JPH05150105A - Metal-surfaced mirror and production thereof - Google Patents
Metal-surfaced mirror and production thereofInfo
- Publication number
- JPH05150105A JPH05150105A JP31787091A JP31787091A JPH05150105A JP H05150105 A JPH05150105 A JP H05150105A JP 31787091 A JP31787091 A JP 31787091A JP 31787091 A JP31787091 A JP 31787091A JP H05150105 A JPH05150105 A JP H05150105A
- Authority
- JP
- Japan
- Prior art keywords
- film
- metal
- substrate
- metal surface
- surface mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Elements Other Than Lenses (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、金属表面鏡およびそ
の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal surface mirror and a method for manufacturing the same.
【０００２】[0002]
【従来の技術】各種光学装置に欠くことのできない光学
素子である金属表面鏡は、従来、表面を平滑化したガラ
ス等の基板に直接に金属膜を形成し、この金属膜表面に
透明保護層を形成して製造されている。このようにして
形成される金属表面鏡には、鏡面を構成する反射膜が環
境の影響で基板から剥がれやすいという問題がある。2. Description of the Related Art A metal surface mirror, which is an optical element indispensable for various optical devices, has heretofore been formed by directly forming a metal film on a substrate such as glass whose surface is smoothed, and forming a transparent protective layer on the surface of the metal film. Is manufactured by forming. The metal surface mirror thus formed has a problem that the reflective film forming the mirror surface is easily peeled off from the substrate under the influence of the environment.
【０００３】[0003]
【発明が解決しようとする課題】この発明は上記の如き
問題を解決するべくなされたものであって、耐環境性に
強く、基板から金属膜が剥離しにくい新規な金属表面鏡
およびその製造方法の提供を目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and is a novel metal surface mirror having high environmental resistance and in which a metal film is hardly peeled from a substrate, and a method for manufacturing the same. For the purpose of providing.
【０００４】[0004]
【課題を解決するための手段】請求項１の製造方法は以
下の如く構成される。即ち、ガラスもしくはプラスチッ
クまたはセラミックの基板の表面を平滑化し、平滑化さ
れた表面にＳｉＯ2による保護膜を形成し、この保護膜
上に金属反射膜を形成し、この金属反射膜上に透明保護
層を形成する。上記保護膜、金属反射膜、透明保護層の
形成は、真空蒸着やスパッター等、公知の成膜技術を適
宜利用できる。The manufacturing method according to claim 1 is configured as follows. That is, the surface of a glass, plastic or ceramic substrate is smoothed, a SiO 2 protective film is formed on the smoothed surface, a metal reflective film is formed on this protective film, and a transparent protective film is formed on this metal reflective film. Form the layers. For the formation of the protective film, the metal reflection film, and the transparent protective layer, known film forming techniques such as vacuum vapor deposition and sputtering can be appropriately used.
【０００５】請求項２の金属表面鏡は上記請求項１の方
法で製造された金属表面鏡である。請求項２の金属表面
鏡における金属反射膜上に形成される「透明保護層」
は、「金属反射膜の側から順に、ＭｇＦ2膜、ＴｉＯ
2膜、Ａｌ2Ｏ3膜を積層した」構造でも良いし（請求項
３）、「金属反射膜の側から順に、ＭｇＦ2膜、ＣｅＯ2
膜、Ａｌ2Ｏ3膜を積層した」構造でも良い（請求項
４）。The metal surface mirror of claim 2 is a metal surface mirror manufactured by the method of claim 1. The "transparent protective layer" formed on the metal reflective film in the metal surface mirror according to claim 2.
Says, “MgF 2 film, TiO 2 in order from the metal reflection film side.
A structure in which two films and an Al 2 O 3 film are laminated ”may be used (Claim 3), and“ MgF 2 film and CeO 2 film are formed in order from the metal reflection film side ”.
A structure in which a film and an Al 2 O 3 film are laminated ”may be used (claim 4).
【０００６】このように、この発明の金属表面鏡は、基
板と金属反射膜との間に「ＳｉＯ2の保護膜」が介設さ
れている点が従来の金属表面鏡と異なる。As described above, the metal surface mirror of the present invention differs from the conventional metal surface mirror in that the "SiO 2 protective film" is provided between the substrate and the metal reflection film.
【０００７】[0007]
【作用】ガラスやプラスチック、セラミックの基板の表
面に直接に金属反射膜を形成した従来の金属表面鏡の場
合、これを長時間空気中で使用すると、空気中の水蒸気
成分等の影響で基板から可溶性成分が析出して金属反射
膜を基板から押し上げたり、あるいは腐食し、金属表面
鏡を損なう。この傾向は特に、基板としてガラスを用い
る場合に著しい。In the case of a conventional metal surface mirror in which a metal reflection film is directly formed on the surface of a glass, plastic or ceramic substrate, if it is used in the air for a long time, it will be affected by the water vapor component in the air, etc. Soluble components are deposited and push up the metal reflection film from the substrate or corrode it, damaging the metal surface mirror. This tendency is particularly remarkable when glass is used as the substrate.
【０００８】しかるに、この発明においては、基板と金
属反射膜との間に介設される「ＳｉＯ2の保護膜」が、
析出する可溶性成分と金属反射膜との接触を妨げる。However, in the present invention, the "SiO 2 protective film" provided between the substrate and the metal reflective film is
It prevents contact between the precipitated soluble component and the metal reflective film.
【０００９】[0009]
【実施例】ガラス、プラスチック、セラミックの３種の
基板を用意し、各々の表面を平滑化した。これら基板を
各材質ごとに２組に分けた。EXAMPLE Three kinds of substrates of glass, plastic and ceramic were prepared and the surface of each was smoothed. These substrates were divided into two sets for each material.
【００１０】図１（ａ）に示すように、一方の組の基板
Ｂ1には金属反射膜１としてＡｌ薄膜を直接に蒸着形成
し、その上にＭｇＦ2膜、ＴｉＯ2膜、Ａｌ2Ｏ3膜を順次
真空蒸着により積層して透明保護層２とした。このよう
に製造された金属表面鏡は従来の金属表面鏡と同種のも
のであり、比較例金属表面鏡である。As shown in FIG. 1 (a), an Al thin film is directly vapor-deposited and formed as a metal reflection film 1 on one set of substrates B 1 , and a MgF 2 film, a TiO 2 film, and an Al 2 O film are formed thereon. The three films were sequentially laminated by vacuum vapor deposition to form a transparent protective layer 2. The metal surface mirror thus manufactured is of the same type as the conventional metal surface mirror, and is a comparative example metal surface mirror.
【００１１】これに対し他方の組の基板Ｂ2には、図１
（ｂ）に示すように、平滑化された表面にＳｉＯ2を蒸
着して保護膜０とし、この保護膜０の上にＡｌ薄膜を金
属反射膜１として蒸着形成し、その上に、ＭｇＦ2膜、
ＴｉＯ2膜、Ａｌ2Ｏ3膜を真空蒸着により順次積層して
透明保護層２とした。これらは、実施例金属表面鏡であ
る。On the other hand, the other set of substrates B 2 is shown in FIG.
As shown in (b), SiO 2 is vapor-deposited on the smoothed surface to form a protective film 0, an Al thin film is vapor-deposited and formed on the protective film 0 as a metal reflection film 1, and MgF 2 is formed thereon. film,
A TiO 2 film and an Al 2 O 3 film were sequentially laminated by vacuum vapor deposition to form a transparent protective layer 2. These are the example metal surface mirrors.
【００１２】保護膜０の幾何学的厚さは５００Åであ
る。Ａｌ膜による金属反射膜１の幾何学的厚さは比較例
・実施例金属表面鏡とも１２００Å以上である。また透
明保護層２を構成するＭｇＦ2膜、ＴｉＯ2膜、Ａｌ2Ｏ3
膜の幾何学的厚さは、比較例・実施例金属表面鏡とも、
ＭｇＦ2膜が９００Å、ＴｉＯ2膜が４９０Å、Ａｌ2Ｏ3
膜が８５Åである。The protective film 0 has a geometrical thickness of 500Å. The geometrical thickness of the metal reflection film 1 made of an Al film is 1200 Å or more in both the comparative and example metal surface mirrors. In addition, the MgF 2 film, the TiO 2 film, and the Al 2 O 3 film forming the transparent protective layer 2
The geometrical thickness of the film is
MgF 2 film is 900Å, TiO 2 film is 490Å, Al 2 O 3
The membrane is 85Å.
【００１３】これら比較例・実施例金属表面鏡を、５．
０ｗｔ％の食塩水に浸漬する「塩水浸漬耐環境性試験
法」で耐環境性をテストしたところ、比較例金属表面鏡
のほうは浸漬後４時間で金属反射膜の剥離が認められ
た。一方、実施例金属表面鏡の方はいずれも、浸漬後８
０時間以上経過しても金属反射膜の剥離等は認められ
ず、製造当初の性能を維持していた。上記実施例金属表
面鏡の透明保護層２におけるＴｉＯ2膜をＣｅＯ2膜に代
えても上記と同様の結果が得られた。These comparative examples and examples of metal surface mirrors
When the environment resistance was tested by the "salt water immersion environment resistance test method" of immersing in 0 wt% saline, the metal surface mirror of Comparative Example was found to peel off the metal reflection film 4 hours after immersion. On the other hand, in all of the metal surface mirrors of the examples, 8 after immersion.
No peeling of the metal reflection film was observed even after 0 hour or more, and the initial performance was maintained. Even when the CeO 2 film was used instead of the TiO 2 film in the transparent protective layer 2 of the metal surface mirror of the above example, the same result as above was obtained.
【００１４】[0014]
【発明の効果】以上のように、この発明によれば新規な
金属表面鏡とその製造方法を提供できる。この金属表面
鏡は、上述のように基板と金属反射膜との間に「ＳｉＯ
2による保護膜」が形成されるので、基板から析出する
可溶性成分による金属反射膜の損傷が有効に防止され、
優れた耐環境性を実現できる。As described above, according to the present invention, a novel metal surface mirror and its manufacturing method can be provided. As described above, this metal surface mirror is made of "SiO 2" between the substrate and the metal reflection film.
Since the "protective film by 2 " is formed, damage to the metal reflective film due to the soluble components deposited from the substrate is effectively prevented,
Excellent environmental resistance can be realized.
【図１】この発明の金属表面鏡の構造を説明するための
図で、（ａ）は比較例金属表面鏡の構造を示す図、
（ｂ）は実施例金属表面鏡の構造を示す図である。FIG. 1 is a diagram for explaining the structure of a metal surface mirror of the present invention, in which (a) is a diagram showing the structure of a comparative metal surface mirror;
(B) is a figure which shows the structure of the metal surface mirror of an Example.
Ｂ1，Ｂ2 基板、０ 保護膜、１ 金属反
射膜、２ 透明保護膜B 1 , B 2 substrate, 0 protective film, 1 metal reflective film, 2 transparent protective film
Claims (4)
ックの基板の表面を平滑化し、平滑化された表面にＳｉ
Ｏ2による保護膜を形成し、この保護膜上に金属反射膜
を形成し、この金属反射膜上に透明保護層を形成するこ
とを特徴とする金属表面鏡製造方法。1. A surface of a glass, plastic, or ceramic substrate is smoothed, and Si is smoothed on the smoothed surface.
A method of manufacturing a metal surface mirror, comprising forming a protective film of O 2 , forming a metal reflective film on the protective film, and forming a transparent protective layer on the metal reflective film.
鏡。2. A metal surface mirror manufactured by the method according to claim 1.
ＴｉＯ2膜、Ａｌ2Ｏ3膜を積層した構造であることを特
徴とする金属表面鏡。3. The transparent protective layer according to claim 2, wherein the transparent protective layer is a MgF 2 film in that order from the metal reflection film side.
A metal surface mirror having a structure in which a TiO 2 film and an Al 2 O 3 film are laminated.
ＣｅＯ2膜、Ａｌ2Ｏ3膜を積層した構造であることを特
徴とする金属表面鏡。4. The transparent protective layer according to claim 2, wherein the transparent protective layer is a MgF 2 film in order from the metal reflection film side.
A metal surface mirror having a structure in which a CeO 2 film and an Al 2 O 3 film are laminated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31787091A JPH05150105A (en) | 1991-12-02 | 1991-12-02 | Metal-surfaced mirror and production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31787091A JPH05150105A (en) | 1991-12-02 | 1991-12-02 | Metal-surfaced mirror and production thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05150105A true JPH05150105A (en) | 1993-06-18 |
Family
ID=18092983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31787091A Pending JPH05150105A (en) | 1991-12-02 | 1991-12-02 | Metal-surfaced mirror and production thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05150105A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6558741B2 (en) | 2000-06-05 | 2003-05-06 | Fuji Photo Optical Co., Ltd. | Aluminum reflecting mirror and method of making the same |
| JP2006323054A (en) * | 2005-05-18 | 2006-11-30 | Hitachi Ltd | Projection type graphic display device, and optical member and optical unit for use in the same |
| WO2007073051A1 (en) * | 2005-12-21 | 2007-06-28 | E.M.W. Antenna Co., Ltd. | Plate with a reflective surface and method for producing the same |
| JP2009534522A (en) * | 2006-04-19 | 2009-09-24 | ローパル アーゲー | Method for producing an anti-corrosion processed and particularly glossy support together with the anti-corrosion processed support |
| JP2011221208A (en) * | 2010-04-08 | 2011-11-04 | Konica Minolta Opto Inc | Aluminum surface reflection mirror |
| CN106324731A (en) * | 2016-10-28 | 2017-01-11 | 宜昌南玻显示器件有限公司 | Multi-functional reflective film of on-board exterior mirror and preparation method |
| CN109628894A (en) * | 2018-12-29 | 2019-04-16 | 润坤(上海)光学科技有限公司 | A kind of preparation method of far ultraviolet high reflective mirror |
-
1991
- 1991-12-02 JP JP31787091A patent/JPH05150105A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6558741B2 (en) | 2000-06-05 | 2003-05-06 | Fuji Photo Optical Co., Ltd. | Aluminum reflecting mirror and method of making the same |
| US6643078B2 (en) | 2000-06-05 | 2003-11-04 | Fuji Photo Optical Co., Ltd. | Aluminum reflecting mirror and method of making the same |
| DE10126364B4 (en) * | 2000-06-05 | 2006-02-09 | Fujinon Corp. | Aluminum reflecting mirror and process for its production |
| DE10126364B9 (en) * | 2000-06-05 | 2006-07-13 | Fujinon Corp. | Aluminum reflecting mirror and process for its production |
| JP2006323054A (en) * | 2005-05-18 | 2006-11-30 | Hitachi Ltd | Projection type graphic display device, and optical member and optical unit for use in the same |
| WO2007073051A1 (en) * | 2005-12-21 | 2007-06-28 | E.M.W. Antenna Co., Ltd. | Plate with a reflective surface and method for producing the same |
| JP2009534522A (en) * | 2006-04-19 | 2009-09-24 | ローパル アーゲー | Method for producing an anti-corrosion processed and particularly glossy support together with the anti-corrosion processed support |
| US8993119B2 (en) | 2006-04-19 | 2015-03-31 | Ropal Europe Ag | Process for producing a corrosion-protected and high-gloss substrate |
| JP2011221208A (en) * | 2010-04-08 | 2011-11-04 | Konica Minolta Opto Inc | Aluminum surface reflection mirror |
| CN106324731A (en) * | 2016-10-28 | 2017-01-11 | 宜昌南玻显示器件有限公司 | Multi-functional reflective film of on-board exterior mirror and preparation method |
| CN109628894A (en) * | 2018-12-29 | 2019-04-16 | 润坤(上海)光学科技有限公司 | A kind of preparation method of far ultraviolet high reflective mirror |
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