JPH0518019Y2 - - Google Patents
Info
- Publication number
- JPH0518019Y2 JPH0518019Y2 JP17526287U JP17526287U JPH0518019Y2 JP H0518019 Y2 JPH0518019 Y2 JP H0518019Y2 JP 17526287 U JP17526287 U JP 17526287U JP 17526287 U JP17526287 U JP 17526287U JP H0518019 Y2 JPH0518019 Y2 JP H0518019Y2
- Authority
- JP
- Japan
- Prior art keywords
- pallet
- drum
- support
- main body
- cylindrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 20
- 229910052742 iron Inorganic materials 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 7
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 claims description 5
- 229910001220 stainless steel Inorganic materials 0.000 claims description 5
- 239000010935 stainless steel Substances 0.000 claims description 5
- 230000032258 transport Effects 0.000 claims description 4
- 238000005260 corrosion Methods 0.000 claims description 3
- 230000007797 corrosion Effects 0.000 claims description 3
- 239000007788 liquid Substances 0.000 description 20
- 238000004140 cleaning Methods 0.000 description 19
- 238000000576 coating method Methods 0.000 description 17
- 239000011248 coating agent Substances 0.000 description 13
- 230000002093 peripheral effect Effects 0.000 description 12
- 238000005238 degreasing Methods 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 6
- 238000009423 ventilation Methods 0.000 description 5
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 4
- 108091008695 photoreceptors Proteins 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- -1 aluminum ions Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Automatic Assembly (AREA)
- Replacing, Conveying, And Pick-Finding For Filamentary Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17526287U JPH0518019Y2 (en, 2012) | 1987-11-16 | 1987-11-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17526287U JPH0518019Y2 (en, 2012) | 1987-11-16 | 1987-11-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0181231U JPH0181231U (en, 2012) | 1989-05-31 |
JPH0518019Y2 true JPH0518019Y2 (en, 2012) | 1993-05-13 |
Family
ID=31467067
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17526287U Expired - Lifetime JPH0518019Y2 (en, 2012) | 1987-11-16 | 1987-11-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0518019Y2 (en, 2012) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007041210A (ja) * | 2005-08-02 | 2007-02-15 | Mitsubishi Chemicals Corp | 電子写真感光体用基体用パレット |
JP2018151532A (ja) * | 2017-03-14 | 2018-09-27 | 昭和電工株式会社 | 円筒体用保持体 |
-
1987
- 1987-11-16 JP JP17526287U patent/JPH0518019Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0181231U (en, 2012) | 1989-05-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6237979B1 (en) | Wafer carrier | |
US3926305A (en) | Wafer basket | |
US4872554A (en) | Reinforced carrier with embedded rigid insert | |
JPH05211229A (ja) | ウェハーキャリア | |
US4815601A (en) | Carrier for flat panel displays | |
JPH0518019Y2 (en, 2012) | ||
JPH0518018Y2 (en, 2012) | ||
JPH0518015Y2 (en, 2012) | ||
JPH0518017Y2 (en, 2012) | ||
JPH0518016Y2 (en, 2012) | ||
JP4332867B2 (ja) | ウェーハの支持装置及び該装置を備えた移送装置 | |
US6100505A (en) | Hotplate offset ring | |
JPH04167542A (ja) | 薬液処理用基板収納カセット及びその製造方法 | |
JPH0322547A (ja) | 基板ホルダ | |
WO1989000333A1 (en) | Reinforced carrier with embedded rigid insert | |
JPH0754998Y2 (ja) | ウエハ支持具 | |
JP7424958B2 (ja) | 環状体用冶具 | |
JP2018151532A (ja) | 円筒体用保持体 | |
JPH0711469Y2 (ja) | 半導体製造装置 | |
JPH04107257U (ja) | ドラム支持具 | |
JPH07176506A (ja) | 洗浄処理装置および洗浄処理方法 | |
JP3471068B2 (ja) | 板体の支承部材およびそれを用いた板体支承用ホルダー | |
JPS6255910B2 (en, 2012) | ||
JPS6132888Y2 (en, 2012) | ||
JPS6233322Y2 (en, 2012) |