JPH0517880Y2 - - Google Patents

Info

Publication number
JPH0517880Y2
JPH0517880Y2 JP1985088424U JP8842485U JPH0517880Y2 JP H0517880 Y2 JPH0517880 Y2 JP H0517880Y2 JP 1985088424 U JP1985088424 U JP 1985088424U JP 8842485 U JP8842485 U JP 8842485U JP H0517880 Y2 JPH0517880 Y2 JP H0517880Y2
Authority
JP
Japan
Prior art keywords
chamber
sample
reaction processing
plasma
mounting table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985088424U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61203544U (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985088424U priority Critical patent/JPH0517880Y2/ja
Publication of JPS61203544U publication Critical patent/JPS61203544U/ja
Application granted granted Critical
Publication of JPH0517880Y2 publication Critical patent/JPH0517880Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1985088424U 1985-06-12 1985-06-12 Expired - Lifetime JPH0517880Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985088424U JPH0517880Y2 (fr) 1985-06-12 1985-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985088424U JPH0517880Y2 (fr) 1985-06-12 1985-06-12

Publications (2)

Publication Number Publication Date
JPS61203544U JPS61203544U (fr) 1986-12-22
JPH0517880Y2 true JPH0517880Y2 (fr) 1993-05-13

Family

ID=30641543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985088424U Expired - Lifetime JPH0517880Y2 (fr) 1985-06-12 1985-06-12

Country Status (1)

Country Link
JP (1) JPH0517880Y2 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5324303A (en) * 1976-08-19 1978-03-07 Still Carl Friedrich Device for autmatically and periodically switching regenerative heating of coke oven battery and changing kind of heating gas
JPS5494282A (en) * 1977-12-30 1979-07-25 Ibm Negative ion extractor
JPS5799743A (en) * 1980-12-11 1982-06-21 Matsushita Electric Ind Co Ltd Apparatus and method of plasma etching

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5324303A (en) * 1976-08-19 1978-03-07 Still Carl Friedrich Device for autmatically and periodically switching regenerative heating of coke oven battery and changing kind of heating gas
JPS5494282A (en) * 1977-12-30 1979-07-25 Ibm Negative ion extractor
JPS5799743A (en) * 1980-12-11 1982-06-21 Matsushita Electric Ind Co Ltd Apparatus and method of plasma etching

Also Published As

Publication number Publication date
JPS61203544U (fr) 1986-12-22

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