JPH0518016Y2 - - Google Patents

Info

Publication number
JPH0518016Y2
JPH0518016Y2 JP17525987U JP17525987U JPH0518016Y2 JP H0518016 Y2 JPH0518016 Y2 JP H0518016Y2 JP 17525987 U JP17525987 U JP 17525987U JP 17525987 U JP17525987 U JP 17525987U JP H0518016 Y2 JPH0518016 Y2 JP H0518016Y2
Authority
JP
Japan
Prior art keywords
pallet
drum
main body
cylindrical
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP17525987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0181228U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17525987U priority Critical patent/JPH0518016Y2/ja
Publication of JPH0181228U publication Critical patent/JPH0181228U/ja
Application granted granted Critical
Publication of JPH0518016Y2 publication Critical patent/JPH0518016Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Automatic Assembly (AREA)
  • Replacing, Conveying, And Pick-Finding For Filamentary Materials (AREA)
  • Photoreceptors In Electrophotography (AREA)
JP17525987U 1987-11-16 1987-11-16 Expired - Lifetime JPH0518016Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17525987U JPH0518016Y2 (en, 2012) 1987-11-16 1987-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17525987U JPH0518016Y2 (en, 2012) 1987-11-16 1987-11-16

Publications (2)

Publication Number Publication Date
JPH0181228U JPH0181228U (en, 2012) 1989-05-31
JPH0518016Y2 true JPH0518016Y2 (en, 2012) 1993-05-13

Family

ID=31467064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17525987U Expired - Lifetime JPH0518016Y2 (en, 2012) 1987-11-16 1987-11-16

Country Status (1)

Country Link
JP (1) JPH0518016Y2 (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07333865A (ja) * 1994-06-15 1995-12-22 Mitsubishi Chem Corp 乾燥用パレット及び電子写真感光体の製造方法
JP2018151532A (ja) * 2017-03-14 2018-09-27 昭和電工株式会社 円筒体用保持体

Also Published As

Publication number Publication date
JPH0181228U (en, 2012) 1989-05-31

Similar Documents

Publication Publication Date Title
KR102164610B1 (ko) 기판 캐리어 베이스 상에 장착될 수 있는 기판 캐리어 링을 구비한 열 처리 장치
TWI639482B (zh) 基板支撐設備與包含該基板支撐設備的基板處理設備
JPH0518016Y2 (en, 2012)
JPH0518018Y2 (en, 2012)
JPH0518015Y2 (en, 2012)
JPH0518017Y2 (en, 2012)
JPH0518019Y2 (en, 2012)
US6264036B1 (en) Process cassette
JP5767361B1 (ja) 基板処理装置
US6100505A (en) Hotplate offset ring
JPS6041214A (ja) 半導体ウエハの蒸気被覆式ベ−キング装置
US10950486B2 (en) Wafer tray
JPH0754998Y2 (ja) ウエハ支持具
CN223056006U (zh) 筒状制品浸漆用挂架
US20250197957A1 (en) Quenching tool and quenching method
JPH01106423A (ja) 縦型熱処理炉
JPH0623244U (ja) 基板の熱処理装置
KR101250982B1 (ko) 금속전극패턴 제조방법 및 제조장치
JP7707887B2 (ja) 円筒体用パレット、及び感光ドラムの製造方法
JPH0436231U (en, 2012)
JP2000258933A (ja) 電子写真感光体の乾燥用パレット
KR200151456Y1 (ko) 반도체 제조공정용 튜브 보관장치
JP2552094B2 (ja) 縦型熱処理炉用ボート
JPH0341279Y2 (en, 2012)
JPS6255910B2 (en, 2012)