JPH05134399A - Photomask cleaner - Google Patents

Abstract

PURPOSE:To provide a scrub cleaner for both side of photomask, in which a particle weakened in sticking strength with a surface of a photomask by rubbing with a brush is securely washed out and the particle does not stick to the surface of the photomask again. CONSTITUTION:A brush 3 placed opposite to each other is provided in an internal vessel 8 constantly supplying pure water 10 from a water supplying opening 12 and the both side of the surface of the photomask is scrub-cleaned by slowly moving the photomask 1 held by an arm 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photomask cleaning apparatus used in a photo process in manufacturing semiconductor devices and the like.

[0002]

2. Description of the Related Art A conventional photomask cleaning apparatus is shown in FIG.
Shown in.

FIG. 3 is a cross-sectional view of a conventional photomask double-sided scrub cleaning apparatus. The prior art will be described below with reference to the drawings.

In the scrubbing cleaning tank 22, a plurality of brushes 3 each formed by molding a porous body (hereinafter referred to as "Berculin") made of polyvinyl alcohol or the like into a disc shape are arranged facing each other. The interval between the brushes arranged opposite to each other is set to be slightly smaller than the thickness of the photomask, and the brushes are arranged in two stages in the vertical direction in order to enhance the cleaning effect. It is also important to supply pure water to the brush 3 from the pure water pipe 19 through the brush drive shaft 18 to make the bellclean into a soft sponge.

The brush 3 is adhered to the holder 4 and is rotated by the driving force of the motor 6.

The arm 2 is inserted between the rotating brushes.
By slowly moving the photomask 1 held by the above in the vertical direction, the surface of the photomask 1 is simultaneously subjected to double-side scrub cleaning.

That is, this cleaning apparatus employs a method of removing particles adhering to the surface of the photomask 1 by the physical action of rubbing with a brush. Of the brush 3 toward the surface of the photomask 1
The effect is to wash away particles whose adhesion has been weakened by rubbing.

[0008] For particles that have a strong adhesive force and are insufficient for rubbing with a brush while flowing pure water, the photomask held by the arm moves to the lower portion of the scrub cleaning tank 22 and is moved to the scrub cleaning tank. After the detergent 25 is sprayed onto the photomask from the detergent nozzle 24 provided at the lower portion of 22, the scrubbing is performed with a brush.

However, the pure water from the shower nozzle does not sufficiently spread over the entire surface of the photomask because the brush shades the shadow. Therefore, the particles whose adhesion is weakened by the brush are often strongly adhered again at that position or re-adhered by slightly moving on the surface of the photomask.

[0010]

However, in the photomask cleaning apparatus of the prior art, although it is possible to weaken the adhesive force of particles by rubbing with a brush, it is difficult to sufficiently wash the particles, Further, there is a problem that the particles attached to the brush attach again to the surface of the photomask.

Therefore, the present invention solves such a problem, and an object of the present invention is to provide a double-sided scrub cleaning device for a photomask which can surely remove particles adhering to the surface of the photomask.

Further, the conventional photomask cleaning apparatus has a problem that even if a detergent is sprayed onto the photomask, it is immediately washed off with pure water and a sufficient cleaning effect cannot be obtained.

The present invention solves such a problem, and an object of the present invention is to provide a double-sided scrubbing device for a photomask which brings out the effect of a detergent sufficiently and facilitates the removal of particles. is there.

[0014]

In order to solve the above-mentioned problems, the photomask cleaning apparatus of the present invention comprises (1) a photomask which is vertically supported and horizontally or vertically moved so that the photomask passes through the passage. In a photomask cleaning device in which opposed brushes are arranged and scrub cleaning of the photomask is performed while rotating the brushes, the brushes are arranged in a water tank in which liquid is stored, and liquid is supplied from a lower portion of the water tank. Is characterized by.

(2) A circulation pump and a filter are provided, and the liquid overflowing from the upper part of the water tank is circulated and supplied from the lower part of the water tank.

[0016]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view of a photomask double-sided scrub cleaning apparatus according to an embodiment of the present invention.

As shown in the figure, the cleaning tank has a double structure. An overflow tank 11 is provided above the inner tank 8 and an outer tank 9 is provided below the inner tank 8. 1 pure water in the inner tank 8
0 is filled and the water supply port 12 provided at the bottom of the inner tank 8
The pure water 10 is supplied more constantly, and the overflowed pure water is received by the overflow tank 11 and drained from the drain port 15.

A small amount of pure water leaking from the bearing 7 is received by the outer tank 9 and drained from the drain port 14. The drain valve 13 provided at the bottom of the inner tank 8 is
It is used when all the pure water in the inner tank 8 is drained.

In the inner tank 8, a plurality of brushes 3 made of bergulin in a disc shape are arranged facing each other. The interval between the brushes arranged opposite to each other is set to be slightly smaller than the thickness of the photomask, and the brushes are arranged in two stages in the vertical direction in order to enhance the cleaning effect. Since the brush 3 is in the pure water of the inner tank 8, the berculin is always kept in the form of a soft sponge, and a sufficient cleaning effect can be exhibited.

The brush 3 is adhered to a holder 4, and the holder 4 is connected via a brush drive shaft 5 to a motor 6 fixed to the outside of the outer tub 9. A bearing 7 is provided between the brush drive shaft 5 and the inner tank 8 and the outer tank 9.
Is provided, the transmission of the rotational driving force from the motor 6 to the brush 3 is made smooth, and the bearing 7 also has sealing performance, so that the leakage of the pure water 10 from the inner tank 8 is minimized. It remains only.

The photomask 1 held by the arm 2 between the brushes rotated by the driving force of the motor 6.
Is slowly moved in the vertical direction, so that the surface of the photomask 1 is simultaneously scrubbed on both sides.

Particles whose adhesion to the photomask 1 has been weakened by rubbing with the brush 3 float out in a large amount of pure water in the inner tank 8 and the pure water 1 from the bottom to the top of the inner tank 8 is removed.
A flow of 0 flows to the upper part of the inner tank 8 and is discharged from the drain port 15 of the overflow tank 11. Further, since a large amount of pure water flow is used, redeposition on the photomask is reduced.

Here, pure water is used as the liquid supplied from the lower part of the inner tank, but it is also possible to use a chemical liquid such as detergent. As for the material of the brush, the same effect as that of the present invention can be obtained even if a nylon bristle brush or the like is used.

FIG. 2 is a sectional view of a photomask double-side scrub cleaning apparatus according to another embodiment of the present invention.

Since the basic structure of the apparatus is almost the same as that of the embodiment shown in FIG. 1, the added parts will be described.

In the embodiment shown in FIG. 2, the drain port 15 of the embodiment shown in FIG. 1 is connected to the water supply port 12, and the drain port 15 is connected.
A circulation pump 16 and a filter 17 are provided between the water supply port 12 and the water supply port 12. The inner tank is filled with the cleaning liquid 26 obtained by diluting the detergent with pure water, and after the cleaning liquid 26 flows out to the overflow tank 11, the cleaning liquid 26 is returned from the drain port 15 to the water supply port 12 through the filter 17 by the pump 16. The cleaning liquid contaminated by the particles that have fallen off the surface of the mask is always filtered by a filter to be a clean cleaning liquid, which is supplied to the lower portion of the inner tank, so that the inner tank is always kept clean.

By adopting the apparatus configuration as in this embodiment, it is possible to perform both-side scrub cleaning of the photomask in the cleaning liquid. Here, as the cleaning liquid, a detergent diluted with pure water was used, but it is also possible to use an alkaline chemical liquid or the like. Further, the pure water alone has a cleaning effect lower than that of the cleaning liquid, but has an advantage that the pure water can be saved.

[0029]

As described above, the photomask cleaning apparatus of the present invention has a simple structure in which opposing brushes are arranged in a water tank in which the liquid is stored, and a water supply port for supplying the liquid is provided at the bottom of the water tank. Thus, there is an effect that the particles on the surface of the photomask can be easily and surely dropped on both surfaces simultaneously.

Further, there is an effect that the re-cleaning is not necessary and the time and man-hours required for cleaning and the inspection accompanying it can be greatly reduced.

Furthermore, a simple structure in which a circulating pump and a filter are attached to the photomask cleaning device enables double-sided scrubbing in a chemical solution, which has the effect of further increasing cleaning efficiency.

Further, it also has an effect that the cleaning liquid such as pure water can be saved.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of a double-sided scrub cleaning device for a photomask according to the present invention.

FIG. 2 is a cross-sectional view of a photomask double-sided scrub cleaning device of the present invention.

FIG. 3 is a sectional view of a conventional double-sided scrub cleaning device for a photomask.

[Explanation of symbols]

 1 Photomask 2 Arm 3 Brush 4 Holder 5 Brush drive shaft 6 Motor 7 Bearing 8 Inner tank 9 Outer tank 10 Pure water 11 Overflow tank 12 Water inlet 13 Drain valve 14 Drain port 15 Drain port 16 Pump 17 Filter 18 Brush drive shaft 19 Pure water piping 20 Shower nozzle 21 Pure water 22 Scrub cleaning tank 23 Drain port 24 Detergent nozzle 25 Detergent 26 Cleaning liquid

Claims (2)

[Claims] 1. A photo in which a photomask is vertically held and moved horizontally or vertically, a brush facing the passage portion of the photomask is disposed, and the photomask is scrubbed while rotating the brush. In a mask cleaning apparatus, the photomask cleaning apparatus is characterized in that the brush is arranged in a water tank in which a liquid is stored. 2. The photomask cleaning apparatus according to claim 1, further comprising a circulation pump and a filter, wherein the liquid overflowing from the upper part of the water tank is circulated and supplied from the lower part of the water tank.