JPS6110115A - Air-bearing type straight advance guide - Google Patents

Air-bearing type straight advance guide

Info

Publication number
JPS6110115A
JPS6110115A JP10813385A JP10813385A JPS6110115A JP S6110115 A JPS6110115 A JP S6110115A JP 10813385 A JP10813385 A JP 10813385A JP 10813385 A JP10813385 A JP 10813385A JP S6110115 A JPS6110115 A JP S6110115A
Authority
JP
Japan
Prior art keywords
bearing
fixed shaft
guide
air
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10813385A
Other languages
Japanese (ja)
Inventor
Takeshi Tajima
但馬 武
Sukeo Saito
斉藤 翼生
Takeo Irie
入江 建夫
Masabumi Kanetomo
正文 金友
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10813385A priority Critical patent/JPS6110115A/en
Publication of JPS6110115A publication Critical patent/JPS6110115A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • F16C29/02Sliding-contact bearings
    • F16C29/025Hydrostatic or aerostatic
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Moving Of Heads (AREA)

Abstract

PURPOSE:To enable highly accurate straight advance guide by constructing a static pressure air-bearing in the direction perpendicular against the axis of two guides while opening the direction parallel with a plane to be formed by the axes of two guides. CONSTITUTION:The fixed shaft 11 which will be the reference of moving direction has circular cross-section and fitted with a movable carriage 12 through a movable bearing 15 having an orifice 14 for blowing the compressed air 13 while maintaining a bearing gap 16 of several mum thus to construct a static air-bearing with the fixed shaft 11 and th movable bearing 15 and to serve as a guide at the referential side. The fixed shaft 19 at the opposite side has U-shaped cross- section and fitted with a movable bearing 20 having rectangular cross-section. The direction (B)18 parallel with a plen to be formed by the axis of the fixed shaft 11 and the axis of fixed shaft which will serve as a guide at the opposite side is opened completely to never construct a static air-bearing.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、磁気ディスクメモリー装置用へットキャリノ
ジ等に用いられる空気軸受式直進移動案内の改良に関す
るものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an improvement in an air bearing type linear movement guide used in a head carriage for a magnetic disk memory device.

〔発明の背景〕[Background of the invention]

静圧空気軸受の持つ、ステイツスリノプがないこと、低
摩擦であること、優れた直進性が行らオ℃ること、およ
び寿命か半永久的であること等の長所を利用し、て、静
圧空気軸受を高密度磁気ディスクメモリー装置用ヘッド
キャリッジ等の高精度化置決めを要する叱較的軽荷屯(
数囮以ド)用直進移動機構の案内に用いる場合、従来は
、第1図のような構造が一般的であった。即ち、移動方
向に平行に配置された断面円形軸を固定軸1どじ、移動
物2(ヘッドはアームに介してこれに取付く)に設けら
れた圧縮空気3を吹出すオリフィス4を持つ軸受穴5が
数μrnの軸受すきま6を保ってはまり合い、静圧空気
軸受を構成し、移動する構造であった。しかしこの構造
には次の欠点があった。
Taking advantage of the advantages of hydrostatic air bearings, such as the absence of static pressure, low friction, excellent straightness, and semi-permanent life, Bearings are used for relatively light loads (
Conventionally, when used for guiding a linear movement mechanism for several decoys, a structure as shown in FIG. 1 has been common. In other words, a shaft with a circular cross section arranged parallel to the moving direction is used as a fixed shaft 1, and a bearing hole is provided on a moving object 2 (to which the head is attached via an arm) and has an orifice 4 for blowing out compressed air 3. 5 were fitted together with a bearing clearance 6 of several μrn, forming a static pressure air bearing and moving. However, this structure had the following drawbacks.

(1)2本の固定軸を、移動方向に対し左右I−下の2
方向平行に配置し固定する(組\Vてる)ことは、軸受
すきまが小さいこともあり非常に大変な作業であり、移
動ストロークが大きくなればなるほど、困難性を増し、
数μmの軸受すきまを完全に保ち(固定軸と移動物間の
電気抵抗が無限大の状態)、静圧空気軸受の本来の性能
を発揮する際の障害となっていた。また移動物側につい
ても、軸受穴を2軸2方向平行に寸法、形状精度よく加
■二することは、移動物および軸受穴の長さが長くなる
程、また直径が小さくなる程軸受すきまが小さくなる程
大変となり、同上の障害となっていた。(2)断面円形
の固定軸と移動穴(軸受穴)からなる軸受は、一般に全
方向に剛性が均等であり、ある方向(移動方向に対して
縦、横)の剛性を特に大きくしたい時は、全方向に均等
に強くするため固定、移動側とも大寸法化し、装置が大
型化し、材料費がムダになることや、位置決め制御の方
から要求される移動物の軽量化が不可能であった。なお
、静圧空気軸受については、たとえば特開1@54−1
55862号公報に記載さ九ている。
(1) Connect the two fixed axes to the left and right I-lower 2 in the direction of movement.
Arranging and fixing the bearings parallel to each other (assembly/V-teru) is a very difficult task as the bearing clearance is small, and the larger the movement stroke, the more difficult it becomes.
Maintaining a perfect bearing clearance of several micrometers (a state in which the electrical resistance between the fixed shaft and the moving object is infinite) has been an obstacle to achieving the original performance of hydrostatic air bearings. Also, on the moving object side, it is important to machine the bearing holes parallel to the two axes in two directions with good dimensional and shape accuracy. The smaller the size, the more difficult it became, and it became the same obstacle. (2) Bearings consisting of a fixed shaft with a circular cross section and a movable hole (bearing hole) generally have equal rigidity in all directions. In order to provide uniform strength in all directions, both the fixed and moving sides have to be large, resulting in larger equipment, wasting material costs, and making it impossible to reduce the weight of moving objects, which is required for positioning control. Ta. Regarding static air bearings, for example, Japanese Patent Application Laid-open No. 1@54-1
It is described in Japanese Patent No. 55862.

〔発明の目的〕[Purpose of the invention]

本発明は、このような従来の空気軸受式直進移動案内の
欠点を除き、高精度で安価な静圧空気軸受式直進移動案
内を提供するものである。
The present invention eliminates the drawbacks of the conventional air bearing type linear movement guide and provides a highly accurate and inexpensive hydrostatic air bearing type linear movement guide.

〔発明の概要〕 以下、本発明になる案内を磁気ディスクメモリー装置関
連のヘッド移動部に応用した場合の例を示す。一般の磁
気ディスクメモリー装置のヘッド移動機構は、鋼球やご
ろを用いたころがり案内を用いている。装置の高密度化
のためには、ディスクの記録トラックとヘッドの位置関
係により、再生信号がどのように影響するかを、ヘッド
を0.1μmのオーダの量ずつ移動させながら調べる必
要があり、そのヘッドを搭載して移動するキャリッジの
精密位置決め機構の直進案内に本発明を応用した。
[Summary of the Invention] Hereinafter, an example will be shown in which the guide according to the present invention is applied to a head moving section related to a magnetic disk memory device. The head movement mechanism of a general magnetic disk memory device uses a rolling guide using steel balls or rollers. In order to increase the density of the device, it is necessary to examine how the reproduced signal is affected by the positional relationship between the recording track of the disk and the head while moving the head in steps of the order of 0.1 μm. The present invention was applied to the linear guide of a precision positioning mechanism for a carriage that carries the head and moves.

〔発明の実施例〕[Embodiments of the invention]

第2図は、本発明の一実施例を示す斜視図である。移動
方向の基準となる固定軸11は断面円形軸である。移動
するキャリッジ12は、圧縮空気13の吹出用オリフィ
ス14を持つ移動軸受15を介して固定軸に数μmの軸
受すきま16を保ってはまり合っており、固定軸と移動
軸受で静圧空気軸受を構成し移動基準側案内となる。南
回では、圧縮空気を送入するホースおよび、アームを介
してキャリッジに取イ」けられるヘッドは省略している
FIG. 2 is a perspective view showing one embodiment of the present invention. The fixed shaft 11, which serves as a reference for the moving direction, has a circular cross section. The moving carriage 12 is fitted onto a fixed shaft through a moving bearing 15 having an orifice 14 for blowing out compressed air 13, with a bearing gap 16 of several micrometers maintained. It is configured as a moving reference side guide. In the southern version, the hose that supplies compressed air and the head that is attached to the carriage via the arm are omitted.

移動基準側案内を構成するものにおける断面円形の軸と
穴は、精密加工技術を用いて数μmのすきまを保つよう
、寸法公差、真円度2円筒度等十分精度良く加工される
。これらと対をなす位置にある非移動基準側の固定軸1
9は断面形状が片カナのコの字形をしており、断面形状
が角形をしている移動軸受20がはまり合っている。角
形とコの字形の組合わせのため、移動基準案内となる固
定軸11の軸方向と直角をなす方向(へ方向)17は静
圧空気軸受を構成するように数μmのすきまを保ち、固
定軸11の軸線と、非移動基準案内どなる固定軸のほぼ
軸線とが構成する平面に平行な方向(B方向)18は、
完全に開放され静圧空気軸受を構成しない。即ちA方向
には十分な剛性を有し、B方向には剛性がない。このた
め。固定2軸の平行出しは、移動基準側円形軸を固定し
た後、上記へ方向のみ行えば完了する。移動物側も移動
基準側の円形軸受穴を基準として、へ方向のみの寸法公
差、平行度を注意して加工すればよい。
The shaft and hole with a circular cross section in what constitutes the movement reference side guide are machined with sufficient accuracy using precision machining technology to maintain a gap of several μm, including dimensional tolerances, roundness of 2 cylindrical degrees, etc. Fixed axis 1 on the non-moving reference side located opposite to these
Reference numeral 9 has a U-shaped cross section, and a moving bearing 20 having a rectangular cross section is fitted therein. Due to the combination of square and U-shaped, the direction 17 perpendicular to the axial direction of the fixed shaft 11, which serves as the movement reference guide, is fixed with a gap of several μm so as to constitute a static air bearing. A direction (direction B) 18 parallel to the plane formed by the axis of the shaft 11 and approximately the axis of the fixed shaft, which is the non-moving reference guide, is
It is completely open and does not constitute a static air bearing. That is, it has sufficient rigidity in the A direction and no rigidity in the B direction. For this reason. Parallel alignment of the two fixed axes is completed by fixing the circular axis on the moving reference side and then performing only the above direction. The moving object side can also be machined using the circular bearing hole on the moving reference side as a reference, paying attention to the dimensional tolerance and parallelism only in the forward direction.

また非移動基準案内側の固定軸、移動軸受の関係は相対
的なものであり、第2図に示したものとは逆に、固定軸
を方形、移動軸受側をコの字形にしたものも考えられる
が、キャリッジの軽量化を重視する場合は第2図のよう
な組合せが有利である。さらに、前記へ方向の軸受面の
大きさを変えることにより、軸受剛性は可変であり、第
2図に示す実施例と異なり、耐ヨーイング性よりも、軸
受負荷容量、耐ピツチング性をより重視したい場合は、
へ方向を重力の方向に一致させるようにした第3図のよ
うな組合せも容易にtえられる。第3図は第2図を90
°回転させたようなものであるが、第2図とは逆に移動
軸をノ4カナのコの字形にした例であり、軸受構成方向
はへ方向17である。
Also, the relationship between the fixed shaft and the movable bearing on the non-moving reference guide side is relative, and contrary to what is shown in Figure 2, there is also a structure in which the fixed shaft is square and the movable bearing side is U-shaped. However, if weight reduction of the carriage is important, the combination shown in FIG. 2 is advantageous. Furthermore, by changing the size of the bearing surface in the above-mentioned direction, the bearing rigidity is variable, and unlike the embodiment shown in Fig. 2, it is preferable to place more emphasis on bearing load capacity and pitting resistance than on yawing resistance. In case,
A combination as shown in FIG. 3, in which the direction of gravity coincides with the direction of gravity, can also be easily obtained. Figure 3 shows Figure 2 at 90
This is an example in which the moving axis is shaped like a U-shape, contrary to FIG. 2, and the bearing configuration direction is in the direction 17.

〔発明の効果〕 以上のような構造としたため、本発明により次のような
利点が得られるようになった。
[Effects of the Invention] With the structure as described above, the following advantages can be obtained by the present invention.

(1)移動基準案内側の固定軸を所定の移動方向に固定
した後、非基準案内側では静圧空気軸受構成方向(前記
へ方向)のみ基準側に合わせればよいので、固定2軸の
平行出しが非常に容易となった。
(1) After fixing the fixed shaft on the movement reference guide side in a predetermined movement direction, on the non-reference guide side, it is only necessary to align the static pressure air bearing configuration direction (the above-mentioned direction) with the reference side, so the two fixed axes are parallel to each other. It became very easy to take out.

(2)  キャリッジ(移動物)側も、移動基準側の1
個の断面円形穴を、注意深く高精度に加工した後、それ
を基準にして、六方向のみの寸法公差、平行度を注意し
て加工すればよく、両軸の平行に留意する必要がなく、
加工が非常に容易となった。また第2図のC−Cでネジ
止め分離構造として、A方向の平行を見ながら調整固定
すること等も可能となった。
(2) The carriage (moving object) side also has 1 on the moving reference side.
After carefully and accurately machining a circular cross-sectional hole, it is only necessary to process the dimensional tolerance and parallelism in only six directions using that as a reference, and there is no need to pay attention to the parallelism of both axes.
Processing has become very easy. It is also now possible to adjust and fix while looking parallel to the A direction by creating a screw-separated structure at CC in Figure 2.

(3)  静圧空気軸受構成面の軸受面の大きさを変え
ることにより、軸受剛性は可変であり、2軸の並びを重
力方向に対して90’回転させることにより、耐ヨーイ
ング性を重視したり、または負荷容量、耐ピツチング性
を向上させたりすることが可能であり、応用範囲が広が
った・ なお、上記実施例では、ヘッドキャリッジに適用した場
合について説明したが、本発明はこれに限定されること
なく、広く適用可能であることはいうまでもない。
(3) Bearing rigidity is variable by changing the size of the bearing surface of the hydrostatic air bearing component, and by rotating the two axes by 90' with respect to the direction of gravity, emphasis is placed on yawing resistance. It is also possible to improve the load capacity and pitting resistance, and the range of application has expanded.In addition, in the above embodiment, the case where it is applied to a head carriage has been explained, but the present invention is not limited to this. Needless to say, it is widely applicable without any limitations.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の静圧空気軸受式直進移動案内を説明する
斜視図、第2図および第3図はそれぞれ本発明の実施例
をあられす斜視図である。 7・・・支えおよび台、11・・固定軸、12 ・キャ
リッジ513・圧縮空気、】4・オリフィス、15・・
・移動軸受、]6・・軸受すきま、19・・・非移動基
準側固定軸、20・・移動軸受。
FIG. 1 is a perspective view illustrating a conventional hydrostatic air bearing type linear movement guide, and FIGS. 2 and 3 are perspective views each showing an embodiment of the present invention. 7... Support and stand, 11... Fixed shaft, 12 - Carriage 513 - Compressed air, ] 4 - Orifice, 15...
- Moving bearing,] 6... Bearing clearance, 19... Non-moving reference side fixed shaft, 20... Moving bearing.

Claims (1)

【特許請求の範囲】[Claims] 移動方向に平行な2個の軸で構成される移動案内のうち
、一方を移動基準側、他方を非移動基準側とし、上記2
本の案内の軸方向と直角な方向に所定のすきまをもたせ
て静圧空気軸受を構成し、かつ上記2個の案内の軸線の
作る平面と平行な方向には軸受を構成することなく開放
にしたことを特徴とする空気軸受式直進移動案内。
Of the movement guides composed of two axes parallel to the movement direction, one is the movement reference side and the other is the non-movement reference side, and the above 2
A static pressure air bearing is configured with a predetermined clearance in the direction perpendicular to the axial direction of the book guide, and an open bearing is not configured in the direction parallel to the plane formed by the axes of the two guides. Air bearing type linear movement guide characterized by:
JP10813385A 1985-05-22 1985-05-22 Air-bearing type straight advance guide Pending JPS6110115A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10813385A JPS6110115A (en) 1985-05-22 1985-05-22 Air-bearing type straight advance guide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10813385A JPS6110115A (en) 1985-05-22 1985-05-22 Air-bearing type straight advance guide

Publications (1)

Publication Number Publication Date
JPS6110115A true JPS6110115A (en) 1986-01-17

Family

ID=14476765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10813385A Pending JPS6110115A (en) 1985-05-22 1985-05-22 Air-bearing type straight advance guide

Country Status (1)

Country Link
JP (1) JPS6110115A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6427527U (en) * 1987-08-10 1989-02-16
JPH01168272A (en) * 1987-11-23 1989-07-03 Immuno Ag Chem Med Prod Fermenter for cell culture
JPH02109972A (en) * 1988-10-18 1990-04-23 Kirin Brewery Co Ltd Double nozzle
JPH0623840A (en) * 1985-08-02 1994-02-01 Mitsui Petrochem Ind Ltd Production of surface roughened film and sheet made of poly 4-methyl-1-pentene for producing multilayer printed wiring board
JPH0671039U (en) * 1993-03-10 1994-10-04 株式会社武田機械 Vacuum suction type work holder
CN104500568A (en) * 2014-12-23 2015-04-08 天津尚吉液压设备有限公司 Novel linear hydraulic bearing

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0623840A (en) * 1985-08-02 1994-02-01 Mitsui Petrochem Ind Ltd Production of surface roughened film and sheet made of poly 4-methyl-1-pentene for producing multilayer printed wiring board
JPS6427527U (en) * 1987-08-10 1989-02-16
JPH0518497Y2 (en) * 1987-08-10 1993-05-17
JPH01168272A (en) * 1987-11-23 1989-07-03 Immuno Ag Chem Med Prod Fermenter for cell culture
JPH02109972A (en) * 1988-10-18 1990-04-23 Kirin Brewery Co Ltd Double nozzle
JPH0671039U (en) * 1993-03-10 1994-10-04 株式会社武田機械 Vacuum suction type work holder
CN104500568A (en) * 2014-12-23 2015-04-08 天津尚吉液压设备有限公司 Novel linear hydraulic bearing

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