JPH0518497Y2 - - Google Patents

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Publication number
JPH0518497Y2
JPH0518497Y2 JP1987123049U JP12304987U JPH0518497Y2 JP H0518497 Y2 JPH0518497 Y2 JP H0518497Y2 JP 1987123049 U JP1987123049 U JP 1987123049U JP 12304987 U JP12304987 U JP 12304987U JP H0518497 Y2 JPH0518497 Y2 JP H0518497Y2
Authority
JP
Japan
Prior art keywords
movable body
base
bearing
air supply
compressed air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987123049U
Other languages
Japanese (ja)
Other versions
JPS6427527U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987123049U priority Critical patent/JPH0518497Y2/ja
Publication of JPS6427527U publication Critical patent/JPS6427527U/ja
Application granted granted Critical
Publication of JPH0518497Y2 publication Critical patent/JPH0518497Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Description

【考案の詳細な説明】[Detailed explanation of the idea] 【産業上の利用分野】[Industrial application field]

本考案は、磁気デイスク記憶装置用ヘツドキヤ
リツジ等に用いられる静圧軸受式直動案内装置に
関するものである。
The present invention relates to a hydrostatic bearing type linear motion guide device used in a head carriage for a magnetic disk storage device and the like.

【従来技術】[Prior art]

従来、この種の高精度な位置決めを必要とする
直動案内装置として、第6図に示すようなものが
知られている。即ち、スライド方向に平行に配置
され、基台50上に両端を支持部材51により支
持された一対の丸軸の固定体52と、固定体52
に嵌挿された可動体53の内壁54に圧縮空気5
5を吹出すオリフイス56を形成し、固定体52
との間に環状の軸受スキマ57を設けて静圧空気
軸受を構成して可動体53をスライド自在に支承
している。
Conventionally, as a linear motion guide device that requires this type of highly accurate positioning, the one shown in FIG. 6 has been known. That is, a pair of round shaft fixed bodies 52 are arranged parallel to the sliding direction and supported at both ends by support members 51 on a base 50;
Compressed air 5 is applied to the inner wall 54 of the movable body 53 fitted into the
5 is formed, and the fixed body 52
An annular bearing gap 57 is provided between the movable body 53 and a static air bearing to support the movable body 53 in a slidable manner.

【考案が解決しようとする問題点】[Problem that the invention attempts to solve]

しかし、上記の従来のバーガイドスライドは、
次に挙げるような問題点があつた。 (イ) 2本の固定体52を、スライド方向に対し左
右上下の2方向平行に配置し、支持部材51に
固定することは、軸受スキマ57が小さいこと
もあり非常に大変な作業であり、スライド量が
大きくなればなる程困難性を増し、数μmの軸
受スキマ57を完全に保持することができな
い。 (ロ) 可動体53において、内壁54を2軸2方向
平行に寸法、形状を精度よく加工することは、
可動体53の長さが長くなる程、内壁54の孔
径が小さくなる程、又軸受スキマ57が小さく
なる程困難であつた。 (ハ) この種の装置の用途から云つても比較的軽荷
重にもかかわらず、装置が大型化し、位置決め
制御の面から要求される可動体53の軽量化に
無理があつた。
However, the conventional bar guide slide mentioned above,
The following problems arose. (a) Arranging the two fixed bodies 52 parallel to the sliding direction in two directions (left, right, up and down) and fixing them to the support member 51 is a very difficult task, partly because the bearing clearance 57 is small. The larger the amount of sliding, the more difficult it becomes, and it becomes impossible to completely hold the bearing gap 57 of several μm. (b) In the movable body 53, accurately machining the dimensions and shape of the inner wall 54 parallel to two axes and two directions is as follows:
The longer the length of the movable body 53, the smaller the hole diameter of the inner wall 54, and the smaller the bearing gap 57, the more difficult it was. (c) Although the load is relatively light considering the use of this type of device, the device has become large and it has become impossible to reduce the weight of the movable body 53, which is required from the standpoint of positioning control.

【目的】【the purpose】

本考案は、このような従来の装置の欠点を除
き、高精度、小型化そして安価なバーガイドスラ
イドを提供することを目的としている。
The present invention aims to eliminate the drawbacks of the conventional device and provide a bar guide slide that is highly accurate, compact, and inexpensive.

【問題点を解決するための手段】 上記目的を達成するため本考案のバーガイドス
ライドは、平坦な基台上に両端を支持して固定さ
れた円柱形の案内用固定体と、上記基台と対向す
る平面を有する可動体とからなり、上記可動体を
上記固定体に嵌挿し、上記可動体と固定体との間
に環状の空〓を設けると共に、基台との間に二平
面の対向による空〓を設け、上記環状の空〓に圧
縮空気を放射方向に供給する静圧ラジアル軸受を
構成し、上記二平面の対向による空〓に可動体側
から基台側へ、その可動体の垂直中心線を基準と
して対称形に両側へ拡がる方向に圧縮空気を供給
する静圧平面軸受を構成したものである。
[Means for Solving the Problems] In order to achieve the above object, the bar guide slide of the present invention includes a cylindrical guiding fixed body whose both ends are supported and fixed on a flat base, and the base The movable body is fitted into the fixed body, and an annular space is provided between the movable body and the fixed body, and a two-plane plane is provided between the movable body and the fixed body. A static pressure radial bearing is constructed by providing an air space facing each other and supplying compressed air radially to the annular air space, and the air flow from the movable body side to the base side in the air space formed by the two opposing planes. This is a static pressure plane bearing that supplies compressed air in a direction that spreads symmetrically to both sides with respect to a vertical centerline.

【実施例】【Example】

以下、本考案の実施例を第1図〜第5図に示す
添付図に基づいて詳細に説明する。 第1図は本考案の実施例を示す斜視図であつ
て、平坦な基台1上に平行に配置された丸軸から
なる固定体2が、一対の支持部材3により両端を
支持されている。第2図は断面図で、この固定体
2との間に環状の空〓を設けて嵌挿された可動体
4の内壁5には圧縮空気を吹出すオリフイス6が
放射方向に複数個配置され静圧ラジアル軸受Rを
構成している。可動体4の上下に平坦面が形成さ
れ、上面7には例えば記憶装置用ヘツド(図示せ
ず)が載置され、下面8は基台1に10数μmのス
キマを介して平行に配置され、可動体4に形成し
た環状の給気溝9に連通する給気ノズル10が開
口している。この給気ノズル10が吹出される圧
縮空気により、下面8と基台1との間で静圧平面
軸受Pを構成し、可動体4の回転自由度を拘束し
ている。可動体4の回転運動に対する角度剛性を
高めるため、給気ノズル10は可動体4の垂直中
心線を基準として対称形に両側へ傾斜した角度に
形成され、一方基台1の中央には、スライド方向
に延びる直線の排気溝11が形成されている。上
記静圧ラジアル軸受Rと静圧平面軸受Pに供給さ
れる圧縮空気は、共通の給気孔12から供給され
給気コネクタ12′を介してコンプレツサ等の給
気源(図示せず)に連結されている。第3図は可
動体4をスライド方向に切断した断面図である。
可動体4は外筒13と、それに焼嵌め等で嵌着さ
れたスリーブ14とで構成されており、スリーブ
14には静圧ラジアル軸受Rに圧縮空気を吹出す
オリフイス6がスライド方向に、又、外筒13に
は静圧平面軸受Pに圧縮空気を吹出す給気ノズル
10が並設されている。 オリフイス6はスリーブ14の外周に形成され
た環状給気溝9の底部に設けられている。環状給
気溝9及び給気ノズル10はスライド方向に延び
る連通溝15により、給気孔12に連通し、共通
の給気孔12により静圧ラジアル軸受R及び静圧
平面軸受Pに夫々圧縮空気を供給している。な
お、給気ノズル10は別体のオリフイス16を接
着剤等で嵌着固定すれば、容易に形成できる。第
4図は他の実施例で、可動体17は上記同様外筒
18とスリーブ19とで構成されている。外筒1
8には静圧平面軸受Pに圧縮空気を吹出す給気ノ
ズル20がスライド方向に並設され、内周に形成
された環状給気溝21に連通している。一方スリ
ーブ19の内周には静圧ラジアル軸受Rに圧縮空
気を吹出すオリフイス22が形成されると共に、
外周には環状給気溝21とオリフイス22を連通
するスライド方向に延びる連通溝23が形成され
ている。 第5図は他の実施例で、可動体24が長くなつ
た場合、製作精度を維持させるため、幾つかに可
動体を分割し、合成樹脂等の弾性体25で連結さ
せたものである。これにより、夫々の可動体の製
作精度を緩和することができる。
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings shown in FIGS. 1 to 5. FIG. 1 is a perspective view showing an embodiment of the present invention, in which a fixed body 2 consisting of a round shaft arranged in parallel on a flat base 1 is supported at both ends by a pair of supporting members 3. . FIG. 2 is a cross-sectional view, in which a plurality of orifices 6 for blowing out compressed air are arranged in the radial direction on the inner wall 5 of the movable body 4, which is fitted with an annular cavity provided between it and the fixed body 2. It constitutes a static pressure radial bearing R. Flat surfaces are formed on the upper and lower sides of the movable body 4, for example, a storage device head (not shown) is placed on the upper surface 7, and the lower surface 8 is arranged parallel to the base 1 with a gap of about 10 μm in between. , an air supply nozzle 10 communicating with an annular air supply groove 9 formed in the movable body 4 is open. The compressed air blown by the air supply nozzle 10 forms a static pressure plane bearing P between the lower surface 8 and the base 1, and restricts the rotational freedom of the movable body 4. In order to increase the angular rigidity with respect to the rotational movement of the movable body 4, the air supply nozzle 10 is formed at an angle symmetrically inclined to both sides with respect to the vertical center line of the movable body 4. A straight exhaust groove 11 extending in the direction is formed. The compressed air supplied to the static pressure radial bearing R and the static pressure plane bearing P is supplied from a common air supply hole 12 and connected to an air supply source (not shown) such as a compressor via an air supply connector 12'. ing. FIG. 3 is a sectional view of the movable body 4 taken in the sliding direction.
The movable body 4 is composed of an outer cylinder 13 and a sleeve 14 that is fitted into the outer cylinder 13 by shrink fitting or the like.The sleeve 14 has an orifice 6 that blows out compressed air to the hydrostatic radial bearing R in the sliding direction or in the sliding direction. In the outer cylinder 13, an air supply nozzle 10 for blowing compressed air to the static pressure plane bearing P is arranged in parallel. The orifice 6 is provided at the bottom of an annular air supply groove 9 formed on the outer periphery of the sleeve 14. The annular air supply groove 9 and the air supply nozzle 10 communicate with the air supply hole 12 through a communication groove 15 extending in the sliding direction, and the common air supply hole 12 supplies compressed air to the hydrostatic radial bearing R and the hydrostatic plane bearing P, respectively. are doing. Note that the air supply nozzle 10 can be easily formed by fitting and fixing a separate orifice 16 with an adhesive or the like. FIG. 4 shows another embodiment, in which the movable body 17 is composed of an outer cylinder 18 and a sleeve 19 as described above. Outer cylinder 1
At 8, air supply nozzles 20 for blowing out compressed air to the static pressure plane bearing P are arranged in parallel in the sliding direction and communicated with an annular air supply groove 21 formed on the inner periphery. On the other hand, an orifice 22 is formed on the inner periphery of the sleeve 19 to blow out compressed air to the static pressure radial bearing R.
A communication groove 23 extending in the sliding direction is formed on the outer periphery and communicates the annular air supply groove 21 with the orifice 22 . FIG. 5 shows another embodiment in which the movable body 24 is divided into several parts and connected by elastic bodies 25 made of synthetic resin or the like in order to maintain manufacturing accuracy when the movable body 24 becomes long. Thereby, the manufacturing precision of each movable body can be relaxed.

【効果】【effect】

以上のような構成にしたので本考案は、軽量コ
ンパクトなバーガイドスライドを提供でき、特に
高い製作精度も必要とせず、装置の組立に際して
も簡単な調整だけで高い精度のものが得られる。
又、例えばスライド量が大きいものであつても、
その組立の容易さは変わらない。 更に、可動体と固定体との間に静圧軸受は、両
側へ対称形に拡がる方向に圧縮空気を供給するよ
うになつているので、可動体の回転運動に対する
角度剛性を高める効果がある。
With the above configuration, the present invention can provide a lightweight and compact bar guide slide, and does not require particularly high manufacturing precision, and high precision can be obtained with only simple adjustments when assembling the device.
Also, for example, even if the sliding amount is large,
The ease of assembly remains the same. Further, since the static pressure bearing between the movable body and the fixed body is designed to supply compressed air in a direction that spreads symmetrically to both sides, it has the effect of increasing the angular rigidity with respect to the rotational movement of the movable body.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の実施例を示す斜視図、第2図
は本考案の実施例の断正面図、第3図は本考案に
適用される可動体の断側面図、第4図は本考案に
適用される可動体の他の実施例を示す断側面図、
第5図は本考案の他の実施例の側面図、第6図は
従来のバーガイドスライドを示す斜視図である。 1……基台、2……支持部材、3……固定体、
4,17,24……可動体、6,22……オリフ
イス、9,21……環状給気溝、10,20……
給気ノズル、12……給気孔、13,18……外
筒、14,19……スリーブ、15,23……連
通溝、P……静圧平面軸受、R……静圧ラジアル
軸受。
Fig. 1 is a perspective view showing an embodiment of the present invention, Fig. 2 is a sectional front view of an embodiment of the invention, Fig. 3 is a sectional side view of a movable body applied to the invention, and Fig. 4 is a main body. A cross-sectional side view showing another embodiment of the movable body applied to the invention,
FIG. 5 is a side view of another embodiment of the present invention, and FIG. 6 is a perspective view of a conventional bar guide slide. 1... Base, 2... Support member, 3... Fixed body,
4, 17, 24... Movable body, 6, 22... Orifice, 9, 21... Annular air supply groove, 10, 20...
Air supply nozzle, 12... Air supply hole, 13, 18... Outer cylinder, 14, 19... Sleeve, 15, 23... Communication groove, P... Hydrostatic pressure plane bearing, R... Hydrostatic pressure radial bearing.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 平坦な基台上に両端を支持して固定された円柱
形の案内用固定体と、上記基台と対向する平面を
有する可動体とからなり、上記可動体を上記固定
体に嵌挿し、上記可動体と固定体との間に環状の
空〓を設けると共に、基台との間に二平面の対向
による空〓を設け、上記環状の空〓に圧縮空気を
放射方向に供給する静圧ラジアル軸受を構成し、
上記二平面の対向による空〓に可動体側から基台
側へ、その可動体の垂直中心線を基準として対称
形に両側へ拡がる方向に圧縮空気を供給する静圧
平面軸受を構成してなるカバーガイドスライド。
It consists of a cylindrical guide fixed body supported and fixed at both ends on a flat base, and a movable body having a plane facing the base, and the movable body is inserted into the fixed body, and the above-mentioned A static pressure radial system that provides an annular space between the movable body and the fixed body, and also provides a space between the base and the base by two planes facing each other, and supplies compressed air radially to the annular space. constitutes a bearing,
A cover configured with a hydrostatic plane bearing that supplies compressed air from the movable body side to the base side in a direction that spreads symmetrically to both sides with the vertical center line of the movable body as a reference. guide slide.
JP1987123049U 1987-08-10 1987-08-10 Expired - Lifetime JPH0518497Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987123049U JPH0518497Y2 (en) 1987-08-10 1987-08-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987123049U JPH0518497Y2 (en) 1987-08-10 1987-08-10

Publications (2)

Publication Number Publication Date
JPS6427527U JPS6427527U (en) 1989-02-16
JPH0518497Y2 true JPH0518497Y2 (en) 1993-05-17

Family

ID=31371548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987123049U Expired - Lifetime JPH0518497Y2 (en) 1987-08-10 1987-08-10

Country Status (1)

Country Link
JP (1) JPH0518497Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017210996A (en) * 2016-05-24 2017-11-30 ユニバーサル製缶株式会社 Orifice removable structure of fluid bearing

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6110115A (en) * 1985-05-22 1986-01-17 Hitachi Ltd Air-bearing type straight advance guide
JPS6215037A (en) * 1985-07-09 1987-01-23 Canon Inc Movable table device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6110115A (en) * 1985-05-22 1986-01-17 Hitachi Ltd Air-bearing type straight advance guide
JPS6215037A (en) * 1985-07-09 1987-01-23 Canon Inc Movable table device

Also Published As

Publication number Publication date
JPS6427527U (en) 1989-02-16

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