JPH0516664B2 - - Google Patents

Info

Publication number
JPH0516664B2
JPH0516664B2 JP21838086A JP21838086A JPH0516664B2 JP H0516664 B2 JPH0516664 B2 JP H0516664B2 JP 21838086 A JP21838086 A JP 21838086A JP 21838086 A JP21838086 A JP 21838086A JP H0516664 B2 JPH0516664 B2 JP H0516664B2
Authority
JP
Japan
Prior art keywords
marking
unit element
pattern
defective
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP21838086A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6373535A (ja
Inventor
Hideo Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP21838086A priority Critical patent/JPS6373535A/ja
Publication of JPS6373535A publication Critical patent/JPS6373535A/ja
Publication of JPH0516664B2 publication Critical patent/JPH0516664B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP21838086A 1986-09-16 1986-09-16 半導体装置の製造方法 Granted JPS6373535A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21838086A JPS6373535A (ja) 1986-09-16 1986-09-16 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21838086A JPS6373535A (ja) 1986-09-16 1986-09-16 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6373535A JPS6373535A (ja) 1988-04-04
JPH0516664B2 true JPH0516664B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-05

Family

ID=16718990

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21838086A Granted JPS6373535A (ja) 1986-09-16 1986-09-16 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6373535A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2728104A1 (fr) * 1994-12-09 1996-06-14 Sgs Thomson Microelectronics Procede de marquage de circuits integres avec un laser, et appareil de marquage s'y rapportant

Also Published As

Publication number Publication date
JPS6373535A (ja) 1988-04-04

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