JPH05347287A - Cleaning device - Google Patents

Abstract

PURPOSE:To provide a cleaning device which cleans a plate-like cleaning object such as a reticle, a photomask or a semiconductor wafer, where contaminants from brushes are prevented from adhering to the surface of a cleaned object again. CONSTITUTION:Cleaning roller brushes 3 and brush cleaning means such as brush cleaning roller brushes 4 which clean the cleaning roller brushes 3 are provided. Therefore, contaminants and dusts sticking to the brushes 3 can be removed and prevented from sticking to the surface of a cleaning work 1 again, so that the brushes 3 can be lessened in frequency of replacement.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning device, and more particularly to a cleaning device for cleaning a flat object such as a reticle, a photomask or a semiconductor wafer with a brush.

[0002]

2. Description of the Related Art As a cleaning apparatus for cleaning a flat object to be cleaned such as a reticle, a photomask or a semiconductor wafer by brushing, the apparatus shown in FIG. 10 has been conventionally used. In the figure, a is a flat object to be cleaned (for example, a reticle), b and b are roller brushes, which are provided so as to clean both main surfaces of the object to be cleaned a. c and c are objects to be cleaned a
Is a nozzle for ejecting a cleaning liquid (for example, pure water) onto the main surface of.

In the cleaning apparatus shown in FIG. 10, the cleaning target a is moved up and down by a drive mechanism (not shown), and nozzles c are rotated, while a cleaning liquid is jetted from the main surface of the cleaning target a and rotated. Cleaning is performed by rubbing the main surface of the object to be cleaned a with b.

[0004]

By the way, in the conventional cleaning device shown in FIG. 10, dirt, dust, etc. of the cleaning object a adheres to the surfaces of the roller brushes b, b during cleaning, There is a drawback that dirt and dust attached to the surfaces of the roller brushes b and b are reattached to the surface of the object to be cleaned a. Therefore, there is a problem that the roller brushes b, b must be replaced before they are much soiled, and the replacement frequency of the roller brushes becomes high. This is a factor that lowers productivity and limits labor saving.

The present invention has been made to solve the above problems, and it is possible to prevent dirt from the brush from reattaching to the surface of the object to be cleaned and to reduce the frequency of brush replacement. With the goal.

[0006]

A cleaning device according to claim 1 is
It is characterized by having at least a cleaning object cleaning roller brush for cleaning the surface of the cleaning object and a brush cleaning means for cleaning the cleaning object cleaning roller brush. Claim 2
The cleaning device of at least has at least a cleaning object cleaning roller brush for cleaning the surface of the cleaning object, and a brush cleaning roller brush for cleaning the cleaning object cleaning roller brush.

A cleaning device according to a third aspect of the present invention includes at least a means for supplying a belt-shaped brush, and a roller for contacting the surface of the object to be cleaned with the brush for cleaning. The cleaning apparatus according to claim 4, wherein the cleaning object cleaning roller brush for cleaning the surface of the cleaning object, means for supplying a belt-shaped brush, and the belt-shaped brush are brought into contact with the surface of the cleaning object cleaning roller brush. It has at least a brush cleaning roller for cleaning.

[0008]

According to the cleaning apparatus of the first aspect, since the cleaning roller brush has the brush cleaning means for cleaning the cleaning roller brush, it is possible to reduce the contamination of the cleaning roller brush for cleaning the cleaning roller brush. It is possible to reduce the redeposition of the stains on the surface of the object to be cleaned. Therefore, it is possible to reduce the frequency of replacement of the cleaning object cleaning roller brush.
According to the cleaning device of the second aspect, since the cleaning roller brush is equipped with the brush cleaning roller brush, it is possible to reduce the contamination of the cleaning roller brush for cleaning the cleaning target object, and the contamination from the cleaning roller brush for cleaning the cleaning target object. It is possible to reduce reattachment of the to the surface of the object to be cleaned. Therefore, it is possible to reduce the replacement frequency of the cleaning roller brush for cleaning the object to be cleaned.

According to the cleaning apparatus of the third aspect, since the belt-shaped brushes are sequentially supplied, it is possible to eliminate or extremely reduce the re-adhesion of dirt from the brush material to the surface of the object to be cleaned. The frequency of replacing the article cleaning roller brush can be reduced.

According to the cleaning apparatus of the fourth aspect, since the belt-shaped brush for cleaning the cleaning roller brush is supplied by the belt-shaped brush supply means, dirt on the cleaning roller brush for cleaning the object can be rubbed and removed. When the band-shaped brush becomes dirty, the band-shaped brush supplying means feeds the band-shaped brush so that a clean portion is always in contact with the object-to-be-cleaned brush. Therefore, it is possible to prevent the dirt from the cleaning object cleaning roller brush from reattaching to the surface of the cleaning object. Therefore, it is possible to reduce the frequency of replacement of the cleaning object cleaning roller brush.

[0011]

The cleaning apparatus of the present invention will be described in detail below with reference to the illustrated embodiments. 1 to 4 show a first cleaning device according to the present invention.
FIG. 1 is a perspective view showing a main part of FIG.
Is a schematic cross-sectional view showing the entire cleaning device, FIG. 3 is a perspective view showing a holder for holding an object to be cleaned (reticle), and FIG. 4 is an explanatory view of an operation example of the cleaning device.

Reference numeral 1 denotes a reticle which is an object to be cleaned held vertically by a holder 2, and the holder 2 is moved up and down by a drive mechanism (not shown). Cleaning roller brushes 3 and 3 for cleaning the cleaning target 1 from both main surfaces thereof are made of sponge. 4 and 4 are cleaning object cleaning roller brushes 3,
3 is a brush cleaning roller brush arranged outside of 3 so as to be in contact therewith, and is made of sponge or adhesive resin.

Numeral 5 is a motor for rotating one of the cleaning object cleaning roller brushes 3 and 3. The rotational force transmitted from the motor 5 to the cleaning object cleaning roller brush 3 is the other cleaning object by a gear not shown. It is transmitted to the object cleaning 3 and further to the brush cleaning roller brushes 4 and 4. A spray nozzle 6 sprays pure water or other cleaning liquid supplied from the outside of the cleaning layer 7 through a pipe 8 onto the surface of the object to be cleaned 1,
Is a three-way valve that switches the liquid ejected from the spray nozzle 6 between pure water and cleaning liquid.

As shown in FIG. 4, the cleaning by the present cleaning device is such that the cleaning object cleaning roller brush 3 rotates while spraying the cleaning liquid from the spray nozzles 6, 6 onto the surface of the cleaning object 1.
-It is performed by passing the article to be cleaned 1 between 3 and moving it up and down. By this operation, the surface of the cleaning target 1 is cleaned by the cleaning target cleaning roller brushes 3, 3, and the cleaning target cleaning roller brushes 3, 3 are also cleaned by the brush cleaning roller brushes 4, 4. ..

Therefore, according to the present cleaning apparatus, even if the cleaning object cleaning roller brushes 3, 3 are contaminated by the cleaning of the cleaning object 1, the cleaning object cleaning roller brushes 3, 3 are provided outside the cleaning brushes. Since the cleaning is performed by the brushes 4 and 4, it is possible to prevent the cleaning roller brushes 3 and 3 from being reattached to the cleaning object 1 such as dust and dirt. Therefore, the replacement frequency of the roller brushes 3 can be reduced.

The liquid ejected from the spray nozzles 6, 6 is a cleaning liquid containing a detergent at first, and when the dirt is removed, the liquid ejected is switched to pure water to rinse the cleaning liquid. Then, after the rinsing is completed, it is dried in the same washing tank 7 or by another device.

As shown in FIG. 5, an object to be cleaned is cleaned in the main cleaning device, then rinsed by ultrasonic cleaning in running water by another device, and then dried by a drying device. Is also good. The drying may be performed in an oven, but may be performed in alcohol vapor.

FIG. 6 is a perspective view showing the essential parts of a second embodiment of the cleaning apparatus of the present invention. The cleaning device is a strip brush 1.
Rollers 11, 1 for rotating 0, 10 within a certain angle range
1 presses both surfaces of the cleaning object (reticle) 1 to move the cleaning object 1 between the rollers 11, 11 up and down by a drive mechanism (not shown), and a pure liquid or cleaning liquid is sprayed by a spray nozzle (not shown). This is done by spraying on both main surfaces of No. 1. 1
2 and 12 are supply rollers for supplying the belt-shaped brush 10,
Reference numerals 13 and 13 denote take-up rollers for taking up the belt-shaped brush 10.

When the belt-shaped brush 10 is slightly soiled, the take-up roller 12 is rotated to wash the object 1 to be cleaned on the belt-shaped brush 10.
Brush 1 by shifting the position in contact with the surface of
Dust and dirt from the cleaning target 1 attached to the cleaning target 0
It can be prevented from redepositing on the surface of. Moreover, it is not necessary to replace the brush 10 until the long strip-shaped brush 10 is used up, and the replacement frequency is low.

FIG. 7 shows a modification of the cleaning device shown in FIG. This cleaning apparatus rotates a semiconductor wafer 1a placed substantially horizontally, and a belt-shaped brush 1 on its surface.
It is configured such that 0 is pressed by the roller 11 to perform cleaning. The cleaning device is a semiconductor wafer 1a.
6 is different from the cleaning apparatus shown in FIG. 6 in that only one main surface is cleaned, but there is no other difference.

FIGS. 8 and 9 show a third embodiment of the cleaning apparatus of the present invention. FIG. 9 is a sectional view showing the main part, and FIG.
(A), (B) is sectional drawing which shows operation. In FIGS. 8 and 9, 1 is an object to be cleaned (for example, a reticle) held vertically by a holder 2, 3 and 3 are cleaning object brush rollers for cleaning the object 1 to be cleaned from both main surfaces thereof, It is made of sponge or Berglin (trademark). Cleaning object 1
The cleaning is performed by spraying the cleaning liquid from the spray nozzles 6, 6 onto the surface of the cleaning target 1 while cleaning the cleaning target roller brushes 3, 3.
Is rotated within a certain range and the object to be cleaned 1 is passed between them. Numerals 10 and 10 are belt-like brushes for cleaning brush cleaning rollers, which are to be cleaned by contacting with the cleaning object cleaning roller brushes 3 and 3 on the outside, and are made of sponge or adhesive resin.

Reference numerals 11 and 11 denote rollers that press the belt-shaped brushes 10 and 10 against the surface of the cleaning roller brushes 3 and 3 to be rotated and rotate within a fixed angle range.
The roller brushes 3 and 3 are cleaned by pressing the belt-shaped brushes 10 and 10 against the surfaces of the cleaning object roller brushes 3 and 3. 12, 12, 13, 13 are belt-shaped brushes 4, 4
It is a roller that supplies and winds.

In this cleaning apparatus, FIG.
As shown in (A), the cleaning object cleaning roller brushes 3 and 3 rub and clean both surfaces of the cleaning object 1. This cleaning method is the same as that of the first embodiment. Then, at the time of cleaning, the cleaning roller brushes 3 and 3 are the belt-shaped brushes 1.
Washed with 0. Then, when the belt-shaped brush 10 is slightly soiled, the winding roller 12 is rotated as shown in FIG. 9 (B) to shift the position of the belt-shaped brush 10 that is in contact with the surface of the article to be cleaned 1. It is possible to prevent dust and dirt from the adhered cleaning object 1 from re-adhering to the surface of the cleaning object 1. Moreover, it is not necessary to replace the brush 10 until the long strip-shaped brush 10 is used up, and the replacement frequency is low. Of course, the cleaning frequency of the cleaning object cleaning roller brushes 3, 3 can be reduced as in the case of the first embodiment.

[0024]

According to the first aspect of the present invention, there is provided a cleaning device having at least a cleaning object cleaning roller brush for cleaning the surface of the cleaning object, and a brush cleaning means for cleaning the cleaning object cleaning roller brush. To do. Therefore, according to the cleaning device of the first aspect, since the cleaning device has the brush cleaning means for cleaning the cleaning roller brush, it is possible to reduce the contamination of the cleaning roller brush for cleaning the cleaning target object, and the cleaning roller brush for cleaning the cleaning target object. It is possible to reduce redeposition of dirt on the surface of the object to be cleaned. Therefore, it is possible to reduce the replacement frequency of the cleaning roller brush for cleaning the object to be cleaned.

The cleaning apparatus according to a second aspect of the present invention includes at least a cleaning object cleaning roller brush for cleaning the surface of the cleaning object, and a brush cleaning roller brush for cleaning the cleaning object cleaning roller brush. It is a thing. Therefore,
According to the cleaning device of the second aspect, since the cleaning device includes the brush cleaning roller brush for cleaning the cleaning object cleaning roller brush, the cleaning object cleaning roller brush can be less contaminated.
As a result, it is possible to reduce the re-adhesion of dirt from the cleaning object cleaning roller brush to the surface of the cleaning object. Therefore,
The cleaning frequency of the cleaning roller brush can be reduced.

The cleaning device according to a third aspect of the present invention is characterized by including at least a means for supplying a belt-shaped brush and a roller for contacting the brush with the surface of the object to be cleaned for cleaning. Therefore, according to the cleaning device of the third aspect, since the belt-shaped brushes are sequentially supplied, it is possible to eliminate or extremely reduce the re-adhesion of dirt from the brushes to the surface of the object to be cleaned. The frequency of roller brush replacement can be reduced.

According to a fourth aspect of the present invention, there is provided a cleaning device for cleaning a surface of an object to be cleaned, a cleaning object cleaning roller brush, a means for supplying a belt-shaped brush, and the belt-shaped brush for cleaning the cleaning object to be cleaned. It has at least a brush cleaning roller that is brought into contact with the surface for cleaning. Therefore, according to the cleaning device of the fourth aspect, since the belt-shaped brush for cleaning the cleaning roller brush is supplied by the belt-shaped brush supply means, it is possible to rub and remove the dirt of the cleaning roller brush for cleaning the object to be cleaned. Then, when the belt-shaped brush becomes dirty, the belt-shaped brush supply means feeds the belt-shaped brush so that a clean portion is always in contact with the object-to-be-cleaned brush. Therefore, it is possible to prevent the dirt from the cleaning object cleaning roller brush from reattaching to the surface of the cleaning object. Therefore, it is possible to reduce the frequency of replacement of the cleaning object cleaning roller brush.

[Brief description of drawings]

FIG. 1 is a perspective view showing a first embodiment of a cleaning device of the present invention.

FIG. 2 is a schematic sectional view showing the above embodiment.

3 is a perspective view of an object to be cleaned (reticle) holder of the cleaning apparatus of FIG.

FIG. 4 is an explanatory diagram of an operation of the cleaning apparatus of FIG.

FIG. 5 is an explanatory diagram of a flow of an object to be cleaned.

FIG. 6 is a perspective view showing a main part of a second embodiment of the cleaning apparatus of the present invention.

7 is a perspective view showing a main part of a modified example of the cleaning apparatus shown in FIG.

FIG. 8 is a cross-sectional view showing the main parts of a third embodiment of the cleaning apparatus of the present invention.

9A and 9B are explanatory views of the operation of the cleaning apparatus shown in FIG.

FIG. 10 is a cross-sectional view showing a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Cleaning object 1a Cleaning object 3 Cleaning object cleaning roller brush 4 Brush cleaning roller brush 10 Band brush 11 Rollers 12, 13 Band brush supply means

Claims (4)

[Claims] 1. A cleaning device comprising: a cleaning object cleaning roller brush for cleaning the surface of the cleaning object; and a brush cleaning means for cleaning the cleaning object roller brush. 2. A cleaning device comprising at least a cleaning object cleaning roller brush for cleaning the surface of the cleaning object, and a brush cleaning roller brush for cleaning the cleaning object cleaning roller brush. 3. A cleaning device comprising at least a means for supplying a belt-shaped brush and a roller for cleaning the brush by bringing the brush into contact with the surface of an object to be cleaned. 4. A cleaning object cleaning roller brush for cleaning the surface of the cleaning object, means for supplying a belt-shaped brush, and the belt-shaped brush for contacting the surface of the cleaning object cleaning roller brush. A cleaning device comprising at least a brush cleaning roller for cleaning.