JPH08327809A - Plastic reflecting mirror - Google Patents
Plastic reflecting mirrorInfo
- Publication number
- JPH08327809A JPH08327809A JP7133096A JP13309695A JPH08327809A JP H08327809 A JPH08327809 A JP H08327809A JP 7133096 A JP7133096 A JP 7133096A JP 13309695 A JP13309695 A JP 13309695A JP H08327809 A JPH08327809 A JP H08327809A
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- plastic
- reflecting mirror
- adhesion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Elements Other Than Lenses (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、プラスチック製反射ミ
ラーに関し、詳しくは、複写機、ファクシミリ装置、レ
ーザプリンタ、プロジェクター、各種カメラ等の光学部
品に使用するができるプラスチック製反射ミラーに関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plastic reflecting mirror, and more particularly to a plastic reflecting mirror that can be used for optical parts such as copying machines, facsimile machines, laser printers, projectors and various cameras.
【０００２】[0002]
【従来の技術】従来の反射ミラーはミラー基板として専
らガラスが用いられ、このガラス基板上にアルミニウ
ム、金あるいは銅等の金属を真空蒸着やスパッタリング
等で成膜することにより、反射膜を成形するようにして
いた。ところが、近時にあっては、ミラーの要求品質が
高く、反射面も平面のみならず、凹面や凸面状のものも
出現し、しかもその形状も球面や非球面でかつ、面粗さ
が極力小さい高精度なものが要求されるため、ガラス基
板に代えてプラスチック基板が多用されるようになって
いる。2. Description of the Related Art In a conventional reflection mirror, glass is exclusively used as a mirror substrate, and a metal such as aluminum, gold or copper is formed on the glass substrate by vacuum deposition or sputtering to form a reflection film. Was doing. However, recently, the quality required of mirrors is high, and not only flat reflecting surfaces but also concave or convex surfaces appear, and the shapes are spherical or aspherical and the surface roughness is as small as possible. Since high precision is required, plastic substrates have been widely used instead of glass substrates.
【０００３】従来のこの種のプラスチック製反射ミラー
にあっては、プラスチック基板上に成形されたＳｉＯ2
からなる下地膜と、この下地膜上に成形された銅やアル
ミニウム等からな反射膜と、この反射膜上に成形された
保護膜と、から構成されている（例えば、特開平５−１
２７００５号公報、特開平５−２８１４０５号公報参
照）。In the conventional plastic reflecting mirror of this kind, SiO 2 formed on a plastic substrate is used.
And a protective film formed on the reflective film and a protective film formed on the reflective film (see, for example, JP-A 5-1).
27005, JP-A-5-281405).
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、このよ
うな従来のプラスチック製反射ミラーにあっては、プラ
スチック基板と反射膜の間に金属に比べて吸水率が大き
いＳｉＯ2を介装していたため、このＳｉＯ2を密着膜と
した場合には、当初の密着性は良好にすることかできる
が時間と共に密着性が低下してしまうという問題があっ
た。However, in such a conventional plastic reflecting mirror, since SiO 2 having a higher water absorption rate than metal is interposed between the plastic substrate and the reflecting film, When this SiO 2 is used as the adhesion film, the initial adhesion can be improved, but there is a problem that the adhesion decreases with time.
【０００５】そこで請求項１〜５記載の発明は、吸水率
が小さい材料して使用してプラスチック基板とその表面
の成膜との密着性を良好にすることができ、安定した品
質を維持することができるプラスチック製反射ミラーを
提供することを目的としている。請求項６記載の発明
は、寸法安定性が良好で経時変化の小さい非晶質樹脂を
基板として用いることにより、プラスチック基板とその
表面の成膜との密着性を良好にしつつ容易に構成するこ
とができるプラスチック製反射ミラーを提供することを
目的としている。Therefore, the invention according to claims 1 to 5 can be used as a material having a low water absorption rate to improve the adhesion between the plastic substrate and the film formed on the surface thereof, and maintain stable quality. An object of the present invention is to provide a plastic reflection mirror that can be used. According to the sixth aspect of the present invention, by using an amorphous resin having good dimensional stability and little change over time as a substrate, it is possible to easily form the plastic substrate with good adhesion between the plastic substrate and the film formed on the surface thereof. It is an object of the present invention to provide a plastic reflecting mirror that can be manufactured.
【０００６】請求項７記載の発明は、用途に応じて使用
することができる上に設計の自由度を向上させることが
できるプラスチック製反射ミラーを提供することを目的
としている。It is an object of the present invention to provide a plastic reflecting mirror which can be used according to the intended use and can improve the degree of freedom in design.
【０００７】[0007]
【課題を解決するための手段】請求項１記載の発明は、
上記課題を解決するために、プラスチック製基板と、こ
の基板の表面に成形されニッケル・クロム合金からなる
密着膜と、この密着膜の表面に成形されアルミニウムか
らなる反射膜と、該反射膜の表面に成形され２酸化ケイ
素からなる保護膜と、から構成されることを特徴として
いる。According to the first aspect of the present invention,
In order to solve the above problems, a plastic substrate, an adhesion film formed on the surface of the substrate and made of a nickel-chromium alloy, a reflection film formed on the surface of the adhesion film and made of aluminum, and a surface of the reflection film And a protective film formed of silicon dioxide.
【０００８】請求項２記載の発明は、上記課題を解決す
るために、プラスチック製基板と、この基板の表面に成
形されニッケル・クロム合金からなる密着膜と、この密
着膜の表面に成形されアルミニウムからなる反射膜と、
該反射膜の表面に成形され２酸化ケイ素と２酸化チタン
および２酸化ケイ素と２酸化ジルコニウムの何れか一方
からなる保護膜と、から構成されることを特徴としてい
る。In order to solve the above problems, a second aspect of the present invention is directed to a plastic substrate, an adhesive film formed on the surface of the substrate and made of a nickel-chromium alloy, and an aluminum film formed on the surface of the adhesive film. A reflective film consisting of
It is characterized in that it is composed of a protective film formed on the surface of the reflection film and made of any one of silicon dioxide and titanium dioxide, and silicon dioxide and zirconium dioxide.
【０００９】請求項３記載の発明は、上記課題を解決す
るために、プラスチック製基板と、この基板の表面に成
形されクロムおよび１酸化ケイ素からなる密着膜と、こ
の密着膜の表面に成形されアルミニウムからなる反射膜
と、該反射膜の表面に成形され２酸化ケイ素からなる保
護膜と、から構成されることを特徴としている。請求項
４記載の発明は、上記課題を解決するために、プラスチ
ック製基板と、この基板の表面に成形されクロムおよび
１酸化ケイ素からなる密着膜と、この密着膜の表面に成
形されアルミニウムからなる反射膜と、該反射膜の表面
に成形され２酸化ケイ素と２酸化チタンおよび２酸化ケ
イ素と２酸化ジルコニウムの何れか一方からなる保護膜
と、から構成されることを特徴としている。In order to solve the above-mentioned problems, the invention according to claim 3 forms a plastic substrate, an adhesion film formed on the surface of the substrate and made of chromium and silicon monoxide, and formed on the surface of the adhesion film. It is characterized by comprising a reflective film made of aluminum and a protective film formed on the surface of the reflective film and made of silicon dioxide. In order to solve the above-mentioned problems, the invention according to claim 4 is made of a plastic substrate, an adhesion film formed on the surface of the substrate and made of chromium and silicon monoxide, and made of aluminum formed on the surface of the adhesion film. It is characterized by comprising a reflective film and a protective film formed on the surface of the reflective film and comprising one of silicon dioxide and titanium dioxide and silicon dioxide and zirconium dioxide.
【００１０】請求項５記載の発明は、上記課題を解決す
るために、請求項１または２記載の発明において、前記
ニッケル・クロム合金が、インコネルＸおよびクロメル
Ａの何れか一方からなることを特徴としている。請求項
６記載の発明は、上記課題を解決するために、請求項１
〜５何れかに記載の発明において、前記プラスチック製
基板が非晶質樹脂からなることを特徴としている。In order to solve the above-mentioned problems, the invention according to claim 5 is characterized in that, in the invention according to claim 1 or 2, the nickel-chromium alloy is composed of either Inconel X or chromel A. I am trying. In order to solve the above-mentioned problems, the invention according to claim 6 is the same as claim 1
The invention according to any one of items 1 to 5 is characterized in that the plastic substrate is made of an amorphous resin.
【００１１】請求項７記載の発明は、上記課題を解決す
るために、請求項１〜６何れかに記載の発明において、
プラスチック製反射ミラーの全体形状が平面、凸面、凹
面、球面、あるいは非球面の何れかの形状からなること
を特徴としている。In order to solve the above-mentioned problems, the invention according to claim 7 is the invention according to any one of claims 1 to 6,
The entire shape of the plastic reflecting mirror is characterized in that it is a flat surface, a convex surface, a concave surface, a spherical surface, or an aspherical surface.
【００１２】[0012]
【作用】請求項１記載の発明では、プラスチック製基板
とアルミニウムからなる反射膜の間に吸水率が小さいニ
ッケル・クロム合金からなる密着膜が成形されるので、
周囲の雰囲気の変化によって密着膜へ水分が侵入するこ
とがなく、プラスチック製基板と反射膜の密着性が大幅
に向上され、反射ミラーの品質が低下することが抑制さ
れる。According to the first aspect of the present invention, since the adhesion film made of nickel-chromium alloy having a small water absorption rate is formed between the plastic substrate and the reflection film made of aluminum,
Water does not enter the adhesive film due to changes in the surrounding atmosphere, the adhesiveness between the plastic substrate and the reflective film is significantly improved, and deterioration of the quality of the reflective mirror is suppressed.
【００１３】請求項２記載の発明では、請求項１記載の
発明の作用に加えて、反射膜の表面に２酸化ケイ素に比
較して屈曲率の高い２酸化チタンあるいは２酸化ジルコ
ニウムの何れか一方が２酸化ケイ素に組み合わされるの
で、反射率が大幅に向上する。請求項３記載の発明で
は、プラスチック製基板とアルミニウム膜からなる反射
膜の間に吸水率の小さいクロムおよび１酸化ケイ素から
なる密着膜が成形されるので、周囲の雰囲気の変化によ
って密着膜へ水分が侵入することがなく、プラスチック
製基板と反射膜の密着性が大幅に向上され、反射ミラー
の品質が低下することが抑制される。According to the invention of claim 2, in addition to the function of the invention of claim 1, either titanium dioxide or zirconium dioxide having a higher bending ratio than the surface of the reflective film is used. Is combined with silicon dioxide, the reflectance is greatly improved. According to the third aspect of the present invention, the adhesion film made of chromium and silicon monoxide having a low water absorption rate is formed between the plastic substrate and the reflection film made of the aluminum film. Does not enter, the adhesion between the plastic substrate and the reflective film is significantly improved, and deterioration of the quality of the reflective mirror is suppressed.
【００１４】請求項４記載の発明では、請求項３記載の
発明の作用に加えて、反射膜の表面に２酸化ケイ素に比
較して屈曲率の高い２酸化チタンあるいは２酸化ジルコ
ニウムの何れか一方が２酸化ケイ素に組み合わされるの
で、反射率が大幅に向上する。請求項５記載の発明で
は、プラスチック製基板とアルミニウムからなる反射膜
の間に吸水率の小さいインコネルＸおよびクロメルＡの
何れか一方からなる密着膜が成形されるので、周囲の雰
囲気の変化によって密着膜へ水分が侵入することがな
く、プラスチック製基板と反射膜の密着性が大幅に向上
され、反射ミラーの品質が低下することが抑制される。According to the invention of claim 4, in addition to the effect of the invention of claim 3, either one of titanium dioxide or zirconium dioxide having a higher bending rate than that of silicon dioxide is formed on the surface of the reflective film. Is combined with silicon dioxide, the reflectance is greatly improved. In the invention according to claim 5, since the adhesion film made of either Inconel X or Chromel A having a small water absorption rate is formed between the plastic substrate and the reflection film made of aluminum, the adhesion is improved by the change of the surrounding atmosphere. Water does not enter the film, the adhesion between the plastic substrate and the reflective film is significantly improved, and the quality of the reflective mirror is suppressed from being degraded.
【００１５】請求項６記載の発明では、プラスチック製
基板が非晶質樹脂からなるので、寸法安定性が良好で経
時変化の小さい非晶質樹脂の特性を利用することで、プ
ラスチック基板とその表面の成膜との密着性が良好に保
持されつつ、反射ミラーが容易に構成される。請求項７
記載の発明では、反射ミラーの全体形状が平面、凸面、
凹面、球面、あるいは非球面の何れかの形状をしている
ので、用途に応じて適宜使用することができる。また、
基板がプラスチック製であるので、平面、凸面、凹面、
球面、あるいは非球面が極めて簡単に成形され、その設
計の自由度が向上する。According to the sixth aspect of the invention, since the plastic substrate is made of an amorphous resin, the characteristics of the amorphous resin having good dimensional stability and little change over time are utilized to obtain the plastic substrate and its surface. The reflective mirror is easily configured while maintaining good adhesion to the film formation. Claim 7
In the described invention, the overall shape of the reflection mirror is a flat surface, a convex surface,
Since it has a concave surface, a spherical surface, or an aspherical surface, it can be appropriately used depending on the application. Also,
Since the substrate is made of plastic, it can be flat, convex, concave,
A spherical surface or an aspherical surface can be molded very easily, and the degree of freedom in its design is improved.
【００１６】[0016]
【実施例】以下、本発明の実施例を図面に基づいて説明
する。図１は本発明に係るプラスチック製反射ミラーの
一実施例を示す図である。まず、構成を説明する。図１
において、１は平面状に成形されパンライト（帝人化成
社製）の非晶質樹脂からなるプラスチック製基板、２は
基板１上に成形され、膜厚100nmを有する密着膜として
のクロメルＡ（ニッケルを主体とした耐熱、耐食合金
で、クロム80％、ニッケル20％からなるもの）、３はク
ロメルＡ２上に成形され、膜厚100nmを有する反射膜と
してのアルミニウム、４はアルミニウム３上に成形さ
れ、膜厚260nmを有する保護膜としてのＳｉＯ2（２酸化
ケイ素）であり、これらパンライト１、クロメルＡ２、
アルミニウム３、ＳｉＯ2４によって反射ミラー５が構
成される。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing an embodiment of a plastic reflecting mirror according to the present invention. First, the configuration will be described. FIG.
In the figure, 1 is a plastic substrate made of a panlite (made by Teijin Chemicals) amorphous resin and 2 is molded on the substrate 1, and chromel A (nickel is an adhesion film having a thickness of 100 nm). A heat-resistant and corrosion-resistant alloy mainly composed of 80% chromium and 20% nickel), 3 is formed on chromel A2, aluminum as a reflective film having a thickness of 100 nm, 4 is formed on aluminum 3 SiO 2 (silicon dioxide) as a protective film having a film thickness of 260 nm, and these are Panlite 1, Chromel A 2,
The reflection mirror 5 is composed of aluminum 3 and SiO 2 .
【００１７】次に、このような反射ミラー５の成形方法
について説明する。まず、公知の射出成形法等によって
平面状に成形されパンライト１を準備し、このパンライ
ト基板１を真空槽に入れ、真空度１×10-3Paで排気した
後、真空槽内にアルゴンガスを入れる。次いで、真空度
１×10-1Paを保ちながら真空槽内を放電状態として基板
１の洗浄を行なった後、再び真空槽内を真空度１×10-3
Paまで排気する。次いで、電気抵抗加熱方式で基板１上
にクロメルＡ２を蒸着した後、クロメルＡ２上に同様の
方式でアルミニウム３を蒸着する。次いで、電子ビーム
加熱方式によってアルミニウム３上にＳｉＯ2を蒸着す
る。Next, a method of molding such a reflection mirror 5 will be described. First, a panlite 1 molded in a plane by a known injection molding method or the like is prepared, and the panlite substrate 1 is placed in a vacuum chamber and evacuated at a vacuum degree of 1 × 10 −3 Pa, and then argon is placed in the vacuum chamber. Add gas. Then, the degree of vacuum 1 × 10 -1 after performing cleaning of the substrate 1 a vacuum chamber as a discharge state while maintaining Pa, vacuum 1 × 10 -3 to vacuum tank again
Exhaust to Pa. Then, after chromel A2 is vapor-deposited on the substrate 1 by an electric resistance heating method, aluminum 3 is vapor-deposited on the chromel A2 by the same method. Then, SiO 2 is vapor-deposited on the aluminum 3 by the electron beam heating method.
【００１８】本実施例では、このように成形された反射
ミラー５を真空槽から恒温槽に移動してそれぞれ温度６
０℃、湿度９０％の条件下で１００時間放置した結果、
図２の＋で示すように良好な反射率を得ることができ
た。また、パンライト１とアルミニウム３の密着性も十
分であることが確認された。これは、パンライト１とア
ルミニウム３の間に吸水率の小さいクロメルＡ２を成形
したため、周囲の雰囲気の変化によってパンライト１が
吸水してもクロメルＡ２へ水分が侵入するのを防止する
ことができ、パンライト１とクロメルＡ２の密着性を向
上させることができるからであり、この結果、反射ミラ
ー５の品質が低下することを抑制することができる。な
お、本実施例では、反射膜としてアルミニウム３を使用
しているが、これに代えて銅や金を使用しても良い。In the present embodiment, the reflection mirror 5 thus formed is moved from the vacuum chamber to the constant temperature chamber and the temperature is adjusted to 6 ° C.
As a result of leaving for 100 hours at 0 ° C and 90% humidity,
Good reflectance could be obtained as indicated by + in FIG. It was also confirmed that the adhesion between Panlite 1 and aluminum 3 was sufficient. This is because the chromel A2 having a small water absorption rate is formed between the panlite 1 and the aluminum 3, so that even if the panlite 1 absorbs water due to a change in the surrounding atmosphere, it is possible to prevent water from entering the chromel A2. This is because the adhesion between the panlite 1 and the chromel A2 can be improved, and as a result, the quality of the reflection mirror 5 can be prevented from being degraded. Although aluminum 3 is used as the reflective film in this embodiment, copper or gold may be used instead of aluminum 3.
【００１９】また、本実施例では、保護膜をＳｉＯ2４
の一層から構成しているが、これに限らず、保護膜をＳ
ｉＯ2とＴｉＯ2（２酸化チタン）の２層（増反射ミラ
ー）から構成しても良く、また、ＳｉＯ2とＺｒＯ2（２
酸化ジルコニウム）の２層（増反射ミラー）から構成し
ても良い。この場合には、ＳｉＯ2に比較して屈曲率の
高いＴｉＯ2またはＺｒＯ2を使用することで、図２の○
で示すような高い反射率を得ることができる。なお、こ
の場合にもパンライト１とアルミニウム３の密着力を十
分で向上することができた。また、その他に、上述した
ＳｉＯ2とＴｉＯ2あるいはＳｉＯ2とＺｒＯ2上にＳｉＯ
2とＴｉＯ2あるいはＳｉＯ2とＺｒＯ2の何れか一方を積
層することによって保護膜を４層（増々反射ミラー）に
構成しても良い。この場合には、図２に△で示すように
さらに高い反射率を得ることができた。この場合にも、
パンライト１とアルミニウム３の密着力を十分で向上す
ることができた。Further, in this embodiment, the protective film is made of SiO 2 4
However, the protective film is not limited to this.
iO 2 and 2 layers of TiO 2 (2, titanium oxide) may be formed from (reflection-increasing mirror), also, SiO 2 and ZrO 2 (2
It may be composed of two layers of zirconium oxide) (increased reflection mirror). In this case, by using TiO 2 or ZrO 2 which has a higher bending rate than SiO 2 ,
It is possible to obtain a high reflectance as shown by. Even in this case, the adhesion between the panlite 1 and the aluminum 3 could be sufficiently improved. In addition, in addition to the above-mentioned SiO 2 and TiO 2 or SiO 2 and ZrO 2 , SiO
The protective film may be formed of four layers (increased reflection mirror) by laminating either one of 2 and TiO 2 or SiO 2 and ZrO 2 . In this case, a higher reflectance could be obtained as indicated by Δ in FIG. Also in this case,
The adhesion between the panlite 1 and the aluminum 3 was sufficiently improved.
【００２０】また、密着膜は上述したクロメルＡ２の代
りに、インコネルＸ（ニッケルを主体とした耐食、耐酸
化合金で、ニッケルにクロム14％、鉄６％以外にシリコ
ン、チタン、アルミニウム、ニオブを少量添加したも
の）を使用しても良い。この場合も上述したような実験
を行なった結果、パンライト１とアルミニウム３の密着
性を向上させることができた。In addition, instead of the above-mentioned chromel A2, the adhesion film is made of Inconel X (a corrosion-resistant and oxidation-resistant alloy mainly composed of nickel. Nickel is made of 14% chromium, 6% iron, silicon, titanium, aluminum and niobium. A small amount added) may be used. Also in this case, as a result of performing the experiment as described above, the adhesion between the panlite 1 and the aluminum 3 could be improved.
【００２１】また、密着膜としては、ニッケル・クロム
合金以外に、クロムおよびＳｉＯ（１酸化ケイ素）を使
用した場合でも上述したものと同様に密着性には何等遜
色はなかった。また、密着膜としてクロムおよびＳｉＯ
を使用し、保護膜として上述したように、ＳｉＯ2とＴ
ｉＯ2あるいはＳｉＯ2とＺｒＯ2の何れかの２層から構
成したものを使用した場合に、密着性を向上しつつ反射
率を向上することができた。Further, in the case where chromium and SiO (silicon monoxide) were used as the adhesive film in addition to the nickel-chromium alloy, the adhesiveness was comparable to that described above. Further, as an adhesion film, chromium and SiO
As described above, SiO 2 and T are used as the protective film.
When using the one composed of two layers of iO 2 or SiO 2 and ZrO 2 , it was possible to improve the reflectance while improving the adhesion.
【００２２】また、この２層の保護膜上にＳｉＯ2とＴ
ｉＯ2およびＳｉＯ2とＺｒＯ2の何れか一方を積層する
ことによって保護膜を４層に成形した場合にも密着性を
向上しつつ反射率を向上することができた。また、本実
施例では、基板に非晶質樹脂としてパンライトを使用し
ている、これ以外の非晶質樹脂としてゼオネックス（日
本ゼオネクス社製）、アペル（三井石油化学社製）、ザ
イロン（旭化成社製）を使用しても良い。このように基
板に非晶質材を使用すれば、寸法安定性が良好で経時変
化の小さい非晶質樹脂の特性を利用することで、基板と
その表面の成膜との密着性を良好に保持しつつ、反射ミ
ラー５を容易に成形することができる。Further, SiO 2 and T are formed on the two-layer protective film.
Even when the protective film was formed into four layers by laminating any one of iO 2 and SiO 2 and ZrO 2 , it was possible to improve the reflectance and the reflectance. In this example, panlite is used as the amorphous resin in the substrate, and as the other amorphous resins, Zeonex (manufactured by Nippon Zeonex Co., Ltd.), Apel (manufactured by Mitsui Petrochemical Co., Ltd.), Zylon (Asahi Kasei). (Made by the company) may be used. When an amorphous material is used for the substrate in this way, the adhesiveness between the substrate and the film formed on the surface of the substrate is improved by utilizing the characteristics of the amorphous resin, which has good dimensional stability and little change over time. The reflection mirror 5 can be easily molded while holding it.
【００２３】さらに、本実施例では平面状の反射ミラー
５を使用しているが、反射ミラー５の全体形状を凸面、
凹面、球面、あるいは非球面の何れかの形状にしても良
い。このようにすれば、反射ミラー５を用途に応じて適
宜使用することができる。また、基板がプラスチック製
であるので、平面、凸面、凹面、球面、あるいは非球面
を極めて簡単に成形することができ、その設計の自由度
を向上させることができる。Further, although the flat reflecting mirror 5 is used in the present embodiment, the entire reflecting mirror 5 has a convex surface,
The shape may be concave, spherical, or aspherical. In this way, the reflection mirror 5 can be used appropriately according to the application. Further, since the substrate is made of plastic, a flat surface, a convex surface, a concave surface, a spherical surface, or an aspherical surface can be molded very easily, and the degree of freedom in design can be improved.
【００２４】さらに、ミラー基板はレンズ基板とは異な
り、基板内部の欠陥が影響しないので、材料の選択に幅
を持たせることができ、生産に適した材料を選ぶことが
できる。Further, unlike the lens substrate, the mirror substrate is not affected by defects inside the substrate, so that the material can be selected in a wide range and the material suitable for production can be selected.
【００２５】[0025]
【発明の効果】請求項１〜５記載の発明によれば、ガラ
スに比べて吸水率の大きいプラスチック基板自体が吸水
しても密着膜が吸水しないので、プラスチック製基板と
反射膜の密着性を大幅に向上させることができる。この
結果、反射ミラーの品質が低下するのを抑制することが
できる。また、反射膜の表面に２酸化ケイ素に比較して
屈曲率の高い２酸化チタンあるいは２酸化ジルコニウム
の何れか一方を２酸化ケイ素に組み合わせているので、
反射率を大幅に向上させることができる。According to the first to fifth aspects of the invention, even if the plastic substrate itself having a higher water absorption rate than glass absorbs water, the adhesive film does not absorb water, so that the adhesiveness between the plastic substrate and the reflective film is improved. It can be greatly improved. As a result, it is possible to prevent the quality of the reflection mirror from being deteriorated. Further, since either the titanium dioxide or the zirconium dioxide having a higher bending rate than the silicon dioxide is combined with the silicon dioxide on the surface of the reflective film,
The reflectance can be significantly improved.
【００２６】請求項６記載の発明によれば、寸法安定性
が良好で経時変化の小さい非晶質樹脂の特性を利用する
ことで、プラスチック基板とその表面の成膜との密着性
を良好に保持しつつ、反射ミラーを容易に構成すること
ができる。請求項７記載の発明によれば、反射ミラーを
用途に応じて適宜使用することができる。また、平面、
凸面、凹面、球面、あるいは非球面を極めて簡単に成形
することができ、その設計の自由度を向上させることが
できる。According to the sixth aspect of the invention, by utilizing the characteristics of the amorphous resin having good dimensional stability and little change over time, the adhesion between the plastic substrate and the film formed on the surface of the plastic substrate is improved. The reflection mirror can be easily configured while holding it. According to the invention described in claim 7, the reflecting mirror can be appropriately used according to the application. Also a plane,
A convex surface, a concave surface, a spherical surface, or an aspherical surface can be formed extremely easily, and the degree of freedom in design can be improved.
【図１】本発明に係るプラスチック製反射ミラーの一実
施例を示すその構成図である。FIG. 1 is a configuration diagram showing an embodiment of a plastic reflecting mirror according to the present invention.
【図２】その反射ミラーの分光反射率特性図である。FIG. 2 is a spectral reflectance characteristic diagram of the reflecting mirror.
１ パンライト（プラスチック製基板） ２ クロメルＸ（密着膜） ３ アルミニウム（反射膜） ４ ＳｉＯ2（保護膜） ５ 反射ミラー1 Panlite (Plastic substrate) 2 Chromel X (Adhesive film) 3 Aluminum (Reflective film) 4 SiO 2 (Protective film) 5 Reflective mirror
Claims (7)
成形されニッケル・クロム合金からなる密着膜と、この
密着膜の表面に成形されアルミニウムからなる反射膜
と、該反射膜の表面に成形され２酸化ケイ素からなる保
護膜と、から構成されることを特徴とするプラスチック
製反射ミラー。1. A plastic substrate, an adhesion film made of nickel-chromium alloy formed on the surface of the substrate, a reflection film made of aluminum formed on the surface of the adhesion film, and an adhesion film formed on the surface of the reflection film. A plastic reflecting mirror comprising: a protective film made of silicon dioxide.
成形されニッケル・クロム合金からなる密着膜と、この
密着膜の表面に成形されアルミニウムからなる反射膜
と、該反射膜の表面に成形され２酸化ケイ素と２酸化チ
タンおよび２酸化ケイ素と２酸化ジルコニウムの何れか
一方からなる保護膜と、から構成されることを特徴とす
るプラスチック製反射ミラー。2. A plastic substrate, an adhesion film made of nickel-chromium alloy formed on the surface of the substrate, a reflection film made of aluminum formed on the surface of the adhesion film, and an adhesion film formed on the surface of the reflection film. A plastic reflecting mirror comprising a protective film made of any one of silicon dioxide and titanium dioxide, and silicon dioxide and zirconium dioxide.
成形されクロムおよび１酸化ケイ素からなる密着膜と、
この密着膜の表面に成形されアルミニウムからなる反射
膜と、該反射膜の表面に成形され２酸化ケイ素からなる
保護膜と、から構成されることを特徴とするプラスチッ
ク製反射ミラー。3. A plastic substrate, and an adhesion film formed on the surface of the substrate and comprising chromium and silicon monoxide,
A plastic reflecting mirror comprising a reflective film formed of aluminum on the surface of the adhesion film and a protective film formed of silicon dioxide on the surface of the reflective film.
成形されクロムおよび１酸化ケイ素からなる密着膜と、
この密着膜の表面に成形されアルミニウムからなる反射
膜と、該反射膜の表面に成形され２酸化ケイ素と２酸化
チタンおよび２酸化ケイ素と２酸化ジルコニウムの何れ
か一方からなる保護膜と、から構成されることを特徴と
するプラスチック製反射ミラー。4. A plastic substrate, and an adhesion film formed on the surface of the substrate and made of chromium and silicon monoxide.
A reflective film formed on the surface of the adhesion film and made of aluminum; and a protective film formed on the surface of the reflection film and made of any one of silicon dioxide and titanium dioxide and silicon dioxide and zirconium dioxide. A reflective mirror made of plastic that is characterized by being.
ＸおよびクロメルＡの何れか一方からなることを特徴と
する請求項１または２記載のプラスチック製反射ミラ
ー。5. The plastic reflecting mirror according to claim 1, wherein the nickel-chromium alloy is composed of either Inconel X or Chromel A.
なることを特徴する請求項１〜５何れかに記載のプラス
チック製反射ミラー。6. The plastic reflecting mirror according to claim 1, wherein the plastic substrate is made of an amorphous resin.
いは非球面の何れかの形状からなることを特徴とする請
求項１〜６何れかに記載のプラスチック製反射ミラー。7. The plastic reflecting mirror according to claim 1, wherein the entire shape is a flat surface, a convex surface, a concave surface, a spherical surface, or an aspherical surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7133096A JPH08327809A (en) | 1995-05-31 | 1995-05-31 | Plastic reflecting mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7133096A JPH08327809A (en) | 1995-05-31 | 1995-05-31 | Plastic reflecting mirror |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08327809A true JPH08327809A (en) | 1996-12-13 |
Family
ID=15096747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7133096A Pending JPH08327809A (en) | 1995-05-31 | 1995-05-31 | Plastic reflecting mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08327809A (en) |
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1995
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