JPH0515055B2 - - Google Patents

Info

Publication number
JPH0515055B2
JPH0515055B2 JP60211138A JP21113885A JPH0515055B2 JP H0515055 B2 JPH0515055 B2 JP H0515055B2 JP 60211138 A JP60211138 A JP 60211138A JP 21113885 A JP21113885 A JP 21113885A JP H0515055 B2 JPH0515055 B2 JP H0515055B2
Authority
JP
Japan
Prior art keywords
alignment
wafer
mask
printing apparatus
shot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60211138A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6272125A (ja
Inventor
Yoichi Kuroki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP60211138A priority Critical patent/JPS6272125A/ja
Publication of JPS6272125A publication Critical patent/JPS6272125A/ja
Publication of JPH0515055B2 publication Critical patent/JPH0515055B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP60211138A 1985-09-26 1985-09-26 半導体焼付装置 Granted JPS6272125A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60211138A JPS6272125A (ja) 1985-09-26 1985-09-26 半導体焼付装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60211138A JPS6272125A (ja) 1985-09-26 1985-09-26 半導体焼付装置

Publications (2)

Publication Number Publication Date
JPS6272125A JPS6272125A (ja) 1987-04-02
JPH0515055B2 true JPH0515055B2 (enrdf_load_stackoverflow) 1993-02-26

Family

ID=16601010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60211138A Granted JPS6272125A (ja) 1985-09-26 1985-09-26 半導体焼付装置

Country Status (1)

Country Link
JP (1) JPS6272125A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4563356B2 (ja) * 2006-08-11 2010-10-13 株式会社日立国際電気 半導体製造装置
JP4797101B2 (ja) * 2009-11-12 2011-10-19 株式会社日立国際電気 半導体製造装置における表示方法及び半導体製造装置
JP4797108B2 (ja) * 2010-03-16 2011-10-19 株式会社日立国際電気 半導体製造装置における表示方法及び半導体製造装置
JP5166575B2 (ja) * 2011-07-07 2013-03-21 株式会社日立国際電気 半導体製造装置における表示方法及び半導体製造装置
JP2012227539A (ja) * 2012-06-20 2012-11-15 Hitachi Kokusai Electric Inc ウエハ搭載状況の表示方法、表示プログラム、半導体製造装置及び半導体装置の表示方法

Also Published As

Publication number Publication date
JPS6272125A (ja) 1987-04-02

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term