JPH0514451Y2 - - Google Patents

Info

Publication number
JPH0514451Y2
JPH0514451Y2 JP1985200788U JP20078885U JPH0514451Y2 JP H0514451 Y2 JPH0514451 Y2 JP H0514451Y2 JP 1985200788 U JP1985200788 U JP 1985200788U JP 20078885 U JP20078885 U JP 20078885U JP H0514451 Y2 JPH0514451 Y2 JP H0514451Y2
Authority
JP
Japan
Prior art keywords
electron
diameter
rocking
pattern
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985200788U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62109342U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985200788U priority Critical patent/JPH0514451Y2/ja
Publication of JPS62109342U publication Critical patent/JPS62109342U/ja
Application granted granted Critical
Publication of JPH0514451Y2 publication Critical patent/JPH0514451Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1985200788U 1985-12-27 1985-12-27 Expired - Lifetime JPH0514451Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985200788U JPH0514451Y2 (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985200788U JPH0514451Y2 (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Publications (2)

Publication Number Publication Date
JPS62109342U JPS62109342U (enrdf_load_stackoverflow) 1987-07-13
JPH0514451Y2 true JPH0514451Y2 (enrdf_load_stackoverflow) 1993-04-16

Family

ID=31163632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985200788U Expired - Lifetime JPH0514451Y2 (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Country Status (1)

Country Link
JP (1) JPH0514451Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2680004B2 (ja) * 1987-11-27 1997-11-19 株式会社日立製作所 照射ビーム径評価用素子及び評価方法
JP6433550B1 (ja) * 2017-07-19 2018-12-05 株式会社日立製作所 試料保持機構、及び荷電粒子線装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5597955A (en) * 1979-01-18 1980-07-25 Tdk Corp Screen printing machine
JPS58123303A (ja) * 1982-01-19 1983-07-22 株式会社東芝 ガス絶縁開閉装置

Also Published As

Publication number Publication date
JPS62109342U (enrdf_load_stackoverflow) 1987-07-13

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