JPH0512862B2 - - Google Patents
Info
- Publication number
- JPH0512862B2 JPH0512862B2 JP58192403A JP19240383A JPH0512862B2 JP H0512862 B2 JPH0512862 B2 JP H0512862B2 JP 58192403 A JP58192403 A JP 58192403A JP 19240383 A JP19240383 A JP 19240383A JP H0512862 B2 JPH0512862 B2 JP H0512862B2
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- resistance value
- layer
- poly
- doped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19240383A JPS6085550A (ja) | 1983-10-17 | 1983-10-17 | 半導体集積回路の抵抗値調整方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19240383A JPS6085550A (ja) | 1983-10-17 | 1983-10-17 | 半導体集積回路の抵抗値調整方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6085550A JPS6085550A (ja) | 1985-05-15 |
| JPH0512862B2 true JPH0512862B2 (enrdf_load_stackoverflow) | 1993-02-19 |
Family
ID=16290732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19240383A Granted JPS6085550A (ja) | 1983-10-17 | 1983-10-17 | 半導体集積回路の抵抗値調整方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6085550A (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS609153A (ja) * | 1983-06-29 | 1985-01-18 | Hitachi Ltd | 半導体集積回路内抵抗体の抵抗値調整方法 |
-
1983
- 1983-10-17 JP JP19240383A patent/JPS6085550A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6085550A (ja) | 1985-05-15 |
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