JPH0519517B2 - - Google Patents

Info

Publication number
JPH0519517B2
JPH0519517B2 JP14416789A JP14416789A JPH0519517B2 JP H0519517 B2 JPH0519517 B2 JP H0519517B2 JP 14416789 A JP14416789 A JP 14416789A JP 14416789 A JP14416789 A JP 14416789A JP H0519517 B2 JPH0519517 B2 JP H0519517B2
Authority
JP
Japan
Prior art keywords
molecular beam
substrate
crystal growth
beam source
hollow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14416789A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0312390A (ja
Inventor
Tatsu Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP14416789A priority Critical patent/JPH0312390A/ja
Publication of JPH0312390A publication Critical patent/JPH0312390A/ja
Publication of JPH0519517B2 publication Critical patent/JPH0519517B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP14416789A 1989-06-08 1989-06-08 分子線結晶成長装置 Granted JPH0312390A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14416789A JPH0312390A (ja) 1989-06-08 1989-06-08 分子線結晶成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14416789A JPH0312390A (ja) 1989-06-08 1989-06-08 分子線結晶成長装置

Publications (2)

Publication Number Publication Date
JPH0312390A JPH0312390A (ja) 1991-01-21
JPH0519517B2 true JPH0519517B2 (OSRAM) 1993-03-16

Family

ID=15355760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14416789A Granted JPH0312390A (ja) 1989-06-08 1989-06-08 分子線結晶成長装置

Country Status (1)

Country Link
JP (1) JPH0312390A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2260019A (en) * 1991-09-27 1993-03-31 Nsk Ltd Optical disk drive and read/write apparatus
US5656091A (en) * 1995-11-02 1997-08-12 Vacuum Plating Technology Corporation Electric arc vapor deposition apparatus and method

Also Published As

Publication number Publication date
JPH0312390A (ja) 1991-01-21

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term