JPH05182265A - Magneto-optical recording medium - Google Patents

Magneto-optical recording medium

Info

Publication number
JPH05182265A
JPH05182265A JP12686391A JP12686391A JPH05182265A JP H05182265 A JPH05182265 A JP H05182265A JP 12686391 A JP12686391 A JP 12686391A JP 12686391 A JP12686391 A JP 12686391A JP H05182265 A JPH05182265 A JP H05182265A
Authority
JP
Japan
Prior art keywords
magneto
recording medium
rotation angle
optical recording
kerr rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12686391A
Other languages
Japanese (ja)
Inventor
Hiroyoshi Kishi
博義 岸
Masaaki Matsushima
正明 松島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP12686391A priority Critical patent/JPH05182265A/en
Publication of JPH05182265A publication Critical patent/JPH05182265A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide a magneto-optical recording medium enough large in Kerr rotation angle, not only able to have reading out in good signal to noise ratio but also high in recording sensitivity and having a proper thermal stability. CONSTITUTION:As a magnetic film of the magneto-optical recording medium, an alloy magnetic film consisting of five elements system (Dy-Gd-Tb-Fe-Co) amorphous allay having an easily magnetized axis at the perpendicular direction to the face of the film, being 190-230 deg.C Curie temp., >=0.3 Kerr rotation angle and satisfying formula {Dy1-z(Gd1-wTbw)z}1-y (Fe1-xCox)y in the formula, 0.2<=x<=0.3, 0.5<=y<=0.9, 0.3<=z<=0.7, 0<=w<=1 is used.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光磁気メモリー、磁気
記録、表示素子などに用いられる光磁気記録媒体に関す
るもので、特に、磁気カー効果あるいはファラデー効果
などの磁気光学効果を用いて読み出すことのできる光磁
気記録媒体に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical recording medium used for a magneto-optical memory, magnetic recording, a display element, etc., and particularly for reading using a magneto-optical effect such as a magnetic Kerr effect or a Faraday effect. The present invention relates to a magneto-optical recording medium that can be used.

【0002】[0002]

【従来の技術】従来、光磁気記録媒体としては、MnB
i、MnCuBi等の多結晶薄膜、GdCo、GdF
e、TbFe、DyFe、GdTbFe、TbDyFe
等の非晶質薄膜、GdIG等の単結晶薄膜等が知られて
いる。
2. Description of the Related Art Conventionally, MnB has been used as a magneto-optical recording medium.
i, MnCuBi and other polycrystalline thin films, GdCo, GdF
e, TbFe, DyFe, GdTbFe, TbDyFe
Amorphous thin films such as GdIG and single crystal thin films such as GdIG are known.

【0003】これ等の薄膜のうちで、大面積の薄膜を室
温近傍の温度で製作する際の成膜性、信号を小さな光エ
ネルギーで書き込むための書き込み効率、書き込まれた
信号をS/N比良く読み出すための読み出し効率等を勘
案すると、最近では前記非晶質薄膜が光磁気記録媒体と
して優れていると考えられている。
Among these thin films, film-forming properties when a large-area thin film is manufactured at a temperature near room temperature, writing efficiency for writing a signal with small optical energy, and S / N ratio of a written signal. Considering the reading efficiency for good reading, the amorphous thin film has recently been considered to be excellent as a magneto-optical recording medium.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、上述の
非晶質薄膜においても種々の欠点が指摘されている。
However, various drawbacks have been pointed out in the above amorphous thin film.

【0005】例えば、GdFeは保磁力が小さく、記録
された情報が不安定である。また、GdFe、GdCo
は、磁気的補償点を利用した書き込みを行っており、書
き込み効率を均一にするために、成膜の際にその膜組成
を厳しく管理しなければならない。TbFe、DyF
e、TbDyFeでは、キュリー点書き込みのため、膜
組成をそれほど厳しく管理することはないが、キュリー
点が100℃以下と低いために信号を読み出す時にパワ
ーの強い光を用いることができないという難点がある。
キュリー温度が低ければ書き込むための効率は向上する
が、書き込まれた信号が周囲の温度や読み出し光により
乱されてしまう。従って、磁気変態温度は、熱安定性を
考慮すると、100℃以上が望ましい。
For example, GdFe has a small coercive force, and recorded information is unstable. In addition, GdFe, GdCo
Performs writing using a magnetic compensation point, and in order to make writing efficiency uniform, the film composition must be strictly controlled during film formation. TbFe, DyF
In e and TbDyFe, since the Curie point is written, the film composition is not so strictly controlled, but since the Curie point is as low as 100 ° C. or lower, it is difficult to use light with high power when reading a signal. ..
If the Curie temperature is low, the writing efficiency is improved, but the written signal is disturbed by the ambient temperature and the reading light. Therefore, the magnetic transformation temperature is preferably 100 ° C. or higher in consideration of thermal stability.

【0006】一方、反射光による読みだしS/N比は、
反射率をR、カー回転角をθkとすると
On the other hand, the read S / N ratio by reflected light is
Let R be the reflectance and θk be the rotation angle of the car.

【0007】[0007]

【数1】 に比例する。[Equation 1] Proportional to.

【0008】従って、S/N比良く読み出すためには、
カー回転角を大きくすれば良い。表1には非晶質磁性膜
のカー回転角が示されている。
Therefore, in order to read out with a good S / N ratio,
The car rotation angle should be increased. Table 1 shows the Kerr rotation angle of the amorphous magnetic film.

【0009】[0009]

【表1】 この中では、GdTbFeのカーの回転角がもっとも大
きい。
[Table 1] Of these, the Kd rotation angle of GdTbFe is the largest.

【0010】しかしながら、この値でもなお充分とはい
いがたく、更にカー回転角を大きくする研究を進めた結
果、GdFeやTbFeにCoを添加したGdFeC
o、TbFeCoは、カー回転角が大きく、特にGdT
bFeにCoを添加したGdTbFeCoの4元系非晶
質磁性合金が熱安定性に優れ、かつカー回転角が充分に
大きくS/N比の良い読み出しが可能な光磁気記録媒体
であることが見い出された。
However, this value is still not sufficient, and as a result of research on further increasing the Kerr rotation angle, GdFeC obtained by adding Co to GdFe or TbFe was found.
o and TbFeCo have large Kerr rotation angles, especially GdT
It was found that a quaternary amorphous magnetic alloy of GdTbFeCo in which Co is added to bFe is excellent in thermal stability, has a sufficiently large Kerr rotation angle, and can be read out with a good S / N ratio. It was

【0011】このように、従来の希土類−遷移金属系の
非晶質磁性合金において、遷移金属として、FeとCo
を含む系が、カー回転角を増大させることがわかる。
As described above, in the conventional rare earth-transition metal type amorphous magnetic alloy, Fe and Co are used as transition metals.
It can be seen that the system containing K increases the Kerr rotation angle.

【0012】しかしながら、Coの添加は、キュリー温
度を上昇させる。表2には、TbFeCoとGdFeC
oのカー回転角とキュリー温度が示されている。
However, the addition of Co raises the Curie temperature. Table 2 shows TbFeCo and GdFeC
The Kerr rotation angle and Curie temperature of o are shown.

【0013】[0013]

【表2】 このように、Coを添加することにより、θkを増大さ
せることが可能になるが、それに伴ってキュリー温度が
大きくなりすぎると、記録感度が著しく低下した。
[Table 2] As described above, by adding Co, it is possible to increase θk, but if the Curie temperature becomes too high accordingly, the recording sensitivity is significantly lowered.

【0014】本発明の目的は、カー回転角が充分に大き
く、かつS/N比の良い読みだしが可能なだけでなく、
記録感度が高く、しかも適度な熱安定性を有する光磁気
記録媒体を提供することにある。
An object of the present invention is not only that the Kerr rotation angle is sufficiently large and that a good S / N ratio can be read out.
An object of the present invention is to provide a magneto-optical recording medium having a high recording sensitivity and an appropriate thermal stability.

【0015】[0015]

【課題を解決するための手段】上記目的を達成し得る本
発明の光磁気記録媒体は、膜面に垂直方向に磁化容易軸
を有する非晶質Dy−Gd−Tb−Fe−Co五元系合
金からなりキュリー温度が190℃以上230℃以下で
カー回転角が0.3゜以上の下記一般式(I) {Dy1-Z (Gd1-w Tbwz1-y (Fe1-x Coxy ・・・ (I) 0.2≦x≦0.3 0.5≦y≦0.9 0.3≦z≦0.7 0≦w≦1 を満足する磁性合金膜を有することを特徴とする。
The magneto-optical recording medium of the present invention which can achieve the above object is an amorphous Dy-Gd-Tb-Fe-Co quaternary system having an easy axis of magnetization in the direction perpendicular to the film surface. The following general formula (I) {Dy 1-Z (Gd 1-w Tb w ) z } 1-y (Fe 1 having an Curie temperature of 190 ° C. to 230 ° C. and a Kerr rotation angle of 0.3 ° or more is used. -x Co x ) y (I) 0.2 ≦ x ≦ 0.3 0.5 ≦ y ≦ 0.9 0.3 ≦ z ≦ 0.7 0 ≦ w ≦ 1 It is characterized by having.

【0016】本発明においては非晶質DyGdTbFe
Co五元系非晶質合金のキュリー温度が記録情報の熱安
定性を記録感度との関連で考慮して、190℃以上23
0℃以下に設定されている。
In the present invention, amorphous DyGdTbFe is used.
When the Curie temperature of the Co quinary amorphous alloy is 190 ° C. or higher, 23 considering the thermal stability of the recorded information in relation to the recording sensitivity.
It is set below 0 ° C.

【0017】本発明のDyGdTbFeCo系非晶質合
金の膜を有する光磁気媒体は、磁化容易軸が、膜面に垂
直な方向に向けられているだけに充分な磁気異方性を持
たなければならない。このためには、まず、薄膜を非晶
質で構成する必要があり、これは、スパッタリング法あ
るいは真空蒸着法などによって薄膜を成膜することによ
って達成される。
The magneto-optical medium having the film of the DyGdTbFeCo amorphous alloy of the present invention must have sufficient magnetic anisotropy that the easy axis of magnetization is oriented in the direction perpendicular to the film surface. .. For this purpose, it is first necessary to form the thin film in an amorphous state, and this is achieved by forming the thin film by a sputtering method, a vacuum evaporation method or the like.

【0018】また、上記一般式(I)で規定される組成
を採用することで、光磁気記録媒体に、高い記録感度と
適度な熱安定性、そして充分なカー回転角を持たせるこ
とができる。
Further, by adopting the composition defined by the above general formula (I), the magneto-optical recording medium can have high recording sensitivity, appropriate thermal stability and sufficient Kerr rotation angle. ..

【0019】[0019]

【実施例】【Example】

実施例1 高周波スパッタ装置において3インチ角の白板ガラスを
基板とし、ターゲットとして4インチφの(Fe0.70
0.30)合金上に、各々5mm角のDy片、Gd片及び
Tb片を均一に並べたものを使用した。チャンバー内を
1.5×10-5Pa以下になるまで真空排気した後、A
rガスを4×10-1Paまで導入し、真空排気系のメイ
ンバルブを操作することによりAr圧を3Paにした。
高周波電源により、200Wのスパッタ電力で成膜を行
った。このようにしてできた膜厚1000オングストロ
ームの膜は、膜面に垂直な方向に磁化容易軸を有し、ま
たX線回折により、非晶質であることを確認した。ま
た、組成分析の結果、この磁性膜は(Dy0.50Tb0.25
Gd0.250.20(Fe0.70Co0.300.80であり、カー
回転角は、発振波長633nmのHe−Neレーザーで
測定したところ、0.37度であった。またキュリー温
度は、約220℃であった。これは、同様に作成したG
0.25(Fe0.70Co0.300.75のカー回転角0.40
度、キュリー温度約380℃に比較してカー回転角は、
若干低下はしたが、キュリー温度を大幅に低下させるこ
とができた。
Example 1 In a high-frequency sputtering apparatus, a 3 inch square white glass plate was used as a substrate, and a 4 inch φ (Fe 0.70 C
o 0.30 ) alloy, on which 5 mm square Dy pieces, Gd pieces and Tb pieces were uniformly arranged were used. After evacuating the chamber to 1.5 × 10 -5 Pa or less, A
The r gas was introduced to 4 × 10 −1 Pa and the Ar pressure was set to 3 Pa by operating the main valve of the vacuum exhaust system.
The film was formed with a sputtering power of 200 W by a high frequency power source. The thus-formed film having a film thickness of 1000 angstrom had an easy axis of magnetization in the direction perpendicular to the film surface, and was confirmed by X-ray diffraction to be amorphous. As a result of composition analysis, this magnetic film was (Dy 0.50 Tb 0.25
Gd 0.25 ) 0.20 (Fe 0.70 Co 0.30 ) 0.80 , and the Kerr rotation angle was 0.37 degrees when measured with a He—Ne laser having an oscillation wavelength of 633 nm. The Curie temperature was about 220 ° C. This is the same as G
Kerr rotation angle of d 0.25 (Fe 0.70 Co 0.30 ) 0.75 0.40
Degree, Curie temperature is about 380 ℃
Although slightly lowered, the Curie temperature could be lowered significantly.

【0020】実施例2〜5 実施例1におけるFeCo合金の組成比またはDy片、
Gd片、Td片の枚数をそれぞれ変化させる以外は実施
例1と同様にして成膜した実施例2〜5の磁性薄膜の組
成、カー回転角およびキュリー温度は表3のとおりであ
った。
Examples 2 to 5 FeCo alloy composition ratio or Dy piece in Example 1,
Table 3 shows the composition, Kerr rotation angle, and Curie temperature of the magnetic thin films of Examples 2 to 5 formed in the same manner as in Example 1 except that the numbers of Gd pieces and Td pieces were changed.

【0021】[0021]

【表3】 [Table 3]

【0022】[0022]

【発明の効果】以上説明したように、本発明の光磁気記
録媒体においては高い記録感度と適度な熱安定性、更に
充分なカー回転角を備えており、従来のものに比べて好
適な光磁気記録媒体である。
As described above, the magneto-optical recording medium of the present invention has a high recording sensitivity, an appropriate thermal stability, and a sufficient Kerr rotation angle. It is a magnetic recording medium.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 膜面に垂直方向に磁化容易軸を有する非
晶質Dy−Gd−Tb−Fe−Co五元系合金からなり
キュリー温度が190℃以上230℃以下でカー回転角
が0.3゜以上の下記一般式(I) {Dy1-Z (Gd1-w Tbwz1-y (Fe1-x Coxy ・・・ (I) 0.2≦x≦0.3 0.5≦y≦0.9 0.3≦z≦0.7 0≦w≦1 を満足する磁性合金膜を有することを特徴とする光磁気
記録媒体。
1. An amorphous Dy-Gd-Tb-Fe-Co quaternary alloy having an easy axis of magnetization perpendicular to the film surface, and a Kerr rotation angle of 0. The following general formula (I) of 3 ° or more {Dy 1-Z (Gd 1-w Tb w ) z } 1-y (Fe 1-x Co x ) y (I) 0.2 ≦ x ≦ 0 A magneto-optical recording medium having a magnetic alloy film satisfying 0.5 ≦ y ≦ 0.9 0.3 ≦ z ≦ 0.7 0 ≦ w ≦ 1.
JP12686391A 1991-04-30 1991-04-30 Magneto-optical recording medium Pending JPH05182265A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12686391A JPH05182265A (en) 1991-04-30 1991-04-30 Magneto-optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12686391A JPH05182265A (en) 1991-04-30 1991-04-30 Magneto-optical recording medium

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP21505583A Division JPS60107751A (en) 1983-11-17 1983-11-17 Photothermomagnetic recording medium

Publications (1)

Publication Number Publication Date
JPH05182265A true JPH05182265A (en) 1993-07-23

Family

ID=14945708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12686391A Pending JPH05182265A (en) 1991-04-30 1991-04-30 Magneto-optical recording medium

Country Status (1)

Country Link
JP (1) JPH05182265A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961011A (en) * 1982-09-30 1984-04-07 Ricoh Co Ltd Optical magnetic recording medium
JPS59227052A (en) * 1983-06-06 1984-12-20 Ricoh Co Ltd Photomagnetic recording medium
JPS609855A (en) * 1983-06-28 1985-01-18 Toshiba Corp Magnetic alloy

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961011A (en) * 1982-09-30 1984-04-07 Ricoh Co Ltd Optical magnetic recording medium
JPS59227052A (en) * 1983-06-06 1984-12-20 Ricoh Co Ltd Photomagnetic recording medium
JPS609855A (en) * 1983-06-28 1985-01-18 Toshiba Corp Magnetic alloy

Similar Documents

Publication Publication Date Title
US5738950A (en) Magnetooptical recording medium
EP0330394B1 (en) Two-layered type opto-magnetic recording medium having low-coercive force layer containing Gd and at least one of Tb and Dy
JPS60107751A (en) Photothermomagnetic recording medium
JPS63107008A (en) Thin-film having large kerr&#39;s angle of rotation and manufacture thereof
JPH0232690B2 (en)
JPH05182265A (en) Magneto-optical recording medium
JPS61258353A (en) Photomagnetic recording medium
JP2550633B2 (en) Photothermal magnetic recording medium
JPH05174437A (en) Magneto-optical recording medium
JPH0570922B2 (en)
JPH0555941B2 (en)
JPH0343697B2 (en)
JPS60246041A (en) Photo thermomagnetic recording medium
JPS62172547A (en) Photomagnetic recording medium
JPH0589555A (en) Information recording and reproducing method
JP2829321B2 (en) Magneto-optical recording medium
JPS62217445A (en) Photomagnetic recording medium
JPH0823944B2 (en) Method for manufacturing magneto-optical recording medium
JPS62267950A (en) Magneto-optical recording medium
JPS63148447A (en) Thermomagneto-optical recording medium
JP2705066B2 (en) Photothermal magnetic recording media
JPS6257145A (en) Photothermomagnetic recording medium
JPS61196447A (en) Photomagnetic recording element
JPH0536134A (en) Magneto-optical recording medium
JPS61188759A (en) Photomagnetic recording medium