JPH0517313B2 - - Google Patents
Info
- Publication number
- JPH0517313B2 JPH0517313B2 JP11560585A JP11560585A JPH0517313B2 JP H0517313 B2 JPH0517313 B2 JP H0517313B2 JP 11560585 A JP11560585 A JP 11560585A JP 11560585 A JP11560585 A JP 11560585A JP H0517313 B2 JPH0517313 B2 JP H0517313B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- base material
- nitride film
- groove
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 93
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 93
- 239000000463 material Substances 0.000 claims description 88
- 238000000034 method Methods 0.000 claims description 28
- 238000005229 chemical vapour deposition Methods 0.000 claims description 23
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 239000002585 base Substances 0.000 description 78
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 13
- 229910052799 carbon Inorganic materials 0.000 description 13
- 239000000758 substrate Substances 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 238000001816 cooling Methods 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000002411 adverse Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11560585A JPS61272382A (ja) | 1985-05-29 | 1985-05-29 | 化学蒸着法による窒化珪素自立体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11560585A JPS61272382A (ja) | 1985-05-29 | 1985-05-29 | 化学蒸着法による窒化珪素自立体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61272382A JPS61272382A (ja) | 1986-12-02 |
| JPH0517313B2 true JPH0517313B2 (enrdf_load_html_response) | 1993-03-08 |
Family
ID=14666769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11560585A Granted JPS61272382A (ja) | 1985-05-29 | 1985-05-29 | 化学蒸着法による窒化珪素自立体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61272382A (enrdf_load_html_response) |
-
1985
- 1985-05-29 JP JP11560585A patent/JPS61272382A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61272382A (ja) | 1986-12-02 |
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