JPH0343697B2 - - Google Patents
Info
- Publication number
- JPH0343697B2 JPH0343697B2 JP59239043A JP23904384A JPH0343697B2 JP H0343697 B2 JPH0343697 B2 JP H0343697B2 JP 59239043 A JP59239043 A JP 59239043A JP 23904384 A JP23904384 A JP 23904384A JP H0343697 B2 JPH0343697 B2 JP H0343697B2
- Authority
- JP
- Japan
- Prior art keywords
- magneto
- atomic
- reflectance
- tbfeco
- ratio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 claims description 15
- 230000005415 magnetization Effects 0.000 claims description 6
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 229910002070 thin film alloy Inorganic materials 0.000 claims description 4
- 229910000808 amorphous metal alloy Inorganic materials 0.000 claims description 3
- 239000000654 additive Substances 0.000 claims 1
- 238000005260 corrosion Methods 0.000 description 9
- 230000007797 corrosion Effects 0.000 description 9
- 229910000510 noble metal Inorganic materials 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 7
- 239000010409 thin film Substances 0.000 description 6
- 230000005374 Kerr effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 229910052771 Terbium Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 230000005381 magnetic domain Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910002546 FeCo Inorganic materials 0.000 description 1
- 229910016629 MnBi Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012994 photoredox catalyst Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
- G11B11/10586—Record carriers characterised by the selection of the material or by the structure or form characterised by the selection of the material
Landscapes
- Thin Magnetic Films (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、膜面と垂直な方向に磁化容易軸を有
し、光を介して反転磁区を作ることにより情報を
記録し、磁気光学効果（カー効果）を利用して読
み出すことのできる光磁気記録媒体に関するもの
である。[Detailed Description of the Invention] [Industrial Application Field] The present invention has an axis of easy magnetization in the direction perpendicular to the film surface, records information by creating a reversed magnetic domain through light, and uses the magneto-optical effect. The present invention relates to a magneto-optical recording medium that can be read using the Kerr effect.
一般に、膜面と垂直な方向に磁化容易軸を有す
る磁性薄膜をガラス、PC、PMMA基板面上に形
成させ、キユリー点あるいは、磁気的補償温度を
利用して光ビームにより反転磁区を作ることによ
つて情報を記録させ、記録させた情報を磁気光学
効果を利用して読み出す光磁気記録が知られてい
る。
Generally, a magnetic thin film with an axis of easy magnetization perpendicular to the film surface is formed on the surface of a glass, PC, or PMMA substrate, and a light beam is used to create inverted magnetic domains using the Curie point or magnetically compensated temperature. Therefore, magneto-optical recording is known in which information is recorded and the recorded information is read out using the magneto-optical effect.
従来、膜面と垂直な方向に磁化容易軸を有する
非晶質磁性薄膜合金は、希土類と鉄族元素との組
み合せからなり光磁気記録媒体として研究が進め
られている。 BACKGROUND ART Conventionally, amorphous magnetic thin film alloys having an axis of easy magnetization in a direction perpendicular to the film surface are made of a combination of rare earth elements and iron group elements, and have been studied as magneto-optical recording media.
前記の非晶質磁性薄膜材料としては、P.
ChaudhariらによるAppl.Phys.Lett.、Vol22
（1973）No.7、P337−339に示されているGdCo.
Shunsuke.MatsuhitaらによるJapan.J.Appl.
Phys.、VoL15（1976）No.4、P713−714に示され
ているTbFeなどの希土類−鉄族金属の組み合せ
より成る合金がある。 The amorphous magnetic thin film material mentioned above is P.
Appl.Phys.Lett., Vol22 by Chaudhari et al.
(1973) No. 7, GdCo shown in P337-339.
Japan.J.Appl by Shunsuke.Matsuhita et al.
Phys., VoL15 (1976) No. 4, P713-714, there are alloys consisting of rare earth-iron group metal combinations such as TbFe.
これらの希土類と鉄族元素との組み合せから成
る非晶質合金薄膜は、大面積の薄膜を室温付近の
温度で製作する製膜性、信号を小さな光熱エネル
ギーで書き込むための書き込み効率、書き込まれ
た信号をＳ／Ｎ比よく読み出すための読み出し効
率等が、MnBi等の多結晶薄膜よりすぐれてい
る。特に、TbFeCoは、次のような実用上優れた
特徴を有している。 These amorphous alloy thin films made from a combination of rare earths and iron group elements have excellent film formability, which allows large-area thin films to be fabricated at temperatures around room temperature, writing efficiency, which allows signals to be written with small photothermal energy, and improved write efficiency. The readout efficiency for reading signals with a good S/N ratio is superior to polycrystalline thin films such as MnBi. In particular, TbFeCo has the following practically excellent characteristics.
(1)室温における保磁力が大きく（5000エルステツ
ド以上）、記録されたビツトが安定に在存する。(1) The coercive force at room temperature is large (more than 5000 oersteds), and recorded bits exist stably.
(2) キユリー温度およびカー回転角が比較的高い
ため磁気光学効果（カー効果）による読み出し
信号が大きい。(2) Since the Curie temperature and Kerr rotation angle are relatively high, the readout signal due to the magneto-optical effect (Kerr effect) is large.
反射光による磁気光学効果（カー効果）を利用
した読み出しＳ／Ｎ比は、反射率をＲ、カー回転
角をθkとすると、√・θkに比例する。したが
つて、Ｓ／Ｎ比良く読み出す為には、カー回転角
および反射率を大きくすればよい。
The readout S/N ratio using the magneto-optical effect (Kerr effect) due to reflected light is proportional to √·θk, where R is the reflectance and θk is the Kerr rotation angle. Therefore, in order to read with a good S/N ratio, the Kerr rotation angle and the reflectance may be increased.
しかしながらTbFeCo非晶質磁性薄膜合金でも
それらは、充分ではなく、更にカー回転角、反射
率を大きくする必要がある。またTbFeCoなどの
非晶質磁性薄膜合金は、耐食性が悪い。すなわ
ち、大気、水蒸気に触れると、磁気特性が急激に
減少し、最終的には完全に酸化して透明化してし
まう。そのために、記録層の上に保護層を設けた
りしているがそれでも十分でない。 However, even the TbFeCo amorphous magnetic thin film alloy is not sufficient, and it is necessary to further increase the Kerr rotation angle and reflectance. Also, amorphous magnetic thin film alloys such as TbFeCo have poor corrosion resistance. That is, when it comes into contact with the atmosphere or water vapor, its magnetic properties rapidly decrease, and eventually it completely oxidizes and becomes transparent. For this purpose, a protective layer is provided on the recording layer, but even this is not sufficient.
そこで、本発明は従来のこのような欠点を解決
し、熱安定性にすぐれ、カー回転角および反射率
が充分に大きくＳ／Ｎ比の良い読み出しが可能
で、かつ記録媒体自身の耐食性を向上させた非晶
質の光磁気記録媒体を提供することを目的として
いる。 Therefore, the present invention solves these conventional drawbacks, and has excellent thermal stability, a sufficiently large Kerr rotation angle and reflectance, which enables readout with a good S/N ratio, and improves the corrosion resistance of the recording medium itself. The purpose of the present invention is to provide an amorphous magneto-optical recording medium that has a high temperature.
上記の問題を解決するためにこの発明は、膜面
に垂直な方向に磁化容易軸を有する非晶質合金、
TbFeCoに、貴金属系元素Au、Ag、Pdを添加す
ることにより、上記目的のカー回転角および反射
率の増大、また記録媒体自身の耐食性向上を達成
せんとするものである。
In order to solve the above problems, the present invention has developed an amorphous alloy having an axis of easy magnetization perpendicular to the film surface.
By adding noble metal elements Au, Ag, and Pd to TbFeCo, the objective is to increase the Kerr rotation angle and reflectance, as well as to improve the corrosion resistance of the recording medium itself.
TbFeCo非晶質磁性合金薄膜においては、膜面
に垂直な方向に磁化容易軸を向けるのに充分な磁
気異方性を持たせる組成としてFeとCoとを合わ
せた原子比が60原子％〜90原子％の範囲にあるこ
とが知られている。さらに、FeとCoを合せた原
子比を100％とした場合CoがFeに対して５原子％
以上の原子比で存在することが知られている。
In a TbFeCo amorphous magnetic alloy thin film, the combined atomic ratio of Fe and Co is 60 atomic % to 90 atomic % to provide sufficient magnetic anisotropy to orient the axis of easy magnetization perpendicular to the film surface. It is known to be in the atomic percent range. Furthermore, when the combined atomic ratio of Fe and Co is 100%, Co is 5 atomic% relative to Fe.
It is known to exist in the above atomic ratio.
そこで本発明に係る上記光磁気記録媒体におい
ては、前記の原子比範囲を損なうことなくカー回
転角、反射率の増大および耐食性を向上させるた
めに、貴金属系元素Au、Ag、Pdのうち一種以上
を添加することを見いだした。 Therefore, in the magneto-optical recording medium according to the present invention, one or more of the noble metal elements Au, Ag, and Pd are used to increase the Kerr rotation angle, increase reflectance, and improve corrosion resistance without impairing the above-mentioned atomic ratio range. It was discovered that the addition of
以下この発明の実施例にもとずいて説明する。
これらの膜は、スパツタリング法により作製した
が真空蒸着法・イオンプレーテイング法などのそ
の他の多くの物理的ベイパーデイポジシヨン法に
よつても作製することができる。また基板には、
ガラス・透明プラスチツクなどを用いる。
The present invention will be explained below based on embodiments.
Although these films were produced by sputtering, they can also be produced by many other physical vapor deposition methods such as vacuum evaporation and ion plating. Also, on the board,
Use glass, transparent plastic, etc.
スパツタリング法においては、Feターゲツト
上にTb、Co、貴金属系元素シートを均一に並べ
たもの、あるいは、FeCo合金ターゲツト上に
Tb、貴金属系元素シートを均一に並べたものを
使用した。 In the sputtering method, sheets of Tb, Co, and noble metal elements are uniformly arranged on an Fe target, or sheets of Tb, Co, and noble metal elements are arranged uniformly on an Fe target, or on a FeCo alloy target.
Tb and noble metal element sheets arranged uniformly were used.
第１図は、前記したTbFeCoの範囲を損なわ
ず、貴金属系元素を添加した場合のカー効果の変
化を示している。Au、を添加することにより、
カー回転角の増大をはかることができたカー回転
角は、発振波長633nmのHe−Neレーザで測定し
た値である。 FIG. 1 shows the change in the Kerr effect when a noble metal element is added without impairing the range of TbFeCo described above. By adding Au,
The Kerr rotation angle that was able to increase the Kerr rotation angle was a value measured using a He--Ne laser with an oscillation wavelength of 633 nm.
第２図は、前記したTbFeCoの範囲を損なわ
ず、貴金属系元素を添加した場合の反射率の変化
を示している。Auを添加することにより、反射
率はかなり増大する。反射率は、発振波長633nm
のHe−Neレーザで測定した値である。 FIG. 2 shows the change in reflectance when a noble metal element is added without impairing the range of TbFeCo described above. By adding Au, the reflectance increases considerably. Reflectance is oscillation wavelength 633nm
This value was measured using a He-Ne laser.
第３図は、前記したTbFeCoの範囲を損わず、
貴金属元素を添加した場合の耐腐食試験を試みた
結果である。耐腐食試験は、80℃、90％の恒温恒
湿槽に入れて時間的な、Ｓ／Ｎ比の変化を示して
いる。Auの入つていないTbFeCo膜は、300時間
〜400時間でＳ／Ｎ比は初期の80％程度に低下す
るが、Auを添加した場合は、80％程度に低下す
るまでに約500〜700時間かかり、耐腐食性が向上
していることがわかる。 Figure 3 shows the above-described range of TbFeCo.
These are the results of a corrosion resistance test when noble metal elements were added. The corrosion resistance test shows the change in S/N ratio over time by placing the product in a constant temperature and humidity chamber at 80°C and 90%. In the TbFeCo film without Au, the S/N ratio decreases to about 80% of the initial value after 300 to 400 hours, but when Au is added, the S/N ratio decreases to about 500 to 700% before decreasing to about 80%. It can be seen that this process takes time and improves corrosion resistance.
ここでは、第１図、第２図、第３図ともにAu
についての効果を示したが、Ag、Pdについても
同様の効果がみられる。 Here, Figures 1, 2, and 3 are all Au
Although the effect was shown for Ag and Pd, similar effects are also seen for Ag and Pd.
この発明は、以上説明したようにTbFeCoに貴
金属系元素Au、Ag、Pdを一種以上、原子比１原
子％〜10原子％添加したとき、カー回転角および
反射率が充分に大きくＳ／Ｎ比の良い読み出しが
可能で、かつ記録媒体自身の耐食性を向上させる
非晶質の光磁気記録媒体を提供することができ
る。
As explained above, when one or more of the noble metal elements Au, Ag, and Pd are added to TbFeCo in an atomic ratio of 1 to 10 atomic %, the Kerr rotation angle and reflectance are sufficiently large and the S/N ratio is It is possible to provide an amorphous magneto-optical recording medium that allows for good readout and improves the corrosion resistance of the recording medium itself.
第１図は、TbFeCoAu、TbFeCoPt膜のAuに
対するカー回転角θkとの関係を示す図、第２図
は第１図と同様の膜でAuに対する反射率Ｒとの
関係を示す図、第３図は、第１図と同様の膜で耐
腐食試験を行なつた結果を示す図であり、時間に
対するＳ／Ｎ比の変化を示したものである。第３
図における膜は、保護膜を有している。
Figure 1 is a diagram showing the relationship between the Kerr rotation angle θk for TbFeCoAu and TbFeCoPt films with respect to Au, Figure 2 is a diagram showing the relationship between the reflectance R and Au for the same film as in Figure 1, and Figure 3 is a diagram showing the relationship between the reflectance R and Au for the same film as in Figure 1. 1 is a diagram showing the results of a corrosion resistance test performed on a film similar to that in FIG. 1, and shows changes in the S/N ratio with respect to time. Third
The film in the figure has a protective film.
Claims (1)
質磁性薄膜合金にAu、Ag、Pdの一種又はそれ以
上を原子比が１原子％〜10原子％の範囲に添加し
た事を特徴とする光磁気記録媒体。 ２ 前記非晶質合金は、TbFeCoである特許請求
の範囲第１項記載の光磁気記録媒体。[Claims] 1. One or more of Au, Ag, and Pd is added to an amorphous magnetic thin film alloy having an axis of easy magnetization in the direction perpendicular to the film surface in an atomic ratio of 1 atomic % to 10 atomic %. A magneto-optical recording medium characterized by the addition of additives. 2. The magneto-optical recording medium according to claim 1, wherein the amorphous alloy is TbFeCo.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23904384A JPS61117749A (en) | 1984-11-13 | 1984-11-13 | Photomagnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23904384A JPS61117749A (en) | 1984-11-13 | 1984-11-13 | Photomagnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61117749A JPS61117749A (en) | 1986-06-05 |
| JPH0343697B2 true JPH0343697B2 (en) | 1991-07-03 |
Family
ID=17039022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23904384A Granted JPS61117749A (en) | 1984-11-13 | 1984-11-13 | Photomagnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61117749A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61196448A (en) * | 1985-02-26 | 1986-08-30 | Kyocera Corp | Photomagnetic recording element |
| JP2601796B2 (en) * | 1985-12-05 | 1997-04-16 | 日立マクセル株式会社 | Magneto-optical recording medium |
| JPS61255546A (en) * | 1985-05-09 | 1986-11-13 | Kokusai Denshin Denwa Co Ltd <Kdd> | Photomagnetic recording medium |
| WO1989001687A1 (en) * | 1987-08-08 | 1989-02-23 | Mitsui Petrochemical Industries, Ltd. | Photomagnetic recording medium |
| US4995923A (en) * | 1988-10-17 | 1991-02-26 | Mitsui Petrochemical Industries, Ltd. | Thin film of amorphous alloy |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5968854A (en) * | 1982-09-28 | 1984-04-18 | Seiko Instr & Electronics Ltd | Photomagnetic recording medium |
| JPS61107555A (en) * | 1984-10-31 | 1986-05-26 | Nec Corp | Optomagnetic recording medium |
-
1984
- 1984-11-13 JP JP23904384A patent/JPS61117749A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5968854A (en) * | 1982-09-28 | 1984-04-18 | Seiko Instr & Electronics Ltd | Photomagnetic recording medium |
| JPS61107555A (en) * | 1984-10-31 | 1986-05-26 | Nec Corp | Optomagnetic recording medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61117749A (en) | 1986-06-05 |
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| JPS5996713A (en) | Magnetic recording medium |
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| Date | Code | Title | Description |
|---|---|---|---|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
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| EXPY | Cancellation because of completion of term |