JPH0514863B2 - - Google Patents

Info

Publication number
JPH0514863B2
JPH0514863B2 JP60078928A JP7892885A JPH0514863B2 JP H0514863 B2 JPH0514863 B2 JP H0514863B2 JP 60078928 A JP60078928 A JP 60078928A JP 7892885 A JP7892885 A JP 7892885A JP H0514863 B2 JPH0514863 B2 JP H0514863B2
Authority
JP
Japan
Prior art keywords
substrate
polymer
humidity
thin film
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60078928A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61237044A (ja
Inventor
Kunihiro Inagaki
Kae Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP60078928A priority Critical patent/JPS61237044A/ja
Publication of JPS61237044A publication Critical patent/JPS61237044A/ja
Publication of JPH0514863B2 publication Critical patent/JPH0514863B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/126—Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Non-Adjustable Resistors (AREA)
JP60078928A 1985-04-12 1985-04-12 湿度検出素子およびその製造方法 Granted JPS61237044A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60078928A JPS61237044A (ja) 1985-04-12 1985-04-12 湿度検出素子およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60078928A JPS61237044A (ja) 1985-04-12 1985-04-12 湿度検出素子およびその製造方法

Publications (2)

Publication Number Publication Date
JPS61237044A JPS61237044A (ja) 1986-10-22
JPH0514863B2 true JPH0514863B2 (enrdf_load_stackoverflow) 1993-02-26

Family

ID=13675528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60078928A Granted JPS61237044A (ja) 1985-04-12 1985-04-12 湿度検出素子およびその製造方法

Country Status (1)

Country Link
JP (1) JPS61237044A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2541246B2 (ja) * 1987-11-05 1996-10-09 エヌオーケー株式会社 薄膜感湿素子
DE3740719A1 (de) * 1987-12-01 1989-06-15 Endress Hauser Gmbh Co Verfahren und anordnung zur messung des wasserdampf-taupunkts in gasen
JP4650246B2 (ja) * 2005-12-06 2011-03-16 株式会社デンソー 湿度センサ
WO2011159480A1 (en) 2010-06-15 2011-12-22 3M Innovative Properties Company Variable capacitance sensors and methods of making the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5967445A (ja) * 1982-10-12 1984-04-17 Ozawa Juichiro 湿度センサ−
JPS5991351A (ja) * 1982-11-17 1984-05-26 Nitto Boseki Co Ltd 感湿素子
JPS59142447A (ja) * 1983-02-04 1984-08-15 Japan Synthetic Rubber Co Ltd 湿度センサーの製造方法

Also Published As

Publication number Publication date
JPS61237044A (ja) 1986-10-22

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