JPH0519340Y2 - - Google Patents
Info
- Publication number
- JPH0519340Y2 JPH0519340Y2 JP14123587U JP14123587U JPH0519340Y2 JP H0519340 Y2 JPH0519340 Y2 JP H0519340Y2 JP 14123587 U JP14123587 U JP 14123587U JP 14123587 U JP14123587 U JP 14123587U JP H0519340 Y2 JPH0519340 Y2 JP H0519340Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- heat sink
- reaction tube
- crystal
- welded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 25
- 239000013078 crystal Substances 0.000 claims description 19
- 239000004065 semiconductor Substances 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- 239000012141 concentrate Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14123587U JPH0519340Y2 (enrdf_load_html_response) | 1987-09-16 | 1987-09-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14123587U JPH0519340Y2 (enrdf_load_html_response) | 1987-09-16 | 1987-09-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6445766U JPS6445766U (enrdf_load_html_response) | 1989-03-20 |
JPH0519340Y2 true JPH0519340Y2 (enrdf_load_html_response) | 1993-05-21 |
Family
ID=31406129
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14123587U Expired - Lifetime JPH0519340Y2 (enrdf_load_html_response) | 1987-09-16 | 1987-09-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0519340Y2 (enrdf_load_html_response) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0712030B2 (ja) * | 1989-12-22 | 1995-02-08 | スタンレー電気株式会社 | ▲ii▼―▲vi▼族化合物半導体結晶成長装置 |
US7823734B2 (en) * | 2005-09-12 | 2010-11-02 | Rtc Industries, Inc. | Product management display system with trackless pusher mechanism |
-
1987
- 1987-09-16 JP JP14123587U patent/JPH0519340Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS6445766U (enrdf_load_html_response) | 1989-03-20 |