JPS61118636U - - Google Patents

Info

Publication number
JPS61118636U
JPS61118636U JP198585U JP198585U JPS61118636U JP S61118636 U JPS61118636 U JP S61118636U JP 198585 U JP198585 U JP 198585U JP 198585 U JP198585 U JP 198585U JP S61118636 U JPS61118636 U JP S61118636U
Authority
JP
Japan
Prior art keywords
reaction tube
wire
arm
guide plate
inner diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP198585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0513396Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP198585U priority Critical patent/JPH0513396Y2/ja
Publication of JPS61118636U publication Critical patent/JPS61118636U/ja
Application granted granted Critical
Publication of JPH0513396Y2 publication Critical patent/JPH0513396Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP198585U 1985-01-11 1985-01-11 Expired - Lifetime JPH0513396Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP198585U JPH0513396Y2 (enrdf_load_stackoverflow) 1985-01-11 1985-01-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP198585U JPH0513396Y2 (enrdf_load_stackoverflow) 1985-01-11 1985-01-11

Publications (2)

Publication Number Publication Date
JPS61118636U true JPS61118636U (enrdf_load_stackoverflow) 1986-07-26
JPH0513396Y2 JPH0513396Y2 (enrdf_load_stackoverflow) 1993-04-08

Family

ID=30475234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP198585U Expired - Lifetime JPH0513396Y2 (enrdf_load_stackoverflow) 1985-01-11 1985-01-11

Country Status (1)

Country Link
JP (1) JPH0513396Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0513396Y2 (enrdf_load_stackoverflow) 1993-04-08

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