JPH05174437A - Magneto-optical recording medium - Google Patents

Magneto-optical recording medium

Info

Publication number
JPH05174437A
JPH05174437A JP12686691A JP12686691A JPH05174437A JP H05174437 A JPH05174437 A JP H05174437A JP 12686691 A JP12686691 A JP 12686691A JP 12686691 A JP12686691 A JP 12686691A JP H05174437 A JPH05174437 A JP H05174437A
Authority
JP
Japan
Prior art keywords
magneto
recording medium
optical recording
film
amorphous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12686691A
Other languages
Japanese (ja)
Inventor
Hiroyoshi Kishi
博義 岸
Masaaki Matsushima
正明 松島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP12686691A priority Critical patent/JPH05174437A/en
Publication of JPH05174437A publication Critical patent/JPH05174437A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To lower a Curie temp. without impairing a Kerr rotating angle and to improve recording efficiency and reproducing efficiency by consisting the magneto-optical recording medium of a quaternary alloy of amorphous Td-Dy- Fe-Co having an axis of easy magnetization in the direction perpendicular to the film plane. CONSTITUTION:The magneto-optical recording medium consists of the quaternary alloy of the amorphous Td-Dy-Fe-Co having the axis of easy magnetization in the direction perpendicular to the film plane and has the magnetic alloy film satisfying the following general formula (Tb1-zDy)1-y(Fe1-xCox)y, 0<x<=0.3, 0.2<=y<=0.8, 0.3<=z<=1. The sufficient magnetic anisotropy and the sufficient Kerr rotating angle are provided on the magneto-optical recording medium by adopting the compsn. regulated by the above-mentioned general formula. In addition, reading out at a good S/N is possible.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光磁気メモリー、磁気
記録、表示素子などに用いられる光磁気記録媒体に関す
るもので、特に、磁気カー効果あるいはファラデー効果
などの磁気光学効果を用いて読み出すことのできる光磁
気記録媒体に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical recording medium used for a magneto-optical memory, magnetic recording, a display element, etc., and particularly for reading using a magneto-optical effect such as a magnetic Kerr effect or a Faraday effect. The present invention relates to a magneto-optical recording medium that can be used.

【0002】[0002]

【従来の技術】従来、光磁気記録媒体としては、MnB
i、MnCuBi等の多結晶薄膜、GdCo、GdF
e、TbFe、DyFe、GdTbFe、TbDyFe
等の非晶質薄膜、GdIG等の単結晶薄膜等が知られて
いる。
2. Description of the Related Art Conventionally, MnB has been used as a magneto-optical recording medium.
i, MnCuBi and other polycrystalline thin films, GdCo, GdF
e, TbFe, DyFe, GdTbFe, TbDyFe
Amorphous thin films such as GdIG and single crystal thin films such as GdIG are known.

【0003】これ等の薄膜のうちで、大面積の薄膜を室
温近傍の温度で製作する際の成膜性、信号を小さな光エ
ネルギーで書き込むための書き込み効率、書き込まれた
信号をS/N比良く読み出すための読み出し効率等を勘
案すると、最近では前記非晶質薄膜が光磁気記録媒体と
して優れていると考えられている。
Among these thin films, film-forming properties when a large-area thin film is manufactured at a temperature near room temperature, writing efficiency for writing a signal with small optical energy, and S / N ratio of a written signal. Considering the reading efficiency for good reading, the amorphous thin film has recently been considered to be excellent as a magneto-optical recording medium.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、上述の
非晶質薄膜においても種々の欠点が指摘されている。
However, various drawbacks have been pointed out in the above amorphous thin film.

【0005】例えば、GdFeは保磁力が小さく、記録
された情報が不安定である。また、GdFe、GdCo
は、磁気的補償点を利用した書き込みを行っており、書
き込み効率を均一にするために、成膜の際にその膜組成
を厳しく管理しなければならない。TbFe、DyF
e、TbDyFeでは、キュリー点書き込みのため、膜
組成をそれほど厳しく管理することはないが、キュリー
点が100℃以下と低いため、信号を読み出す時にパワ
ーの強い光を用いることができないという難点がある。
キュリー温度が低ければ書き込むための効率は向上する
が、書き込まれた信号が周囲の温度や読み出し光のより
乱されてしまう。従って、磁気変態温度は、使用上の状
態を考慮すると、100℃以上が望ましい。
For example, GdFe has a small coercive force, and recorded information is unstable. In addition, GdFe, GdCo
Performs writing using a magnetic compensation point, and in order to make writing efficiency uniform, the film composition must be strictly controlled during film formation. TbFe, DyF
In e and TbDyFe, since the Curie point is written, the film composition is not so strictly controlled, but since the Curie point is as low as 100 ° C. or lower, there is a drawback that light with high power cannot be used when reading a signal. ..
If the Curie temperature is low, the writing efficiency is improved, but the written signal is disturbed more by the ambient temperature and the reading light. Therefore, the magnetic transformation temperature is preferably 100 ° C. or higher in consideration of the condition of use.

【0006】一方、反射光による読みだしS/N比は、
反射率をR、カー回転角をθkとすると
On the other hand, the read S / N ratio by reflected light is
Let R be the reflectance and θk be the rotation angle of the car.

【0007】[0007]

【数1】 に比例する。従って、S/N比良く読み出すためには、
カー回転角を大きくすれば良い。表1には非晶質磁性膜
のカー回転角が示されている。
[Equation 1] Proportional to. Therefore, in order to read out with a good S / N ratio,
The car rotation angle should be increased. Table 1 shows the Kerr rotation angle of the amorphous magnetic film.

【0008】[0008]

【表1】 この中では、GdTbFeのカーの回転角がもっとも大
きい。
[Table 1] Of these, the Kd rotation angle of GdTbFe is the largest.

【0009】しかしながら、この値でもなお充分とはい
いがたく、更にカー回転角を大きくする研究を進めた結
果、GdFeやTbFeにCoを添加したGdFeC
o、TbFeCoは、カー回転角が大きく、特にGdT
bFeにCoを添加したGdTbFeCoの4元系非晶
質磁性合金が熱安定性に優れ、かつカー回転角が充分に
大きくS/N比の良い読み出しが可能な光磁気記録媒体
であることが見い出された。
However, this value is still not sufficient, and as a result of further research on increasing the Kerr rotation angle, GdFeC obtained by adding Co to GdFe or TbFe was found.
o and TbFeCo have large Kerr rotation angles, especially GdT
It was found that a quaternary amorphous magnetic alloy of GdTbFeCo in which Co is added to bFe is excellent in thermal stability, has a sufficiently large Kerr rotation angle, and can be read out with a good S / N ratio. It was

【0010】このように、従来の希土類−遷移金属系の
非晶質磁性合金において、遷移金属として、FeとCo
を含む系が、カー回転角を増大させることがわかる。
As described above, in the conventional rare earth-transition metal type amorphous magnetic alloy, Fe and Co are used as transition metals.
It can be seen that the system containing K increases the Kerr rotation angle.

【0011】しかしながら、Coの添加は、キュリー温
度を上昇させる。表2には、TbFeCoとGdFeC
oのカー回転角とキュリー温度が示されている。
However, the addition of Co raises the Curie temperature. Table 2 shows TbFeCo and GdFeC
The Kerr rotation angle and Curie temperature of o are shown.

【0012】[0012]

【表2】 このように、Coを添加することにより、θkを増大さ
せることが可能になるが、それに伴ってキュリー温度が
大きくなりすぎると、記録感度が著しく低下した。
[Table 2] As described above, by adding Co, it is possible to increase θk, but if the Curie temperature becomes too high accordingly, the recording sensitivity is significantly lowered.

【0013】本発明の目的は、カー回転角が充分に大き
く、かつS/N比の良い読み出しが可能なだけでなく、
適度なキュリー温度の値を持つ光磁気記録媒体を提供す
ることにある。
An object of the present invention is that not only the Kerr rotation angle is sufficiently large and the reading with a good S / N ratio is possible.
An object is to provide a magneto-optical recording medium having an appropriate Curie temperature value.

【0014】[0014]

【課題を解決するための手段】上記目的を達成し得る本
発明の光磁気記録媒体は、膜面に垂直方向に磁化容易軸
を有する非晶質Td−Dy−Fe−Co四元系合金から
なり下記一般式(I) (Tb1-Z Dyz1-y (Fe1-x Coxy ・・・ (I) 0<x≦0.3 0.2≦y≦0.8 0.3≦z≦1 を満足する磁性合金膜を有することを特徴とする。
The magneto-optical recording medium of the present invention which can achieve the above object is made of an amorphous Td-Dy-Fe-Co quaternary alloy having an easy axis of magnetization in the direction perpendicular to the film surface. becomes the following general formula (I) (Tb 1-Z Dy z) 1-y (Fe 1-x Co x) y ··· (I) 0 <x ≦ 0.3 0.2 ≦ y ≦ 0.8 0 It is characterized by having a magnetic alloy film satisfying 3 ≦ z ≦ 1.

【0015】本発明のDyTbFeCo系非晶質合金の
膜を有する光磁気媒体は、磁化容易軸が、膜面に垂直な
方向に向けられているだけに充分な磁気異方性を持たな
ければならない。このためには、まず、薄膜を非晶質で
構成する必要があり、これは、スパッタリング法あるい
は真空蒸着法などによって薄膜を成膜することによって
達成される。
The magneto-optical medium having the DyTbFeCo type amorphous alloy film of the present invention must have sufficient magnetic anisotropy that the easy axis of magnetization is oriented in the direction perpendicular to the film surface. .. For this purpose, it is first necessary to form the thin film in an amorphous state, and this is achieved by forming the thin film by a sputtering method, a vacuum evaporation method or the like.

【0016】また、上記一般式(I)で規定される組成
を採用することで、光磁気記録媒体に、充分な磁気異方
性及び充分なカー回転角を持たせることができる。
Further, by adopting the composition defined by the above general formula (I), the magneto-optical recording medium can have a sufficient magnetic anisotropy and a sufficient Kerr rotation angle.

【0017】[0017]

【実施例】【Example】

実施例1 高周波スパッタ装置において3インチ角の白板ガラスを
基板とし、ターゲットとして4インチφの(Fe0.70
0.30)合金上に、各々5mm角のDy片及びTb片を
均一に並べたものを使用した。チャンバー内を1.5×
10-5Pa以下になるまで真空排気した後、Arガスを
4×10-1Paまで導入し、真空排気系のメインバルブ
を操作することによりAr圧を3Paにした。高周波電
源により、200Wのスパッタ電力で成膜を行った。こ
のようにしてできた膜厚1000オングストロームの膜
は、膜面に垂直な方向に磁化容易軸を有し、またX線回
折により、非晶質であることを確認した。また、組成分
析の結果、この磁性膜は(Dy0.50Tb0.500.20(F
0.70Co0.300.80であり、カー回転角は、発振波長
633nmのHe−Neレーザーで測定したところ、
0.31度であった。またキュリー温度は、約160℃
であった。これは、同様に作成したGd0.25(Fe0.70
Co0.300.75のカー回転角0.40度、キュリー温度
約380℃に比較してカー回転角は、若干低下はした
が、キュリー温度を大幅に低下させることができた。
Example 1 In a high-frequency sputtering apparatus, a 3 inch square white glass plate was used as a substrate, and a 4 inch φ (Fe 0.70 C
o 0.30 ) Alloys each having 5 mm square Dy pieces and Tb pieces uniformly arranged were used. 1.5x inside the chamber
After evacuation to 10 −5 Pa or less, Ar gas was introduced up to 4 × 10 −1 Pa and the Ar pressure was set to 3 Pa by operating the main valve of the vacuum evacuation system. The film was formed with a sputtering power of 200 W by a high frequency power source. The thus-formed film having a film thickness of 1000 angstrom had an easy axis of magnetization in the direction perpendicular to the film surface, and was confirmed by X-ray diffraction to be amorphous. As a result of composition analysis, this magnetic film was (Dy 0.50 Tb 0.50 ) 0.20 (F
e 0.70 Co 0.30 ) 0.80 , and the Kerr rotation angle was measured with a He-Ne laser with an oscillation wavelength of 633 nm.
It was 0.31 degree. Curie temperature is about 160 ℃
Met. This is the same as Gd 0.25 (Fe 0.70
Co 0.30 ) 0.75 Kerr rotation angle 0.40 degrees, Curie temperature of about 380 ℃, compared with the Kerr rotation angle slightly decreased, it was possible to significantly reduce the Curie temperature.

【0018】実施例2〜5 実施例1におけるFeCo合金の組成比またはDy片、
Tb片の枚数をそれぞれ変化させる以外は実施例1と同
様にして成膜した実施例2〜5の磁性薄膜の組成、カー
回転角およびキュリー温度は表3のとおりであった。
Examples 2-5 Composition ratios or Dy pieces of the FeCo alloy in Example 1,
Table 3 shows the composition, Kerr rotation angle, and Curie temperature of the magnetic thin films of Examples 2 to 5 formed in the same manner as in Example 1 except that the number of Tb pieces was changed.

【0019】[0019]

【表3】 このように、DyTbFeCo系の磁性膜は、TbFe
Co系、GdTbFeCo系の磁性膜と比較してDyを
含むため、キュリー温度を下げることが可能となり、カ
ー回転角も充分に大きいから、記録効率、再生効率とも
に優れた光磁気記録媒体を提供することができる。
[Table 3] Thus, the DyTbFeCo-based magnetic film is
Since it contains Dy as compared with Co-based and GdTbFeCo-based magnetic films, it is possible to lower the Curie temperature and the Kerr rotation angle is sufficiently large, so that a magneto-optical recording medium having excellent recording efficiency and reproducing efficiency is provided. be able to.

【0020】[0020]

【発明の効果】本発明に係る光磁気記録媒体に用いられ
る非晶質DyTbFeCo系合金の磁性膜は、DyとC
oを含むため、Co添加によるカー回転角の増大の長所
を利用し、しかもCo添加によるキュリー温度の増大の
短所をDy添加によるキュリー温度の減少効果で相殺す
ることによって、元々の大きなカー回転角を損なうこと
なく、キュリー温度を下げることが可能となった。従っ
て、本発明の光磁気記録媒体は記録効率および再生効率
の双方において優れた特性を有している。
The magnetic film of the amorphous DyTbFeCo alloy used in the magneto-optical recording medium according to the present invention is composed of Dy and C.
Since O is included, the advantage of increasing the Kerr rotation angle due to Co addition is utilized, and the disadvantage of the increase in Curie temperature due to Co addition is offset by the effect of decreasing Curie temperature due to Dy addition, thereby increasing the original Kerr rotation angle. It has become possible to lower the Curie temperature without damaging the temperature. Therefore, the magneto-optical recording medium of the present invention has excellent characteristics in both recording efficiency and reproducing efficiency.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 膜面に垂直方向に磁化容易軸を有する非
晶質Td−Dy−Fe−Co四元系合金からなり下記一
般式(I) (Tb1-Z Dyz1-y (Fe1-x Coxy ・・・ (I) 0<x≦0.3 0.2≦y≦0.8 0.3≦z≦1 を満足する磁性合金膜を有することを特徴とする光磁気
記録媒体。
1. A following formula becomes an amorphous Td-Dy-Fe-Co quaternary alloy having an axis of easy magnetization in a direction perpendicular to the film plane (I) (Tb 1-Z Dy z) 1-y ( Fe 1-x Co x ) y (I) having a magnetic alloy film satisfying 0 <x ≦ 0.3 0.2 ≦ y ≦ 0.8 0.3 ≦ z ≦ 1 Magneto-optical recording medium.
JP12686691A 1991-04-30 1991-04-30 Magneto-optical recording medium Pending JPH05174437A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12686691A JPH05174437A (en) 1991-04-30 1991-04-30 Magneto-optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12686691A JPH05174437A (en) 1991-04-30 1991-04-30 Magneto-optical recording medium

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP21505583A Division JPS60107751A (en) 1983-11-17 1983-11-17 Photothermomagnetic recording medium

Publications (1)

Publication Number Publication Date
JPH05174437A true JPH05174437A (en) 1993-07-13

Family

ID=14945777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12686691A Pending JPH05174437A (en) 1991-04-30 1991-04-30 Magneto-optical recording medium

Country Status (1)

Country Link
JP (1) JPH05174437A (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873746A (en) * 1981-10-27 1983-05-04 Kokusai Denshin Denwa Co Ltd <Kdd> Photomagnetic recording medium
JPS5961011A (en) * 1982-09-30 1984-04-07 Ricoh Co Ltd Optical magnetic recording medium
JPS59227052A (en) * 1983-06-06 1984-12-20 Ricoh Co Ltd Photomagnetic recording medium
JPS609855A (en) * 1983-06-28 1985-01-18 Toshiba Corp Magnetic alloy

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873746A (en) * 1981-10-27 1983-05-04 Kokusai Denshin Denwa Co Ltd <Kdd> Photomagnetic recording medium
JPS5961011A (en) * 1982-09-30 1984-04-07 Ricoh Co Ltd Optical magnetic recording medium
JPS59227052A (en) * 1983-06-06 1984-12-20 Ricoh Co Ltd Photomagnetic recording medium
JPS609855A (en) * 1983-06-28 1985-01-18 Toshiba Corp Magnetic alloy

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