JPH05196714A - Laminated ceramic superconducting magnetoresistance element - Google Patents

Abstract

PURPOSE:To improve magnetism detecting sensitivity without increasing an occupying area. CONSTITUTION:On one surface of a substrate 2, on which copper is formed by vapor deposition, YBa2C3O7-x is provided by electrodeposition, and a superconductor wire 3 is formed. A starting terminal 4 is provided at one end of each substrate. Meanwhile, a terminating terminal 5 is provided at the other end. Thus, a superconductive resistor element 1 is formed. Four superconductive resistor elements 1a, 1b, 1c and 1d are laminated so that the sides of superconductor wires 3a, 3b, 3c and 3d are aligned in the same direction. Electrodes 6a and 7a are attached to the starting terminal 4a of the uppermost superconductive resistor element 1a. Meaxawhile, electrodes 6d and 7d are attached to the terminating terminal 5d of the lowermost superconductive resistor element 1d. The terminating terminals 5a, 5b and 5c of the upper superconductive resistor elements 1a, 1b and 1c are sequentially connected to the starting terminals 4b, 4c and 4d of the lower superconductive resistor layers 1b, 1c and 16 with copper wires 8, 9 and 10. Thus, the length of the conductor wire is quadrpled with the same occupying area as with the superconductive resistor element 1a, and the magnetism detecting sensitivity with is improved to about twice is obtained.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated ceramic superconducting magnetoresistive element used in a ceramic superconducting magnetic sensor for measuring a minute magnetic field with high accuracy and high sensitivity.

[0002]

2. Description of the Related Art Conventionally, a magnetic sensor based on a magnetoresistive effect of a semiconductor or a magnetic material has been used for detecting and measuring a magnetic field. As the semiconductor magnetic sensor, a magnetic sensor using a shape effect such as InSb or InAs has been put into practical use. Further, as a magnetic substance magnetic sensor, a magnetic sensor using an orientation effect of Fe-perm alloy or CoNi has been put into practical use.

Further, as a magnetic sensor having a particularly high sensitivity, there is a superconducting quantum interference device (hereinafter abbreviated as SQUID). Furthermore, a ceramic superconducting magnetic sensor that utilizes the magnetoresistive effect caused by the crystal grain boundaries of the ceramic superconductor has been proposed.

[0004]

However, the above-mentioned conventional ceramic superconducting magnetic sensor has a problem that the measurement accuracy is poor when the magnetic field to be measured is weak because the rate of change of the resistance of the element with respect to the change of the magnetic field is small. .. Further, the SQUID has an extremely high sensitivity capable of measuring a weak magnetic field of about 10 ⁻¹⁰ Gauss. However, this S
The structure of the QUID is a structure in which a Josephson element having an ultrathin insulating film interposed is incorporated in a superconductor. Therefore, there is a problem in that it is difficult to manufacture the SQUID because a sophisticated technique is required to manufacture the Josephson device. Further, since the SQUID has a low output level, it requires a large-scale output detection system, and there is also a problem that its operation cannot be performed easily.

The above-described ceramic superconducting magnetic sensor utilizes the characteristics of the grain boundaries of the ceramic superconductor as described above. The grain boundaries are joined together by interposing an extremely thin insulating film or normal conducting film, or the grain boundaries. A set of ceramic superconducting particles in which points are weakly bonded is used. Therefore, the ceramic superconducting magnetic sensor as described above is characterized in that even if a weak magnetic field is applied, the superconducting state is broken from the grain boundary portion to the normal conducting state, and the electric resistance suddenly becomes large. ..

As described above, the above-mentioned ceramic superconducting magnetic sensor exhibits excellent magnetic characteristics. However, the ceramic superconducting magnetic sensors manufactured up to now have 10 ^-5.
Only a magnetic detection sensitivity of about 10 ^-6 Gauss / Hz ^-1/2 could be obtained. Therefore, in order to broaden the application and detect biomagnetism (especially magnetism from the heart), a magnetic detection sensitivity of about 10 ^-7 to 10 ^-8 Gauss / Hz ^-1/2 is required. It is desired to further increase the sensitivity of the ceramic superconducting magnetoresistive element used in the ceramic superconducting magnetic sensor.

Therefore, an object of the present invention is to provide a laminated ceramic superconducting magnetoresistive element capable of improving the magnetic detection sensitivity without increasing the occupied area.

[0008]

In order to achieve the above object, in the multilayer ceramic superconducting magnetoresistive element of the first invention, the superconducting state is destroyed from the grain boundary portion of the ceramic superconductor by a magnetic field applied from the outside. The electrical resistance between the ceramic superconducting films is changed so that the ceramic superconducting films are electrically insulated and laminated, and the laminated ceramic superconducting films are electrically connected in series to provide electrodes at both ends. It has a feature.

In the multilayer ceramic superconducting magnetoresistive element according to the second aspect of the invention, a plurality of substrates having the ceramic superconducting film deposited on one surface thereof have the same surface with the ceramic superconducting film deposited thereon. It is characterized in that the ceramic superconducting films laminated and laminated on all the substrates are electrically connected in series, and electrodes are provided at both ends of the ceramic superconducting films connected in series. .

In the multilayer ceramic superconducting magnetoresistive element according to the third aspect of the invention, the two substrates having the ceramic superconducting film deposited on one surface thereof face each other with the ceramic superconducting film side facing each other and an insulating film interposed therebetween. It is characterized in that the ceramic superconducting films laminated and laminated on all the substrates are electrically connected in series, and electrodes are provided at both ends of the ceramic superconducting films connected in series. ..

In the multilayer ceramic superconducting magnetoresistive element of the fourth invention, the ceramic superconductor films are deposited on both sides of the same substrate, and both ceramic superconductor films deposited on both sides of the same substrate are electrically connected. In series, and electrodes are provided at both ends of the ceramic superconductor film connected in series.

Further, in the multilayer ceramic superconducting magnetoresistive element of the fifth invention, a plurality of substrates having the ceramic superconducting films deposited on both surfaces are laminated through an insulating film, and all the laminated substrates are laminated. The ceramic superconducting films deposited on both surfaces of are electrically connected in series, and electrodes are provided at both ends of the ceramic superconducting films connected in series.

[0013]

In the first aspect of the invention, when a magnetic field is externally applied to the plurality of ceramic superconductor films which are electrically insulated and laminated, the ceramic superconductor film is superconducted from the grain boundary portion by the applied magnetic field. The state is destroyed and the resistance value changes. At this time, since the plurality of laminated ceramic superconductor films are electrically connected in series to form a larger area ceramic superconductor film, a large resistance change is exhibited even by a weak magnetic field. As a result, the voltage between the electrodes provided at both ends of the connected ceramic superconducting film or the current flowing through the connected ceramic superconducting film changes greatly even by a weak magnetic field.

In the second aspect of the invention, the ceramic superconductor films deposited on the same side surface of a plurality of laminated substrates are electrically connected in series to easily form a large area ceramic superconductor film. Is forming. Therefore, the ceramic superconductor films connected in series exhibit a large resistance change even if a weak magnetic field is applied from the outside.

In the third aspect of the invention, the ceramic superconductor film deposited on one surface of two substrates laminated with the ceramic superconductor film sides facing each other with an insulating film interposed therebetween is electrically connected in series. To form a large area ceramic superconductor film. Therefore, the ceramic superconductor films connected in series exhibit a large resistance change even if a weak magnetic field is applied from the outside.

In the fourth invention, the ceramic superconductor films deposited on both surfaces of the same substrate are electrically connected in series to form a ceramic superconductor film having a double area on one substrate. Is forming. Therefore, the ceramic superconductor films connected in series exhibit a large resistance change even if a weak magnetic field is applied from the outside.

According to the fifth aspect of the invention, the ceramic superconductor films deposited on both surfaces of a plurality of substrates laminated via insulating films are electrically connected in series, and the thickness is small and the area is large. The ceramic superconductor film of is formed. Therefore, the ceramic superconductor films connected in series exhibit a very large resistance change even if a weak magnetic field is applied from the outside.

[0018]

The present invention will be described in detail below with reference to the embodiments shown in the drawings. This invention forms a superconducting resistance element in which a ceramic superconductor film is formed on a substrate by an electrophoretic electrodeposition method capable of easily forming a thin film of a ceramic superconductor,
High sensitivity is obtained by stacking the superconducting resistance elements.

First Embodiment Copper is vacuum-deposited on a yttrium-stabilized zirconium (hereinafter abbreviated as YSZ) substrate. And, on the obtained copper vapor deposition YSZ substrate, Y
An electrode having a line width of 500 μm and a line length of 251 mm (hereinafter, referred to as “Ba ₂ Cu ₃ O _7-x powder” (hereinafter abbreviated as YBCO powder)) is electrodeposited.
An electrodeposition electrode) and a counter electrode having a line width of 100 μm and a line length of 251 mm are simultaneously patterned into a meander shape by photolithography.

Next, the copper-deposited YSZ substrate is placed in acetone in which YBCO powder is dispersed, and a negative potential is applied to the electrodeposition electrode, while a positive potential is applied to the counter electrode to perform electrophoresis. YBCO powder by copper deposition Y
Electrodeposit on SZ substrate. Then, the copper-deposited YSZ substrate on which the YBCO powder is electrodeposited is annealed at 900 ° C. for 3 hours to form a superconducting resistance element.

In this embodiment, four superconducting resistance elements formed as described above are used to form a laminated ceramic superconducting magnetoresistive element having a structure as shown in FIG. In FIG. 1, the four superconducting resistance elements 1a, 1b, 1c and 1d are laminated with the superconducting wires 3a, 3b, 3c and 3d side formed by electrodepositing YBCO powder facing the same direction.

Then, a current terminal 6a and a voltage terminal 7a are attached by silver paste to the starting terminal 4a of the superconducting wire 3a provided on one side of the copper-deposited YSZ substrate 2a of the superconducting resistance element 1a located at the uppermost layer. Further, a current terminal 6d and a voltage terminal 7d are attached to the terminator 5d of the superconducting wire 3d provided on one side of the copper-deposited YSZ substrate 2d of the superconducting resistance element 1d located in the lowermost layer.

Furthermore, a terminator 5a provided on the above-mentioned one side of the copper-deposited YSZ substrate 2a of the superconducting resistance element 1a located at the uppermost layer and one side of the copper-deposited YSZ substrate 2b of the superconducting resistance element 1b located second from the top. The start terminal 4b provided in
Connect with copper wire 8. Similarly, the terminators 5b and 5c provided on one side of the copper-deposited YSZ substrates 2b and 2c of the superconducting resistance elements 1b and 1c located on the upper side and the superconducting element 1 located on the lower side are similarly formed.
Copper wires 9 and 10 are sequentially connected to the start terminals 4c and 4d provided on one side of the c, 1d copper-deposited YSZ substrates 2c and 2d.

The monolithic ceramic superconducting magnetoresistive element thus formed has the same occupying area as one superconducting resistive element and is four times as long as the length of the superconducting wire formed in one superconducting element. It is possible to form a superconducting wire having a length.

A ceramic superconducting magnetic sensor was manufactured using the laminated ceramic superconducting magnetoresistive element formed as described above, and the magnetic characteristics were compared with the ceramic superconducting magnetic sensor manufactured using the one superconducting resistive element. First, 1
The magnetic conversion rate measured by applying a current of 20 mA to a ceramic superconducting magnetic sensor consisting of one superconducting resistance element is 12
5 mV / gauss, noise level 82.0 nV / Hz
^-1/2 , magnetic detection sensitivity is 8.3 × 10 ^-7 gauss / Hz
^-1/2 .

Next, the four superconducting resistance elements 1a, 1b,
Similarly, the magnetic conversion rate of the ceramic superconducting magnetic sensor consisting of 1c and 1d was 500 mV / gauss, the noise level was 164 nV / Hz ^-1/2 , and the magnetic detection sensitivity was 3.3 × 10 ^-7 gauss. / Hz- ¹ / ² . That is, as described above, by stacking four superconducting resistance elements having a magnetic detection sensitivity of 8.3 × 10 ⁻⁷ Gauss / Hz ^−1/2 and connecting them in series, the magnetic detection sensitivity of about twice is obtained. Is obtained.

As described above, in this embodiment, the superconducting wires 3a, 3b, 3c, 3d formed by evaporating the YBCO powder on the copper-deposited YSZ substrates 2a, 2b, 2c, 2d are formed. At one end of 3a, 3b, 3c, 3d, start terminals 4a, 4b, 4
c and 4d are provided, while terminators 5a, 5b, 5c and 5d are provided at the other end to form superconducting resistance elements 1a, 1b, 1c and 1d. The four superconducting resistance elements 1a, 1b, 1c, 1d thus obtained
Are stacked with the superconducting wires 3a, 3b, 3c, 3d side in the same direction, and the respective superconducting wires 3a, 3b, 3c, 3d are connected in series. Then, while the current terminal 6a and the voltage terminal 7a are attached to the starting terminal 4a of the superconducting resistance element 1a in the uppermost layer, the current terminal 6d and the voltage terminal 7d are attached to the terminator 5d of the superconducting resistance element 1d in the lowermost layer, A multilayer ceramic superconducting magnetoresistive element is manufactured.

As a result, in the above-mentioned laminated ceramic superconducting magnetoresistive element, the superconducting wire has the same occupying area as one superconducting resistive element 1a and four times as long as one superconducting resistive element 1a. Become. Therefore, a ceramic superconducting magnetic sensor using the above-mentioned laminated ceramic superconducting magnetoresistive element exhibits a magnetic detection sensitivity about twice that of a conventional ceramic superconducting magnetic sensor using one superconducting resistive element, and occupies an area occupied by the element. The magnetic detection sensitivity can be improved without increasing it.

<Second Embodiment> Two superconducting resistance elements are formed in the same manner as in the first embodiment. However, in the case of this embodiment, as shown in FIG. 2, both superconducting resistance elements 1e,
The superconducting wires 3e and 3f in 1f are formed so that the patterns thereof face each other. Next, the obtained two superconducting resistance elements 1e and 1f are laminated facing each other with the insulating film 12 interposed therebetween. The current terminal 6e and the voltage terminal 7e are attached to the start terminal 4e of the superconducting resistance element 1e, while the current terminal 6e is attached to the terminator 5f of the superconducting resistance element 1f.
Attach f and voltage terminal 7f. Further, the terminal element 5e of the superconducting resistance element 1e and the starting terminal 4f of the superconducting resistance element 1f are connected by the copper wire 11. Thus, the multilayer ceramic superconducting magnetoresistive element is formed.

A ceramic superconducting magnetic sensor was produced using the laminated ceramic superconducting magnetoresistive element formed as described above, and the same 20 mA current as in the first embodiment was passed to measure the magnetic characteristics. As a result, the magnetic conversion rate was 250 mV / gauss and the noise level was 116 nV /
The magnetic field sensitivity was Hz ^-1/2 , which was higher than that of the ceramic superconducting magnetic sensor manufactured by using the single superconducting resistance element described above, and exhibited a minimum magnetic flux resolution of 0.71 times.

<Third Embodiment> In the same manner as in the first embodiment, a superconducting wire is formed on both surfaces of a single copper-deposited YSZ substrate.
Provide a start terminal and terminator. At that time, as shown in FIGS. 3 (b) and 3 (c), the superconducting wire 23 ₁ , the start terminal 24 ₁ and the terminator 25 ₁ provided on one side surface of the copper-deposited YSZ substrate 22 and the other side surface are provided. The superconducting wire 23 ₂ , the start terminal 24 ₂ and the terminator 25 ₂ provided are formed so as to have a target pattern. That is, each of the superconducting wires 23 ₁ ,
23 ₂ , start terminals 24 ₁ and 24 ₂ , and terminators 25 ₁ and 25
_As shown in FIG. 3A, each pair of ₂ is formed on the front and back sides at the same location on one copper-deposited YSZ substrate 22.

A current terminal 26 ₁ and a voltage terminal 27 ₁ are provided on the front terminal 24 ₁ provided on the front side of the copper vapor-deposited YSZ substrate 22, while a current terminal 26 ₁ is provided on the terminator 25 ₂ provided on the back side. ₂ and a voltage terminal 27 ₂ . Further, the termination 25 ₁ provided on the front side and the start terminal 24 ₂ provided on the back side of the copper vapor deposition YSZ substrate 22 are connected by the copper wire 28. Thus, the multilayer ceramic superconducting magnetoresistive element 21 is formed. In that case, since the terminator 25 ₁ and the start terminal 24 ₂ are formed on the front and back sides at the same location of the copper-deposited YSZ substrate 22 as described above, the length of the copper wire 28 connecting them is minimized. You can do it.

A ceramic superconducting magnetic sensor manufactured by using the laminated ceramic superconducting magnetoresistive element 21 formed as described above is a ceramic superconducting manufactured by using the above-mentioned one superconducting resistive element in the first embodiment. The minimum magnetic flux resolution was 0.71 times that of the magnetic sensor.

<Fourth Embodiment> In the same manner as the third embodiment, one copper vapor-deposited YSZ substrate 22 has the same location on both sides.
Superconducting wire 23 _1, 23 _2, beginning terminals 24 _1, terminator 25 _2, and, terminator 25 _1, providing the start terminal 24 _2, be connected by the terminator 25 ₁ and start terminal 24 ₂ and the copper 28 Thus, the laminated superconducting resistance element 21 is formed.

In the present embodiment, the laminated ceramic superconducting magnetoresistive element having the structure shown in FIG. 4 is formed by using the four laminated superconducting resistive elements 21 manufactured as described above. is there. 4 (b) is shown in FIG. 4 (a).
FIG. 6 is a view of FIG. 6 viewed from the direction of the arrow (a). As shown in FIG. 4 (a), four stacked superconducting resistance elements 21g, 21h, 21i,
21j is laminated so that the superconducting wires 23g ₁ , 23h ₁ , 23i ₁ , 23j ₁ on the front side are oriented in the same direction with the insulating films 29, 30, 31 sandwiched therebetween, as shown in FIG. 4B. Then, while the current terminal 26g and the voltage terminal 27g are attached to the starting terminal 24g ₁ provided on the front side of the laminated superconducting resistance element 21g located in the uppermost layer by silver paste, the laminated superconducting resistance element 21j located in the lowermost layer is The current terminal 26j and the voltage terminal 27j are attached to the terminator 25j ₂ provided on the back side.

Furthermore, a terminator 25g ₂ provided on the back side of the laminated superconducting resistance element 21g located at the uppermost layer and a start terminal 24h ₁ provided on the front side of the laminated superconducting resistance element 21h located second from the top. And are connected by a copper wire 32. In the same manner, the terminators 25h ₂ and 25i ₂ provided on the back side of the laminated superconducting resistance elements 21h and 21i located on the upper side and the front sides of the laminated superconducting elements 21i and 21j located on the lower side are similarly provided. start terminal 24i _1, and 24j _1, is to sequentially connected with copper wire 33.

The multi-layer ceramic superconducting magnetoresistive element thus formed has the monolithic ceramic superconducting magnetoresistive element of the first embodiment without enlarging the area occupied by one superconducting resistive element shown in the first embodiment. 8 times the length of the superconducting wire formed in the above-mentioned one superconducting element (twice the length of the superconducting wire in the multilayer ceramic superconducting magnetoresistive element of the first embodiment), which is approximately the same thickness as the element. It is possible to obtain a superconducting wire having

The magnetic characteristics of the ceramic superconducting magnetic sensor manufactured by using the laminated ceramic superconducting magnetoresistive element formed as described above were measured by applying the same current of 20 mA as in the first embodiment. As a result, the magnetic conversion rate was 1 V / Gauss and the noise level was 232 nV / Hz.
^{It was -1/2} , and the minimum magnetic flux resolution was about 0.7 times that of the ceramic superconducting magnetic sensor manufactured by using the four superconducting resistance elements in which the superconducting wires were provided on only one side in the first embodiment. That is, the minimum magnetic resolution in the ceramic superconducting magnetic sensor manufactured by using the one superconducting resistance element in the first embodiment is about 0.35 times.

The method of forming the multilayer ceramic superconducting magnetoresistive element in the present invention is not limited to the method of forming in each of the above embodiments. That is, the method of forming the superconducting wire, the number of superconducting resistance elements, the method of connecting the superconducting resistance elements, and the like may be optimized as appropriate.

[0040]

As is clear from the above, the multilayer ceramic superconducting magnetoresistive element of the first invention has a resistance value that is destroyed by the magnetic field applied from the outside from the grain boundary portion of the ceramic superconductor to break the superconducting state. A plurality of changing ceramic superconducting films are electrically insulated and laminated, and the laminated ceramic superconducting films are electrically connected in series and electrodes are provided at both ends. The magnetic detection sensitivity can be improved without increasing it.

Further, in the multilayer ceramic superconducting magnetoresistive element of the second invention, a plurality of substrates having the above-mentioned ceramic superconductor film deposited on one surface thereof are arranged such that the surfaces on which the ceramic superconductor film is deposited are in the same direction. The ceramic superconducting films deposited on all the laminated substrates are electrically connected in series, and electrodes are provided at both ends of the ceramic superconducting films connected in series. Thus, the magnetic detection sensitivity can be improved without increasing the area occupied by the element.

Further, in the multilayer ceramic superconducting magnetoresistive element of the third invention, two substrates having the ceramic superconducting film deposited on one surface thereof are laminated with the ceramic superconducting film facing each other with an insulating film interposed therebetween. Then, the ceramic superconducting films deposited on all the laminated substrates are electrically connected in series, and electrodes are provided at both ends of the ceramic superconducting films connected in series. The magnetic detection sensitivity can be improved without increasing

In the multilayer ceramic superconducting magnetoresistive element according to the fourth aspect of the invention, the ceramic superconductor film is deposited on both sides of the same substrate, and both ceramic superconductor films deposited on both sides of the same substrate are electrically connected. , And the electrodes are provided at both ends of the ceramic superconducting film connected in series, the ceramic superconducting magnetoresistive element having high magnetic detection sensitivity can be formed thin without increasing its occupied area.

In the laminated ceramic superconducting magnetoresistive element according to the fifth aspect of the invention, a plurality of substrates having the ceramic superconducting films deposited on both sides are laminated with an insulating film interposed therebetween, and all the laminated substrates are laminated. Since the ceramic superconducting films deposited on both sides of the are electrically connected in series, and electrodes are provided at both ends of the ceramic superconducting films connected in series, a ceramic superconducting magnetoresistive element having higher magnetic detection sensitivity can be provided. It can be formed thin without increasing its occupied area.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of a structure according to a first embodiment of a multilayer ceramic superconducting magnetoresistive element of the present invention.

FIG. 2 is an explanatory diagram of a structure according to a second embodiment.

FIG. 3 is an explanatory diagram of a structure according to a third embodiment.

FIG. 4 is an explanatory diagram of a structure according to a fourth embodiment.

[Explanation of symbols]

1 a - 1 f ... superconducting resistive element, 2a~2d, 22,22g, ~22j ... copper deposition YSZ _{substrate, 3a~3f, 23 1, 23 2} , 23g 1 ~23j 1 ... superconducting wire, 4a~4f, 24 _1, 24 ₂ , 24g _{1 to} 24j ₁ ... Start terminal, 5a to 5f, 25 ₁ , 25 ₂ , 25g _{2 to} 25j ₂ ... Terminator, 6a, 6d, 6e, 6f, 26 ₁ , 26 ₂ , 26g, 26j ... Current Terminals, 7a, 7d, 7e, 7f, 27 ₁ , 27 ₂ , 27g, 27j ... Voltage terminals, 8-11, 28, 28g-28j, 32-34 ... Copper wires, 12, 29, 30, 31 ... Insulating film , 21 ... Multilayer ceramic superconducting magnetoresistive element, 21g to 21j ... Multilayer superconducting resistive element.

Front page continuation (72) Inventor Masaya Nagata 22-22 Nagaike-cho Naganocho, Abeno-ku, Osaka, Osaka Prefecture (72) Masayoshi Kiba 22-22 Nagaike-cho, Abeno-ku, Osaka, Osaka Prefecture

Claims (5)

[Claims] 1. A plurality of ceramic superconducting films, in which a superconducting state is destroyed from a grain boundary portion of the ceramic superconductor by an externally applied magnetic field to change a resistance value, are electrically insulated and laminated. A laminated ceramic superconducting magnetoresistive element, characterized in that each laminated ceramic superconducting film is electrically connected in series and electrodes are provided at both ends. 2. A plurality of substrates, each having a ceramic superconductor film on one side of which a superconducting state is destroyed from a grain boundary portion of the ceramic superconductor by an externally applied magnetic field and whose resistance value changes, The surfaces on which the films are deposited are stacked in the same direction, the ceramic superconductor films deposited on all the stacked substrates are electrically connected in series, and the ceramic superconductor films connected in series are connected. A multilayer ceramic superconducting magnetoresistive element, characterized in that electrodes are provided at both ends of the. 3. A ceramic superconducting film, wherein a superconducting state is destroyed from a grain boundary portion of the ceramic superconductor by an externally applied magnetic field to change a resistance value, and the two substrates having the ceramic superconducting film deposited on one surface are The body film sides are faced to each other and laminated via an insulating film, the ceramic superconductor films deposited on all the laminated substrates are electrically connected in series, and the ceramic superconductor films connected in series are connected. A multilayer ceramic superconducting magnetoresistive element, characterized in that electrodes are provided at both ends of the. 4. A ceramic superconducting film in which the superconducting state is destroyed from the grain boundary portion of the ceramic superconductor by an externally applied magnetic field and the resistance value changes, is deposited on both sides of the same substrate, and both sides of the same substrate are deposited. A laminated ceramic superconducting magnetoresistive element, characterized in that both deposited ceramic superconducting films are electrically connected in series, and electrodes are provided at both ends of the ceramic superconducting films connected in series. 5. A plurality of substrates, each having a ceramic superconducting film whose resistance is changed by destroying a superconducting state from a grain boundary portion of the ceramic superconductor by an externally applied magnetic field, through an insulating film. The ceramic superconductor films deposited on both surfaces of all the laminated substrates are electrically connected in series, and electrodes are provided at both ends of the ceramic superconductor films connected in series. Characteristic multilayer ceramic superconducting magnetoresistive element.