JPH0516584B2 - - Google Patents

Info

Publication number
JPH0516584B2
JPH0516584B2 JP5309985A JP5309985A JPH0516584B2 JP H0516584 B2 JPH0516584 B2 JP H0516584B2 JP 5309985 A JP5309985 A JP 5309985A JP 5309985 A JP5309985 A JP 5309985A JP H0516584 B2 JPH0516584 B2 JP H0516584B2
Authority
JP
Japan
Prior art keywords
alignment
alignment key
mask
key
photolithography process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5309985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6224259A (ja
Inventor
Hiroaki Oonishi
Shunji Nakada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP60053099A priority Critical patent/JPS6224259A/ja
Publication of JPS6224259A publication Critical patent/JPS6224259A/ja
Publication of JPH0516584B2 publication Critical patent/JPH0516584B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP60053099A 1985-03-15 1985-03-15 手動による電子部品のマスク位置合せ方法 Granted JPS6224259A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60053099A JPS6224259A (ja) 1985-03-15 1985-03-15 手動による電子部品のマスク位置合せ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60053099A JPS6224259A (ja) 1985-03-15 1985-03-15 手動による電子部品のマスク位置合せ方法

Publications (2)

Publication Number Publication Date
JPS6224259A JPS6224259A (ja) 1987-02-02
JPH0516584B2 true JPH0516584B2 (US06633782-20031014-M00005.png) 1993-03-04

Family

ID=12933337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60053099A Granted JPS6224259A (ja) 1985-03-15 1985-03-15 手動による電子部品のマスク位置合せ方法

Country Status (1)

Country Link
JP (1) JPS6224259A (US06633782-20031014-M00005.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5556808A (en) * 1994-06-30 1996-09-17 Motorola Inc. Method for aligning a semiconductor device
JP5673719B2 (ja) 2013-03-27 2015-02-18 Tdk株式会社 電子部品の製造装置およびその製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5382173A (en) * 1976-12-27 1978-07-20 Fujitsu Ltd Positioning method
JPS5555340A (en) * 1978-10-18 1980-04-23 Nec Kyushu Ltd Photo mask for automatically aligning exposure and automatically aligning exposure method
JPS57167111A (en) * 1981-04-06 1982-10-14 Nec Corp Production for thin film device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5382173A (en) * 1976-12-27 1978-07-20 Fujitsu Ltd Positioning method
JPS5555340A (en) * 1978-10-18 1980-04-23 Nec Kyushu Ltd Photo mask for automatically aligning exposure and automatically aligning exposure method
JPS57167111A (en) * 1981-04-06 1982-10-14 Nec Corp Production for thin film device

Also Published As

Publication number Publication date
JPS6224259A (ja) 1987-02-02

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