JPH0513396Y2 - - Google Patents

Info

Publication number
JPH0513396Y2
JPH0513396Y2 JP198585U JP198585U JPH0513396Y2 JP H0513396 Y2 JPH0513396 Y2 JP H0513396Y2 JP 198585 U JP198585 U JP 198585U JP 198585 U JP198585 U JP 198585U JP H0513396 Y2 JPH0513396 Y2 JP H0513396Y2
Authority
JP
Japan
Prior art keywords
reaction tube
tube
wire
arm
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP198585U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61118636U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP198585U priority Critical patent/JPH0513396Y2/ja
Publication of JPS61118636U publication Critical patent/JPS61118636U/ja
Application granted granted Critical
Publication of JPH0513396Y2 publication Critical patent/JPH0513396Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP198585U 1985-01-11 1985-01-11 Expired - Lifetime JPH0513396Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP198585U JPH0513396Y2 (enrdf_load_stackoverflow) 1985-01-11 1985-01-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP198585U JPH0513396Y2 (enrdf_load_stackoverflow) 1985-01-11 1985-01-11

Publications (2)

Publication Number Publication Date
JPS61118636U JPS61118636U (enrdf_load_stackoverflow) 1986-07-26
JPH0513396Y2 true JPH0513396Y2 (enrdf_load_stackoverflow) 1993-04-08

Family

ID=30475234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP198585U Expired - Lifetime JPH0513396Y2 (enrdf_load_stackoverflow) 1985-01-11 1985-01-11

Country Status (1)

Country Link
JP (1) JPH0513396Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS61118636U (enrdf_load_stackoverflow) 1986-07-26

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