JPH0518497Y2 - - Google Patents

Info

Publication number
JPH0518497Y2
JPH0518497Y2 JP1987123049U JP12304987U JPH0518497Y2 JP H0518497 Y2 JPH0518497 Y2 JP H0518497Y2 JP 1987123049 U JP1987123049 U JP 1987123049U JP 12304987 U JP12304987 U JP 12304987U JP H0518497 Y2 JPH0518497 Y2 JP H0518497Y2
Authority
JP
Japan
Prior art keywords
movable body
base
bearing
air supply
compressed air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987123049U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6427527U (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987123049U priority Critical patent/JPH0518497Y2/ja
Publication of JPS6427527U publication Critical patent/JPS6427527U/ja
Application granted granted Critical
Publication of JPH0518497Y2 publication Critical patent/JPH0518497Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP1987123049U 1987-08-10 1987-08-10 Expired - Lifetime JPH0518497Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987123049U JPH0518497Y2 (fr) 1987-08-10 1987-08-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987123049U JPH0518497Y2 (fr) 1987-08-10 1987-08-10

Publications (2)

Publication Number Publication Date
JPS6427527U JPS6427527U (fr) 1989-02-16
JPH0518497Y2 true JPH0518497Y2 (fr) 1993-05-17

Family

ID=31371548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987123049U Expired - Lifetime JPH0518497Y2 (fr) 1987-08-10 1987-08-10

Country Status (1)

Country Link
JP (1) JPH0518497Y2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017210996A (ja) * 2016-05-24 2017-11-30 ユニバーサル製缶株式会社 流体軸受のオリフィス着脱構造

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6110115A (ja) * 1985-05-22 1986-01-17 Hitachi Ltd 空気軸受式直進移動案内
JPS6215037A (ja) * 1985-07-09 1987-01-23 Canon Inc 移動テ−ブル装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6110115A (ja) * 1985-05-22 1986-01-17 Hitachi Ltd 空気軸受式直進移動案内
JPS6215037A (ja) * 1985-07-09 1987-01-23 Canon Inc 移動テ−ブル装置

Also Published As

Publication number Publication date
JPS6427527U (fr) 1989-02-16

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