JPS6116686Y2 - - Google Patents

Info

Publication number
JPS6116686Y2
JPS6116686Y2 JP6543480U JP6543480U JPS6116686Y2 JP S6116686 Y2 JPS6116686 Y2 JP S6116686Y2 JP 6543480 U JP6543480 U JP 6543480U JP 6543480 U JP6543480 U JP 6543480U JP S6116686 Y2 JPS6116686 Y2 JP S6116686Y2
Authority
JP
Japan
Prior art keywords
boat
substrate
substrate holding
holding boat
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6543480U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56164546U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6543480U priority Critical patent/JPS6116686Y2/ja
Publication of JPS56164546U publication Critical patent/JPS56164546U/ja
Application granted granted Critical
Publication of JPS6116686Y2 publication Critical patent/JPS6116686Y2/ja
Expired legal-status Critical Current

Links

JP6543480U 1980-05-12 1980-05-12 Expired JPS6116686Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6543480U JPS6116686Y2 (enrdf_load_html_response) 1980-05-12 1980-05-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6543480U JPS6116686Y2 (enrdf_load_html_response) 1980-05-12 1980-05-12

Publications (2)

Publication Number Publication Date
JPS56164546U JPS56164546U (enrdf_load_html_response) 1981-12-07
JPS6116686Y2 true JPS6116686Y2 (enrdf_load_html_response) 1986-05-22

Family

ID=29659584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6543480U Expired JPS6116686Y2 (enrdf_load_html_response) 1980-05-12 1980-05-12

Country Status (1)

Country Link
JP (1) JPS6116686Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS56164546U (enrdf_load_html_response) 1981-12-07

Similar Documents

Publication Publication Date Title
US5443649A (en) Silicon carbide carrier for wafer processing in vertical furnaces
JPH11176822A (ja) 半導体処理装置
US4904515A (en) Heat-treatment member for semiconductor elements
US4598665A (en) Silicon carbide process tube for semiconductor wafers
KR900000835B1 (ko) 서스펜션 캔릴레버(Suspension Cantilever) 로딩장치(Loading system)를 갖는 횡형로(橫型爐)
JP3285723B2 (ja) 半導体熱処理用治具及びその表面処理方法
JPS6116686Y2 (enrdf_load_html_response)
JPS633446B2 (enrdf_load_html_response)
JPH0227715A (ja) 気相成長装置用加熱ステージ
JP4826070B2 (ja) 半導体ウエーハの熱処理方法
JPS58182819A (ja) 加熱基台
JPH10199848A (ja) 炭化ケイ素ウエハの表面汚染除去方法および炭化ケイ素ウエハ
JPH046826A (ja) 熱処理装置
JPS62189726A (ja) 半導体気相成長用サセプタ
JPH0758035A (ja) 半導体基板用熱処理治具
JPH0438516Y2 (enrdf_load_html_response)
EP1748968A2 (en) Heat treating silicon carbide articles
JP4228347B2 (ja) ウェーハ支持体
JPH0628248B2 (ja) 二段拡散炉
JPH0240480Y2 (enrdf_load_html_response)
JPH01165138A (ja) 半導体材料を処理するための炭化珪素製試料保持具および薄片用カゴとその製造方法
JP2003100647A (ja) 半導体ウェーハの熱処理方法及び横型熱処理炉
JPH0151051B2 (enrdf_load_html_response)
JPH04372385A (ja) ウェハー搬送ロボット
KR20240007664A (ko) 반도체 구조물을 에칭하기 위한 방법들 및 프로세싱 반응기를 컨디셔닝하기 위한 방법들