JPH0518795B2 - - Google Patents

Info

Publication number
JPH0518795B2
JPH0518795B2 JP59200220A JP20022084A JPH0518795B2 JP H0518795 B2 JPH0518795 B2 JP H0518795B2 JP 59200220 A JP59200220 A JP 59200220A JP 20022084 A JP20022084 A JP 20022084A JP H0518795 B2 JPH0518795 B2 JP H0518795B2
Authority
JP
Japan
Prior art keywords
substrate
diamond
screen mesh
electrode
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59200220A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6177697A (ja
Inventor
Kazutaka Fujii
Nobuaki Shohata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP59200220A priority Critical patent/JPS6177697A/ja
Publication of JPS6177697A publication Critical patent/JPS6177697A/ja
Publication of JPH0518795B2 publication Critical patent/JPH0518795B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/04—Diamond

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP59200220A 1984-09-25 1984-09-25 ダイヤモンドの気相合成法とその装置 Granted JPS6177697A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59200220A JPS6177697A (ja) 1984-09-25 1984-09-25 ダイヤモンドの気相合成法とその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59200220A JPS6177697A (ja) 1984-09-25 1984-09-25 ダイヤモンドの気相合成法とその装置

Publications (2)

Publication Number Publication Date
JPS6177697A JPS6177697A (ja) 1986-04-21
JPH0518795B2 true JPH0518795B2 (enrdf_load_stackoverflow) 1993-03-12

Family

ID=16420803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59200220A Granted JPS6177697A (ja) 1984-09-25 1984-09-25 ダイヤモンドの気相合成法とその装置

Country Status (1)

Country Link
JP (1) JPS6177697A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63239194A (ja) * 1987-03-27 1988-10-05 Idemitsu Petrochem Co Ltd ダイヤモンドの製造装置
JPS6418990A (en) * 1987-07-10 1989-01-23 Hitachi Ltd Production of diamond coating film
JPH0238397A (ja) * 1988-07-27 1990-02-07 Nec Corp 薄膜の成長方法及び成長装置
JPH02141494A (ja) * 1988-07-30 1990-05-30 Kobe Steel Ltd ダイヤモンド気相合成装置

Also Published As

Publication number Publication date
JPS6177697A (ja) 1986-04-21

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