JPH0259603B2 - - Google Patents
Info
- Publication number
- JPH0259603B2 JPH0259603B2 JP7041883A JP7041883A JPH0259603B2 JP H0259603 B2 JPH0259603 B2 JP H0259603B2 JP 7041883 A JP7041883 A JP 7041883A JP 7041883 A JP7041883 A JP 7041883A JP H0259603 B2 JPH0259603 B2 JP H0259603B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magneto
- film
- amorphous
- elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052742 iron Inorganic materials 0.000 claims description 7
- 229910052776 Thorium Inorganic materials 0.000 claims description 5
- 229910052770 Uranium Inorganic materials 0.000 claims description 5
- 239000010408 film Substances 0.000 description 12
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 230000005415 magnetization Effects 0.000 description 6
- 229910052688 Gadolinium Inorganic materials 0.000 description 5
- 229910052771 Terbium Inorganic materials 0.000 description 5
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052761 rare earth metal Inorganic materials 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 230000005374 Kerr effect Effects 0.000 description 2
- -1 MnCuBi Inorganic materials 0.000 description 2
- 230000005381 magnetic domain Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910016629 MnBi Inorganic materials 0.000 description 1
- 229910002837 PtCo Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000010952 cobalt-chrome Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/16—Layers for recording by changing the magnetic properties, e.g. for Curie-point-writing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Thin Magnetic Films (AREA)
Description
【発明の詳細な説明】
本発明は、希土類元素と鉄族元素を主成分とす
る非晶質磁性薄膜を有し、膜面と垂直方向に磁化
容易方向を有する光磁気記録媒体に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magneto-optical recording medium having an amorphous magnetic thin film mainly composed of rare earth elements and iron group elements, and having an easy magnetization direction perpendicular to the film surface. .
従来から希土類元素とFe、Co、Niの鉄族元素
を主成分とする一部又は全部が非晶質磁性薄膜
は、膜面と垂直な方向に磁化容易軸を有す。Ｓ極
あるいはＮ極に全面磁化された膜面の逆向きの小
さな（1μｍ径程度）スポツト状の反転磁化（ビ
ツト）を作ることが出来る。この反転磁区の有無
を「１」、「０」に対応することによつてデジタル
信号とした磁気メモリー媒体として用いることが
できる。このような磁性薄膜のうち室温に近いキ
ユーリー点（Tc）あるいは補償温度をもつ化合
物・合金は、レーザー光等の光又は熱的効果によ
つて任意の位置に任意の大きさ・形状の反転磁区
を作ることが出来る。これを利用することによつ
て情報を記録することが可能であり、デイスク、
テープ、シート状の光磁気メモリー媒体として利
用することが可能となりつつある。そして読み出
す方法として、磁気カー効果やフアラデー効果を
利用する方法が用いられている。 Conventionally, partially or entirely amorphous magnetic thin films mainly composed of rare earth elements and iron group elements such as Fe, Co, and Ni have an axis of easy magnetization in a direction perpendicular to the film surface. It is possible to create a small (about 1 μm diameter) spot-like reversed magnetization (bit) in the opposite direction on a film surface that is entirely magnetized to the S or N pole. By correlating the presence or absence of this inverted magnetic domain with "1" and "0", it can be used as a magnetic memory medium that is converted into a digital signal. Among these magnetic thin films, compounds and alloys with a Curie point (Tc) or compensation temperature close to room temperature can be used to create inverted magnetic domains of any size and shape at any location by light such as laser light or thermal effects. can be made. By using this, it is possible to record information, disk,
It is becoming possible to use it as a tape or sheet-like magneto-optical memory medium. As a reading method, a method using the magnetic Kerr effect or the Faraday effect is used.
従来、公知である膜面と垂直な方向に磁化容易
軸を有し、かつ光ビームにより情報を書き込み、
読み出せる磁性膜合金としては、多結晶として
MnBi、MnCuBi、PtCo、CoCr、単結晶として
GdIG、TbFeO、YGaIG、BiSmErGaIG、そし
て非晶質としてGdCo、TbFe、DyFe、GdFeBi、
GdTbFe、TbDyFeがあるが、この中でも、非晶
質磁性膜合金が良い材料として知られている。 Conventionally, the well-known film has an axis of easy magnetization perpendicular to the film surface, and information is written using a light beam.
As a magnetic film alloy that can be read, polycrystalline
MnBi, MnCuBi, PtCo, CoCr, as single crystal
GdIG, TbFeO, YGaIG, BiSmErGaIG, and as amorphous GdCo, TbFe, DyFe, GdFeBi,
There are GdTbFe and TbDyFe, but among these, amorphous magnetic film alloy is known as a good material.
しかし上述した非晶質磁性膜合金は、書込み感
度が良く、媒体ノイズが少なく、垂直磁気異方性
の大面積が安定に作業出来、又、磁気特性も適当
に良いが、読み出し性能（Ｓ／Ｎ比）に大きな影
響を与えるカー回転角（θk）が小さく、そのた
めにＳ／Ｎ比が小さくなり、光磁気記録媒体とし
て使用することは困難であるという欠点を有して
いる。 However, the above-mentioned amorphous magnetic film alloy has good writing sensitivity, low medium noise, can stably work with a large area of perpendicular magnetic anisotropy, and has suitably good magnetic properties, but has good read performance (S/ The Kerr rotation angle (θk), which has a large effect on the N ratio), is small, resulting in a small S/N ratio, making it difficult to use as a magneto-optical recording medium.
本発明は、上記の従来の欠点を改良し、θkを
大きくし、Ｓ／Ｎ比が優れた光磁気記録媒体を提
供することにある。 The present invention aims to improve the above-mentioned conventional drawbacks, increase θk, and provide a magneto-optical recording medium with an excellent S/N ratio.
本発明の光磁気記録媒体は、膜面に垂直な大部
分に方向が磁化容易軸の磁気異方性を有するもの
であり、キユーリー点（Tc）および補償温度度
（Tcompt）が室温に近く50℃〜200℃を有する大
部分が非晶質状態の薄膜である。 The magneto-optical recording medium of the present invention has magnetic anisotropy with the axis of easy magnetization oriented in most parts perpendicular to the film surface, and the Curie point (Tc) and compensation temperature (Tcompt) are close to room temperature at 50°C. It is a mostly amorphous thin film with a temperature of ℃ to 200℃.
そして従来から希土類元素（Ｒ）のGd、Tb、
Dy、Fe、Coの上記非晶質合金は、光磁気効果、
Tc、Tcomptが比較的良いことから、光磁気記
録媒体として注目され、研究が進められている。
しかし、より優れた記録媒体とするにはθkを大
きくする必要がある。θkを大きくすることによ
り読出し性能（Ｓ／Ｎ比）が良くなるからであ
る。つまりθkが大きく、しかもTc、Tcompt、
磁気特性は従来の媒体と変らないか又は、より優
れた媒体が必要である。今までにもθkを大きく
するために、Cr、Ni、Bi、Cu、Ag、Au、Sn、
Co等の添加による改良が試みられている。 Traditionally, rare earth elements (R) such as Gd, Tb,
The above amorphous alloy of Dy, Fe, and Co has a magneto-optical effect,
Because it has relatively good Tc and Tcompt, it has attracted attention as a magneto-optical recording medium and is being studied.
However, in order to obtain a better recording medium, it is necessary to increase θk. This is because reading performance (S/N ratio) improves by increasing θk. In other words, θk is large, and Tc, Tcompt,
A medium whose magnetic properties are the same or better than conventional media is needed. Until now, in order to increase θk, Cr, Ni, Bi, Cu, Ag, Au, Sn,
Attempts have been made to improve this by adding Co, etc.
本発明では、従来の希土類元素と鉄族元素を主
成分とする非晶質合金に対して、添加元素（Ｍ）
を添加し、（RXT1-X）1-YMY（但し、ＲはGd、Tb、
Dyの元素一種又は二種以上、ＴはFe、Coの元素
一種又は二種、ＭはTh、Ｕの元素一種又は二種、
かつ、ｘは0.1≦ｘ≦0.4、ｙは0.01≦ｙ≦0.04）
の一般式で示される非晶質合金とすることによ
り、θkが大きくなり、しかもその他の特性であ
るTc、Tcomp、磁気特性等はほとんど悪くなら
ない光磁気記録媒体を達成するものである。 In the present invention, the additive element (M) is added to the conventional amorphous alloy mainly composed of rare earth elements and iron group elements.
(R X T 1-X ) 1-Y M Y (where R is Gd, Tb,
One or more elements of Dy, T one or two elements of Fe and Co, M one or two elements of Th and U,
and x is 0.1≦x≦0.4, y is 0.01≦y≦0.04)
By using an amorphous alloy represented by the general formula, it is possible to achieve a magneto-optical recording medium in which θk is increased and other properties such as Tc, Tcomp, and magnetic properties are hardly deteriorated.
以下、本発明を詳細に説明する。 The present invention will be explained in detail below.
Ｒ（＝Gd、Tb、Dy）とＴ（＝Co、Fe）の非晶
質合金膜RXT1-Xは従来から0.1Ｘ0.4と広く知
られている通りである。（例えば、特願昭55−
30251、55−170239、55−37347、50−107107、51
−25534等）そしてこれらはTc、Tcomptが50℃
〜200℃であり、適当な磁気特性（Ms、Hc、
Ku）を有し、垂直な磁化容易軸を持つ媒体であ
る。そしてこれらはスパツター装置、真空蒸着装
置、イオンプレーテイング装置、その他の多くの
無電解メツキ法によつて作製される。一般にター
ゲツトは、溶融法、粉末凝固法、あるいはＲとＴ
の面積比による方法等で作製される。そして基板
にシリコンウエナー、ガラス、PMMA材質上に
50Å〜数μ程度の膜が形成される。発明者も同様
にして、Ｒ（＝Gd、Tb）とＴ（＝Fe、Co）とＭ
（＝Th、Ｕ）の非晶質合金膜（RXT1-X）1-YMYを
作製した。そしてθkをカー回転角測定器によつ
て測定した結果を第１図に示す。第１図において
はＲ＝Gd、Tb、Ｔ＝Co、Feの場合で、Ｘは0.1
Ｘ0.4の範囲ではいずれもほぼ左点のＹ＝０
でのθkの値である。そして、Ｍ＝Th、ＵでＹが
0.01Ｙ0.4の間では、Ｙ＝０でのθkの値より
増加しており、それ以上ではあまり効果が良くな
いようである。 The amorphous alloy film R X T 1-X of R (=Gd, Tb, Dy) and T (=Co, Fe) has been widely known to be 0.1×0.4. (For example, patent application 1983-
30251, 55−170239, 55−37347, 50−107107, 51
-25534 etc.) and these have Tc and Tcompt of 50℃
~200℃, with suitable magnetic properties (Ms, Hc,
Ku), and is a medium with a perpendicular easy axis of magnetization. These are manufactured using a sputtering device, a vacuum evaporation device, an ion plating device, and many other electroless plating methods. Generally, the target is melting, powder congealing, or R and T.
It is manufactured by a method based on the area ratio of . And on the substrate silicone wafer, glass, PMMA material.
A film with a thickness of about 50 Å to several microns is formed. In the same way, the inventor also calculated R (=Gd, Tb), T (=Fe, Co), and M.
An amorphous alloy film (R X T 1-X ) 1-Y MY of (=Th, U) was prepared. FIG. 1 shows the results of measuring θk using a Kerr rotation angle measuring device. In Figure 1, R=Gd, Tb, T=Co, Fe, and X is 0.1
In the range of X0.4, Y = 0 almost at the left point
is the value of θk at Then, M=Th, U and Y
Between 0.01Y0.4, it increases from the value of θk at Y=0, and it seems that the effect is not very good above that.
この結果は、本発明の他のＲ、Ｔの元素につい
てもいずれも同様である。しかも従来の媒体に比
べ他の特性はほとんど変化が無いが、むしろ磁気
特性のHc等は良くなつていた。 This result is also the same for the other elements R and T of the present invention. Furthermore, compared to conventional media, there was almost no change in other properties, but the magnetic properties such as Hc were actually improved.
以上説明した本発明の光磁気記録媒体は、カー
効果又はフアラデー効果を利用して読出しを行な
う。ただし書込みは、レザー光等の光ビームを用
いてその光磁気効果を利用するものである。この
ように、ビーム・アドレツサブルメモリとして利
用できる書き換え可能なメモリーとなる。そして
θkが大きいためＳ／Ｎが優れ、フアイル、コン
ピユータ、オーデイオ、ビデオ用の書き換え可型
メモリーとして広く利用することが可能である。
そして書き込み、読出し、消去等がAr、He−
Neそして半導体レーザー（例えばGa・Al・As
等）によつて可能とすることができる。 The magneto-optical recording medium of the present invention described above performs reading using the Kerr effect or the Faraday effect. However, writing uses a light beam such as laser light and its magneto-optical effect. In this way, it becomes a rewritable memory that can be used as a beam addressable memory. Since θk is large, the S/N ratio is excellent, and it can be widely used as a rewritable memory for files, computers, audio, and video.
Writing, reading, erasing, etc. are performed using Ar, He-
Ne and semiconductor lasers (e.g. Ga, Al, As)
etc.).
図面は（RXT1-X）1-YMYにおいて、Ｒ＝Gd、
Tb、Ｔ＝Co、Fe、0.1Ｘ0.4の組成に、Ｍ＝
Th、Ｕを加えた時のカー回転角θkと原子比Ｙの
関係を示すグラフである。
The drawing is (R X T 1-X ) 1-Y M Y , R=Gd,
Tb, T=Co, Fe, composition of 0.1X0.4, M=
It is a graph showing the relationship between the Kerr rotation angle θk and the atomic ratio Y when Th and U are added.
Claims (1)
直な方向に磁化容易軸を有する非晶質合金におい
て、ＲをGd、Tb、Dyの元素一種又は二種以上、
ＴをFe、Coの元素一種又は二種、ＭをTh、Ｕの
元素一種又は二種で構成し、かつ、ｘを0.1≦ｘ
≦0.4、ｙを0.01≦ｙ≦0.4とすることを特徴とす
る薄膜光磁気記録媒体。 1 General formula ( R more than species,
T is composed of one or two elements of Fe or Co, M is composed of one or two elements of Th or U, and x is 0.1≦x
≦0.4, and y is 0.01≦y≦0.4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7041883A JPS59195809A (en) | 1983-04-21 | 1983-04-21 | Photomagnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7041883A JPS59195809A (en) | 1983-04-21 | 1983-04-21 | Photomagnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59195809A JPS59195809A (en) | 1984-11-07 |
| JPH0259603B2 true JPH0259603B2 (en) | 1990-12-13 |
Family
ID=13430902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7041883A Granted JPS59195809A (en) | 1983-04-21 | 1983-04-21 | Photomagnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59195809A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60117436A (en) * | 1983-11-29 | 1985-06-24 | Sharp Corp | Magnetooptic storage element |
| CN103484797B (en) * | 2013-08-26 | 2015-08-12 | 四川材料与工艺研究所 | A kind of U-Pd-Ni-Si non-crystaline amorphous metal and preparation method thereof |
-
1983
- 1983-04-21 JP JP7041883A patent/JPS59195809A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59195809A (en) | 1984-11-07 |
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