JPH0519330Y2 - - Google Patents
Info
- Publication number
- JPH0519330Y2 JPH0519330Y2 JP1988022258U JP2225888U JPH0519330Y2 JP H0519330 Y2 JPH0519330 Y2 JP H0519330Y2 JP 1988022258 U JP1988022258 U JP 1988022258U JP 2225888 U JP2225888 U JP 2225888U JP H0519330 Y2 JPH0519330 Y2 JP H0519330Y2
- Authority
- JP
- Japan
- Prior art keywords
- ring
- vapor deposition
- substrate
- substrate holder
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 67
- 238000007740 vapor deposition Methods 0.000 claims description 31
- 238000001704 evaporation Methods 0.000 claims description 30
- 230000008020 evaporation Effects 0.000 claims description 29
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 16
- 238000000151 deposition Methods 0.000 description 15
- 230000008021 deposition Effects 0.000 description 13
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 10
- 229910001882 dioxygen Inorganic materials 0.000 description 10
- 239000013078 crystal Substances 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 230000000873 masking effect Effects 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 238000003825 pressing Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 238000007664 blowing Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988022258U JPH0519330Y2 (it) | 1988-02-22 | 1988-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988022258U JPH0519330Y2 (it) | 1988-02-22 | 1988-02-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01125362U JPH01125362U (it) | 1989-08-25 |
| JPH0519330Y2 true JPH0519330Y2 (it) | 1993-05-21 |
Family
ID=31240212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988022258U Expired - Lifetime JPH0519330Y2 (it) | 1988-02-22 | 1988-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519330Y2 (it) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5324915A (en) * | 1976-06-09 | 1978-03-08 | Motoren Werke Mannheim Ag | Exhaust piping for turbo supercharged internal combustion engine |
| JPS57111031A (en) * | 1980-12-27 | 1982-07-10 | Clarion Co Ltd | Sputtering device |
-
1988
- 1988-02-22 JP JP1988022258U patent/JPH0519330Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5324915A (en) * | 1976-06-09 | 1978-03-08 | Motoren Werke Mannheim Ag | Exhaust piping for turbo supercharged internal combustion engine |
| JPS57111031A (en) * | 1980-12-27 | 1982-07-10 | Clarion Co Ltd | Sputtering device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01125362U (it) | 1989-08-25 |
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