JPH0513396Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] This invention relates to a suspension device for reaction tubes used for manufacturing semiconductors.

[Prior Art] As a semiconductor manufacturing apparatus, for example, there is one in which a reaction tube containing materials is suspended in a vertical furnace and is rotated to synthesize and manufacture a semiconductor inside the reaction tube.

[Problems to be Solved by the Invention] However, when the reaction tube is suspended and rotated, there is a problem in that it is difficult to position the hanging wire at the center of the reaction tube, and rotational runout is likely to occur.

In view of the above points, the purpose of this invention is to provide a reaction tube hanging device that allows easy centering of reaction tubes.

[Means for solving the problem] This invention consists of an arm provided at the upper part of the reaction tube, a wire attached to this arm, and this wire inserted into the center hole and in contact with the inner diameter part of the upper part of the reaction tube. This is a reaction tube hanging device equipped with a guide plate.

[Example] FIG. 1 is a front explanatory view showing an example of this invention, and FIG. 2 is a partially sectional side view.

In the figure, 1 is a heating furnace, and 2 is a lifting device. The heating furnace 1 includes a furnace core tube 1 in a suitable box 11.
2 are installed in the vertical direction, and a heating heater 1 is installed around it.
3. A heat insulating material 14 is provided at the bottom, and a furnace core tube 12 is provided.
The reaction tube 3 is suspended and inserted from the upper opening 15, and the inside of the reactor core tube 12 is brought to a predetermined temperature by a control means (not shown). The lifting device 2 has a support device 21 support a hanging device 4 made of a wire or the like for suspending the reaction tube 3, drives a drive shaft 210 with an automatic or manual handle 211, and raises and lowers the support device 21 up and down. The reaction tube 3 is rotated via the hanging tool 4 by an appropriate rotation means.

The elevating device 2 also includes two indicator shafts 51, 52 in the vertical direction, slide plates 53, 54 that slide the indicator shafts 51, 52 up and down, a plate 55 for preventing the reaction tube 3 from falling at the bottom, etc. A retaining device is provided.

As shown in FIG. 3, the slide plates 53 and 54 have openings 53 through which the reaction tube 3 can be fully inserted vertically.
0 and 540, and slits 531 and 532 through which the wire of the hanging tool 4 can be inserted in the horizontal direction are formed. In addition, as shown in FIG. 4, the guide plate 5
3 and 54, the reaction tube 3 may be held over the opening 15 of the furnace core tube 12 by being held between the gripping portion 560 of the holding arm 56 which is horizontally rotatable about the indicator shaft 50. . This grip part 560
has a fixed arm 561 and a rotating arm 562, and the rotating arm 562 is opened and closed about a shaft 563 by a click 564, and is temporarily held at a fixed position in the holding tube 3 as shown. Note that a fixed plate 565 that rotates around a shaft 563 is provided at the bottom to prevent it from falling. In addition, one rotating arm 56 is provided between the two fixed arms 561.
2 may be provided.

Further, the fall prevention plate 55 has, for example, as shown in FIG. 5, a lower plate 551 having an opening through which the reaction tube 3 can be inserted vertically, and a hole for positioning the bottom of the reaction tube 3 that slides in the horizontal direction. Upper plate 55
It consists of 2. In addition, as shown in FIG. 6, opening and closing plates 553 and 554 that open left and right as upper plates
may also be used.

FIG. 7 shows a connection configuration between the reaction tube 3 and the hanging tool 4, in which a bent portion of one wire 40 folded in half is hung on the arm 30 of the reaction tube 3, and a disk-shaped first guide is connected to the arm 30 of the reaction tube 3. It is inserted into the center hole 410 of the plate 41. Central cylindrical portion 411 of this first guide plate 41
A second guide plate 42 made of a relatively soft material that is in contact with the inner diameter of the reaction tube 3 is inserted through the stopper 4.
3 prevents it from coming off. The portions where the cylindrical portion 411 contacts the guide plate 42 and the stopper 43 may be threaded. In this way, the reaction tube 3 is centered and the rotational vibration of the reaction tube 3 is reduced.

Furthermore, the wire 40 is guided in a guide tube 44,
As shown in FIG. 8, the upper part of the guide tube 44 is drawn into two grooves formed in the vertical direction of the threaded part 441 at the upper part of the guide tube 44, and the wire 40 is fixed by screwing the outside thereof with a fixture 45. be done. Fixture 45
is further supported by a chuck portion 49 including a bearing 46, a spring 47, and a ring 48.

That is, before inserting the reaction tube 3 into the heating furnace 1, the reaction tube 3 is suspended by the hanging device 4 in the state shown in FIGS. 7 and 8, and its bottom is placed on the fall prevention plate 55. It passes through the openings 530, 540 of the guide plates 53, 54 shown in FIG. Next, lift up the reaction tube 3 a little, rotate it, and check the shake state.
Then, the upper plates 552, 553, 554 in FIGS. 5 and 6 of the fall prevention plate 55 are slid and rotated to form an opening, and the reaction tube 3 is lowered to a predetermined position on the furnace core tube 12 of the heating furnace 1. . Heating furnace 1 of this reaction tube 3
There is an optimum position as the grounding position within the scale 22, the support device 21, and the indices 23, 24, 25 of the slide plates 53,
This can be confirmed by

Then, the reaction tube 3 is rotated and gradually lowered within the heating furnace 1 to synthesize and manufacture a semiconductor, and after completion of the manufacturing, the reaction tube 3 can be raised and taken out.

[Effects of the invention] As mentioned above, in this invention, the reaction tube is suspended and centered through the guide plate, so
Even when the reaction tube is rotated, there is little rotational vibration, making it safer and more accurate.

[Brief explanation of drawings]

FIGS. 1, 2, 3, 4, 5, 6, 7, and 8 are structural diagrams showing one embodiment of this invention. DESCRIPTION OF SYMBOLS 1... Heating furnace, 2... Lifting device, 3... Reaction tube, 4... Hanging tool, 51-55... Holding device, 30... Arm, 41, 42... Guide plate.

Claims (1)

[Scope of utility model registration request] An arm provided at the upper part of the reaction tube, a wire hung on the arm, a guide plate through which the wire is inserted through the center hole and in contact with the inner diameter part of the upper part of the reaction tube, and a guide tube that vertically guides the wire. A reaction tube hanging device comprising a hanging device that can be raised, lowered or rotated.