬送装置 |
DE102021214727A1 (de) * | 2021-12-20 | 2023-06-22 | Festo Se & Co. Kg | Handhabungssystem |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58137576A (ja) * | 1982-02-05 | 1983-08-16 | トヨタ自動車株式会社 | 自走式汎用ロ−ダ装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS505190U (sv) * | 1973-05-11 | 1975-01-20 |
-
1984
- 1984-02-25 JP JP59034855A patent/JPS60180789A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58137576A (ja) * | 1982-02-05 | 1983-08-16 | トヨタ自動車株式会社 | 自走式汎用ロ−ダ装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS60180789A (ja) | 1985-09-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |