JPH0517309B2 - - Google Patents
Info
- Publication number
- JPH0517309B2 JPH0517309B2 JP60110935A JP11093585A JPH0517309B2 JP H0517309 B2 JPH0517309 B2 JP H0517309B2 JP 60110935 A JP60110935 A JP 60110935A JP 11093585 A JP11093585 A JP 11093585A JP H0517309 B2 JPH0517309 B2 JP H0517309B2
- Authority
- JP
- Japan
- Prior art keywords
- ionization
- film
- atoms
- laser mirror
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/22—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using physical deposition, e.g. vacuum deposition or sputtering
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60110935A JPS61268016A (ja) | 1985-05-23 | 1985-05-23 | レーザーミラー膜の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60110935A JPS61268016A (ja) | 1985-05-23 | 1985-05-23 | レーザーミラー膜の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61268016A JPS61268016A (ja) | 1986-11-27 |
| JPH0517309B2 true JPH0517309B2 (cg-RX-API-DMAC7.html) | 1993-03-08 |
Family
ID=14548318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60110935A Granted JPS61268016A (ja) | 1985-05-23 | 1985-05-23 | レーザーミラー膜の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61268016A (cg-RX-API-DMAC7.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6375790B1 (en) | 1999-07-19 | 2002-04-23 | Epion Corporation | Adaptive GCIB for smoothing surfaces |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6048831B2 (ja) * | 1978-06-22 | 1985-10-29 | 日本電気株式会社 | バブル用パルス電流駆動装置 |
| JPS58181159A (ja) * | 1982-04-17 | 1983-10-22 | Nec Corp | 状態履歴記憶回路 |
-
1985
- 1985-05-23 JP JP60110935A patent/JPS61268016A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61268016A (ja) | 1986-11-27 |