JPH0515058B2 - - Google Patents

Info

Publication number
JPH0515058B2
JPH0515058B2 JP60239455A JP23945585A JPH0515058B2 JP H0515058 B2 JPH0515058 B2 JP H0515058B2 JP 60239455 A JP60239455 A JP 60239455A JP 23945585 A JP23945585 A JP 23945585A JP H0515058 B2 JPH0515058 B2 JP H0515058B2
Authority
JP
Japan
Prior art keywords
resist
wafer
processing
semiconductor wafer
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60239455A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62101027A (ja
Inventor
Yoshiki Mimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP60239455A priority Critical patent/JPS62101027A/ja
Publication of JPS62101027A publication Critical patent/JPS62101027A/ja
Publication of JPH0515058B2 publication Critical patent/JPH0515058B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP60239455A 1985-10-28 1985-10-28 レジスト処理方法 Granted JPS62101027A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60239455A JPS62101027A (ja) 1985-10-28 1985-10-28 レジスト処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60239455A JPS62101027A (ja) 1985-10-28 1985-10-28 レジスト処理方法

Publications (2)

Publication Number Publication Date
JPS62101027A JPS62101027A (ja) 1987-05-11
JPH0515058B2 true JPH0515058B2 (cg-RX-API-DMAC7.html) 1993-02-26

Family

ID=17045018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60239455A Granted JPS62101027A (ja) 1985-10-28 1985-10-28 レジスト処理方法

Country Status (1)

Country Link
JP (1) JPS62101027A (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07111948B2 (ja) * 1987-12-23 1995-11-29 東京エレクトロン九州株式会社 ベーキング装置
JP2743274B2 (ja) * 1988-07-01 1998-04-22 東京エレクトロン株式会社 基板処理装置および基板搬送装置
JP3307377B2 (ja) * 1999-10-25 2002-07-24 日本電気株式会社 レジストベーキング装置及びベーキング方法

Also Published As

Publication number Publication date
JPS62101027A (ja) 1987-05-11

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees