JPH0513569B2 - - Google Patents

Info

Publication number
JPH0513569B2
JPH0513569B2 JP62047086A JP4708687A JPH0513569B2 JP H0513569 B2 JPH0513569 B2 JP H0513569B2 JP 62047086 A JP62047086 A JP 62047086A JP 4708687 A JP4708687 A JP 4708687A JP H0513569 B2 JPH0513569 B2 JP H0513569B2
Authority
JP
Japan
Prior art keywords
graphite crucible
silicon
temperature
silicon sample
double
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62047086A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63212838A (ja
Inventor
Katsuya Tsuji
Takeshi Yamada
Hiroshi Uchihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Priority to JP62047086A priority Critical patent/JPS63212838A/ja
Priority to US07/157,852 priority patent/US4800747A/en
Priority to EP88102928A priority patent/EP0281037B1/en
Priority to DE88102928T priority patent/DE3881233T2/de
Publication of JPS63212838A publication Critical patent/JPS63212838A/ja
Publication of JPH0513569B2 publication Critical patent/JPH0513569B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP62047086A 1987-02-28 1987-02-28 シリコン中酸素測定方法 Granted JPS63212838A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP62047086A JPS63212838A (ja) 1987-02-28 1987-02-28 シリコン中酸素測定方法
US07/157,852 US4800747A (en) 1987-02-28 1988-02-18 Method of measuring oxygen in silicon
EP88102928A EP0281037B1 (en) 1987-02-28 1988-02-26 Method of measuring oxygen in silicon
DE88102928T DE3881233T2 (de) 1987-02-28 1988-02-26 Verfahren zur Messung des Sauerstoffsgehaltes in Silizium.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62047086A JPS63212838A (ja) 1987-02-28 1987-02-28 シリコン中酸素測定方法

Publications (2)

Publication Number Publication Date
JPS63212838A JPS63212838A (ja) 1988-09-05
JPH0513569B2 true JPH0513569B2 (enExample) 1993-02-22

Family

ID=12765366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62047086A Granted JPS63212838A (ja) 1987-02-28 1987-02-28 シリコン中酸素測定方法

Country Status (4)

Country Link
US (1) US4800747A (enExample)
EP (1) EP0281037B1 (enExample)
JP (1) JPS63212838A (enExample)
DE (1) DE3881233T2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5139958A (en) * 1991-09-24 1992-08-18 The United States Of America As Represented By The United States Department Of Energy Method and device for the determination of low concentrations of oxygen in carbonaceous materials
FR2683044A1 (fr) * 1991-10-29 1993-04-30 Unirec Procede et dispositif pour analyser par decomposition thermique fractionnee au moins un compose inclusionnaire d'un corps.
US5288645A (en) * 1992-09-04 1994-02-22 Mtm Engineering, Inc. Hydrogen evolution analyzer
DE19906732A1 (de) * 1999-02-18 2000-08-24 Forschungszentrum Juelich Gmbh Verfahren und Vorrichtung zur Freisetzung von Sauerstoffisotopen aus sauerstoffhaltigen Feststoffen
KR20010061277A (ko) * 1999-12-28 2001-07-07 이 창 세 기체투과막을 이용한 전도도 측정법에 의한 실리콘웨이퍼의 산소 농도 측정 장치 및 그 장치에 의한 측정방법
JP6118031B2 (ja) * 2012-03-15 2017-04-19 株式会社東芝 不純物分析装置及び方法
CN111965129A (zh) * 2020-08-05 2020-11-20 西安奕斯伟硅片技术有限公司 测量单晶硅间隙氧含量的方法及装置
CN111912811B (zh) * 2020-08-05 2023-07-25 西安奕斯伟材料科技有限公司 测量单晶硅中元素含量的方法及装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2964389A (en) * 1958-08-15 1960-12-13 Titanium Metals Corp Apparatus for determination of oxygen in metals
US3293902A (en) * 1963-10-25 1966-12-27 Bendix Balzers Vacuum Inc Apparatus for determining the gas content of metal samples
CH530003A (de) * 1970-07-15 1972-10-31 Balzers Patent Beteilig Ag Zwischen zwei Stromzuführungselektroden einspannbare, durch direkten Stromdurchgang beheizbare, aus Unterteil und Deckel bestehende Probenkapsel aus Graphit zur Untersuchung von Proben nach dem Heissextraktionsverfahren
BE787397A (fr) * 1971-08-12 1973-02-12 Siderurgie Fse Inst Rech Chambre de degazage
DE2326596A1 (de) * 1973-05-24 1974-12-05 Siemens Ag Verfahren und vorrichtung zur bestimmung von gasgehalten
US3899627A (en) * 1974-06-28 1975-08-12 Leco Corp Crucible
US4098576A (en) * 1976-06-29 1978-07-04 National Steel Corporation Method for analyzing the latent gas content of metal samples
JPS59193997U (ja) * 1983-06-11 1984-12-22 株式会社　堀場製作所 黒鉛るつぼ
JPH068813B2 (ja) * 1985-12-05 1994-02-02 動力炉・核燃料開発事業団 核燃料酸化物の酸素対金属原子数比の測定方法

Also Published As

Publication number Publication date
EP0281037A2 (en) 1988-09-07
JPS63212838A (ja) 1988-09-05
EP0281037A3 (en) 1990-03-21
US4800747A (en) 1989-01-31
DE3881233T2 (de) 1993-12-16
DE3881233D1 (de) 1993-07-01
EP0281037B1 (en) 1993-05-26

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