JPH0519102B2 - - Google Patents

Info

Publication number
JPH0519102B2
JPH0519102B2 JP26200088A JP26200088A JPH0519102B2 JP H0519102 B2 JPH0519102 B2 JP H0519102B2 JP 26200088 A JP26200088 A JP 26200088A JP 26200088 A JP26200088 A JP 26200088A JP H0519102 B2 JPH0519102 B2 JP H0519102B2
Authority
JP
Japan
Prior art keywords
electrode
dielectric layer
humidity sensor
incident angle
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP26200088A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02108952A (ja
Inventor
Shinichi Takeda
Hideki Toyoda
Kyoshi Takahashi
Juji Okunuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RKC Instrument Inc
Original Assignee
Rika Kogyo Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rika Kogyo Inc filed Critical Rika Kogyo Inc
Priority to JP26200088A priority Critical patent/JPH02108952A/ja
Publication of JPH02108952A publication Critical patent/JPH02108952A/ja
Publication of JPH0519102B2 publication Critical patent/JPH0519102B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP26200088A 1988-10-18 1988-10-18 湿度センサー Granted JPH02108952A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26200088A JPH02108952A (ja) 1988-10-18 1988-10-18 湿度センサー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26200088A JPH02108952A (ja) 1988-10-18 1988-10-18 湿度センサー

Publications (2)

Publication Number Publication Date
JPH02108952A JPH02108952A (ja) 1990-04-20
JPH0519102B2 true JPH0519102B2 (enrdf_load_stackoverflow) 1993-03-15

Family

ID=17369622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26200088A Granted JPH02108952A (ja) 1988-10-18 1988-10-18 湿度センサー

Country Status (1)

Country Link
JP (1) JPH02108952A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT1469U1 (de) * 1996-04-10 1997-05-26 E & E Elektronik Gmbh Verfahren zum ermitteln der absoluten luftfeuchtigkeit
JP5041837B2 (ja) * 2007-03-20 2012-10-03 富士電機株式会社 薄膜ガスセンサおよびその製造方法
EP3584570A1 (en) * 2018-06-20 2019-12-25 MEAS France Method for manufacturing a relative humidity sensor and relative humidity sensor
JP7231501B2 (ja) * 2019-06-26 2023-03-01 ルビコン株式会社 湿度センサ及びその製造方法

Also Published As

Publication number Publication date
JPH02108952A (ja) 1990-04-20

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