JPH05110247A - Manufacture of board for flexible printed wiring - Google Patents

Manufacture of board for flexible printed wiring

Info

Publication number
JPH05110247A
JPH05110247A JP3298023A JP29802391A JPH05110247A JP H05110247 A JPH05110247 A JP H05110247A JP 3298023 A JP3298023 A JP 3298023A JP 29802391 A JP29802391 A JP 29802391A JP H05110247 A JPH05110247 A JP H05110247A
Authority
JP
Japan
Prior art keywords
polyimide film
printed wiring
metallic layer
flexible printed
metal layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3298023A
Other languages
Japanese (ja)
Inventor
Hitoshi Arai
均 新井
Kichiji Eikuchi
吉次 栄口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP3298023A priority Critical patent/JPH05110247A/en
Publication of JPH05110247A publication Critical patent/JPH05110247A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve the adhesive properties of a polyimide film and a metallic layer by executing low-temperature plasma treatment to the surface of the polyimide film, to which alkali treatment is conducted previously, and forming the metallic layer through a wet type plating method. CONSTITUTION:Alkali treatment is performed as the pretreatment of the surface of a polyimide film first, and it is favorable that the surface of the polyimide film is dipped and treated into an aqueous solution such as sodium hydroxide, potassium hydroxide, etc., in pH 8 or more at a liquid temperature of 5-80 deg.C. The previously alkali-treated polyimide film is introduced into a low-temperature plasma treater, glow discharge is conducted and the low-temperature plasma of an inorganic gas is generated, and the surface is plasma-treated continuously. A thin metallic layer is formed onto the surface through an electroless plating method as one kind of a wet type plating method, and a metallic layer is formed through an electroplating method. Accordingly, the excellent adhesiveness of the polyimide film and the metallic layer are acquired.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ポリイミドフィルム表
面に直接金属層を形成することを特徴とするフレキシブ
ル印刷配線用基板の製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a flexible printed wiring board, which comprises directly forming a metal layer on the surface of a polyimide film.

【0002】[0002]

【従来の技術】近年エレクトロニクス分野の発展がめざ
ましく、特に通信用、民生用などの電子機器の小型化、
軽量化、高密度化が進み、これらの性能に対する要求が
益々高度なものとなってきている。このような要求に対
応したフレキシブル印刷配線用基板は、可撓性を有し繰
り返し屈曲に耐えるため、狭い空間に立体的高密度の実
装が可能であり、電子機器への配線、ケーブル、或はコ
ネクター機能を付与した複合部品としてその用途が拡大
しつつある。
2. Description of the Related Art In recent years, the electronics field has been remarkably developed, and in particular, miniaturization of electronic devices for communication, consumer use, etc.
The demand for these performances has become more and more advanced as the weight and density have been increased. The flexible printed wiring board that meets such requirements has flexibility and can withstand repeated bending, and therefore can be mounted in a narrow space at a high density in three dimensions. Its applications are expanding as composite parts with connector functions.

【0003】このフレキシブル印刷配線用基板に対し
て、最近では高耐熱化が要求されており、これらを満足
するものとして接着剤を用いずにポリイミド樹脂層と金
属層のみからなる2層型のフレキシブル印刷配線用基板
が提案(特公昭61-45511号参照)されている。この基板
の製造方法としては、金属箔の上にポリイミド樹脂層を
形成させる方法とポリイミドフィルムの上に金属層を形
成させる方法の2つがある。前者の場合、金属箔の上に
ポリイミド前駆体をキャスティングし、これを加熱硬化
させてポリイミド層を形成させることが一般的であり、
この方法によって得られた基板では十分な耐熱性が得ら
れるが、1)薄い金属箔を用いるとポリイミドが硬化す
る際金属箔にシワが入ってしまう、2)ポリイミドを 3
00〜 400℃で硬化させる為金属箔が劣化してしまう。そ
の結果、基板に回路を形成させる際シワによる回路不良
や、金属箔の酸化による屈曲性不良等の不都合を生じ
る。
Recently, high heat resistance is demanded for this flexible printed wiring board, and in order to satisfy these requirements, a two-layer type flexible body consisting only of a polyimide resin layer and a metal layer without using an adhesive is provided. A printed wiring board has been proposed (see Japanese Patent Publication No. 61-45511). There are two methods for manufacturing this substrate: a method of forming a polyimide resin layer on a metal foil and a method of forming a metal layer on a polyimide film. In the former case, it is common to cast a polyimide precursor on a metal foil and heat-cure it to form a polyimide layer.
The substrate obtained by this method has sufficient heat resistance, but 1) if a thin metal foil is used, wrinkles will form in the metal foil when the polyimide hardens.
Since it hardens at 00-400 ℃, the metal foil deteriorates. As a result, when a circuit is formed on the substrate, a circuit defect due to wrinkles, a bending defect due to oxidation of the metal foil, and the like occur.

【0004】後者の場合はポリイミドフィルム表面上に
無電解メッキ、電解メッキ、スパッタリング、イオンプ
レーティング、蒸着等により金属層を形成させることが
一般的であり、この方法によって得られた基板では十分
な耐熱性が得られるが、ポリイミドフィルムと金属層と
の接着性が低いために信頼性という点で問題が残り、こ
の接着性についての改良が特に必要とされていた。ま
た、この接着性を改良するためにポリイミドフィルム表
面に前処理としてサンドブラスト処理及びアルカリ処理
を施すことが提案(特開平3-6382号参照)されている
が、サンドブラスト処理ではフィルムの強度が弱くな
り、かつフィルムに異物(SiC等のブラスト剤)が混入し
てしまい、回路加工工程で回路の断線や接触等のトラブ
ルを起こす原因になるという問題があった。
In the latter case, it is common to form a metal layer on the surface of the polyimide film by electroless plating, electrolytic plating, sputtering, ion plating, vapor deposition, etc., and a substrate obtained by this method is sufficient. Although it is possible to obtain heat resistance, since the adhesion between the polyimide film and the metal layer is low, there remains a problem in terms of reliability, and improvement in this adhesion has been particularly required. In addition, in order to improve this adhesiveness, it has been proposed to subject the surface of the polyimide film to sandblasting and alkali treatment as pretreatment (see Japanese Patent Application Laid-Open No. 3-6382), but the strength of the film becomes weaker with sandblasting. In addition, there is a problem that foreign matter (blasting agent such as SiC) is mixed into the film, which causes troubles such as disconnection and contact of the circuit in the circuit processing process.

【0005】またアルカリ処理のみでは、ポリイミドフ
ィルム表面の凹凸によるアンカー効果やポリイミドの加
水分解による−OH、−COOH等による金属層との密着性が
期待されているが、依然金属層との十分な接着性が得ら
れていないのが現状である。
Further, only by the alkali treatment, it is expected that the anchor effect due to the unevenness of the polyimide film surface and the adhesion to the metal layer due to -OH, -COOH, etc. due to the hydrolysis of the polyimide will still be sufficient with the metal layer. At present, the adhesiveness is not obtained.

【0006】[0006]

【発明が解決しようとする課題】本発明は、かかる問題
点を解決し、ポリイミドフィルムと金属層との接着性を
向上させることを目的としたもので、ポリイミドフィル
ムと金属層との優れた接着性を有するフレキシブル印刷
配線用基板を提供しようとするものである。
DISCLOSURE OF THE INVENTION The present invention is intended to solve the above problems and improve the adhesiveness between a polyimide film and a metal layer, and has excellent adhesion between the polyimide film and the metal layer. An object of the present invention is to provide a flexible printed wiring board having properties.

【0007】[0007]

【課題を解決するための手段】本発明者等は上記課題を
解決するために特にポリイミドフィルムの前処理方法に
ついて鋭意検討した結果、本発明に到達したものでその
要旨は、予めアルカリ処理を行なったポリイミドフィル
ム表面に低温プラズマ処理を施し、さらに湿式メッキ法
により金属層を形成させることを特徴とするフレキシブ
ル印刷配線用基板の製造方法にある。
Means for Solving the Problems The inventors of the present invention have diligently studied a pretreatment method for a polyimide film in order to solve the above problems, and as a result, the present invention has been achieved. A method for manufacturing a flexible printed wiring board is characterized in that the surface of the polyimide film is subjected to a low temperature plasma treatment, and a metal layer is further formed by a wet plating method.

【0008】以下本発明を詳細に説明する。本発明で使
用されるポリイミドフィルムとしては、厚さが通常12.5
〜 125μmの範囲であるが、必要に応じて適宜の厚さの
ものが使用される。ポリイミド樹脂の組成としては脂肪
族、脂肪族−芳香族、芳香族の各ポリイミド樹脂がある
が、耐熱性等の面から芳香族ポリイミド樹脂が好まし
い。
The present invention will be described in detail below. As the polyimide film used in the present invention, the thickness is usually 12.5.
The thickness is in the range of up to 125 μm, but an appropriate thickness is used if necessary. The composition of the polyimide resin includes aliphatic, aliphatic-aromatic and aromatic polyimide resins, and the aromatic polyimide resin is preferable from the viewpoint of heat resistance and the like.

【0009】本発明ではポリイミドフィルム表面の前処
理として先ずアルカリ処理するが、これは次の低温プラ
ズマ処理による表面の活性化を効果的に行なうためのも
のであり、この際の改質層の厚みは0.05〜2μmが好ま
しく、さらには 0.1〜1μmが好ましい。0.05μm未満
であるとアンカー効果が得られ難く、ポリイミドフィル
ムと金属層との接着性が向上せず、2μmを超えるとフ
ィルムの引張強さ、引裂伝播抵抗、弾性率等の物理的特
性が低下してしまう。アルカリ処理方法としてはpH8以
上、液温5〜80℃の水酸化ナトリウム、水酸化カリウム
等の水溶液中に1〜 600秒間浸積処理することが好まし
い。これらの条件はポリイミド樹脂組成等により適宜決
められる。
In the present invention, the surface of the polyimide film is pre-treated with an alkali, but this is for effectively activating the surface by the following low-temperature plasma treatment, and the thickness of the modified layer at this time. Is preferably 0.05 to 2 μm, more preferably 0.1 to 1 μm. If it is less than 0.05 μm, the anchor effect is difficult to obtain, and the adhesiveness between the polyimide film and the metal layer is not improved, and if it exceeds 2 μm, the physical properties such as tensile strength, tear propagation resistance and elastic modulus of the film are deteriorated. Resulting in. As the alkali treatment method, it is preferable to perform immersion treatment in an aqueous solution of sodium hydroxide, potassium hydroxide or the like having a pH of 8 or more and a liquid temperature of 5 to 80 ° C. for 1 to 600 seconds. These conditions are appropriately determined depending on the polyimide resin composition and the like.

【0010】本発明の最大の特徴は、ポリイミドフィル
ム表面の前処理としてアルカリ処理と低温プラズマ処理
とを組み合わせたことにある。アルカリ処理の次に行う
低温プラズマ処理は、減圧可能な低温プラズマ処理装置
内に予めアルカリ処理したポリイミドフィルムを入れ、
装置内を無機ガスの雰囲気として圧力を0.001〜10Tor
r、好ましくは0.01〜1Torrに保持した状態で、電極間
に 0.1〜10KV前後の直流あるいは交流を印加してグロー
放電させることにより無機ガスの低温プラズマを発生さ
せ、フィルムを順次移動させながら表面を連続的にプラ
ズマ処理するが、プラズマ処理時間は概ね 0.1〜 100秒
とするのが良い。無機ガスとしては、ヘリウム、ネオ
ン、アルゴン等の不活性ガス、および酸素、窒素、一酸
化炭素、二酸化炭素、アンモニア、空気が使用される
が、これらは1種に限らず2種以上混合して使用するこ
とも任意に行なわれる。この低温プラズマ処理を行なう
ことによってアルカリ処理で凹凸が形成されたポリイミ
ドフィルムの表面が活性化され、金属層との接着性が向
上する。
The greatest feature of the present invention is that the alkali treatment and the low temperature plasma treatment are combined as a pretreatment of the surface of the polyimide film. The low temperature plasma treatment to be carried out after the alkali treatment is to put a polyimide film which has been alkali treated in advance in a low temperature plasma treatment apparatus capable of reducing pressure,
The inside of the equipment is made an atmosphere of inorganic gas and the pressure is 0.001 to 10 Tor
While maintaining at r, preferably 0.01 to 1 Torr, a low temperature plasma of inorganic gas is generated by applying a direct current or an alternating current of about 0.1 to 10 KV between the electrodes and glow discharge to generate a low temperature plasma of the inorganic gas. The plasma treatment is continuously performed, but the plasma treatment time is preferably set to about 0.1 to 100 seconds. As the inorganic gas, an inert gas such as helium, neon, or argon, and oxygen, nitrogen, carbon monoxide, carbon dioxide, ammonia, or air are used, but these are not limited to one kind, and two or more kinds may be mixed. It is also optional to use. By performing this low-temperature plasma treatment, the surface of the polyimide film having the irregularities formed by the alkali treatment is activated, and the adhesiveness with the metal layer is improved.

【0011】次いで前記アルカリおよび低温プラズマ前
処理を施したポリイミドフィルムの表面に湿式メッキ法
によって金属層を形成させる。先ず湿式メッキ法の1種
である無電解メッキ法によって薄金属層を形成させる。
この時の金属層の厚みは0.01〜1μmが好ましく、さら
には0.05〜0.5 μmが好ましい。0.01μm未満であると
金属層にメッキムラが生じてしまい、次の工程で無電解
メッキ金属層にさらに電解メッキを施す際に、金属層に
厚みムラ、ピンホール層等の不都合を生じて好ましくな
く、1μmを超えると無電解メッキに要する時間が長く
なり、製造効率が悪くなるばかりでなく、金属層の内部
応力から接着性および耐熱性が低下してしまう。
Next, a metal layer is formed on the surface of the polyimide film which has been subjected to the alkali and low temperature plasma pretreatment by a wet plating method. First, a thin metal layer is formed by an electroless plating method which is one of the wet plating methods.
The thickness of the metal layer at this time is preferably 0.01 to 1 μm, and more preferably 0.05 to 0.5 μm. If it is less than 0.01 μm, uneven plating will occur on the metal layer, and when performing electroless plating on the electroless plated metal layer in the next step, problems such as uneven thickness of the metal layer and pinhole layer will occur, which is not preferable. If the thickness exceeds 1 μm, the time required for electroless plating becomes long, the manufacturing efficiency deteriorates, and the internal stress of the metal layer lowers the adhesiveness and heat resistance.

【0012】次に、この薄金属層付ポリイミドフィルム
に電解メッキ法によって金属層を形成させる。この時の
金属層の厚みは作業性および用途によって適宜決められ
るが、金属層の厚みは無電解メッキ金属層の厚さと電解
メッキ金属層の厚さとの和として2〜35μmが好まし
く、さらには5〜18μmが好ましい。2μm未満である
と金属層が薄いため、回路形成時に回路が断線してしま
ったり、回路の断面積が小さいため、電気的な容量不足
が生じてしまう。35μmを超えると電解メッキに要する
時間が長くなり製造効率が悪くなってしまうと共に、配
線基板の小型化に伴う回路の線幅及び線間隔を小さくす
る高密度化の形成に対応できなくなってしまう。なお、
これらの無電解メッキ及び電解メッキについては、常法
で良く、特に限定されるものではない。また、メッキ金
属については、クロム、ニッケル、銅等が挙げられる
が、電気抵抗及び作業性の面から銅を用いるのが好まし
い。
Next, a metal layer is formed on the polyimide film with the thin metal layer by electrolytic plating. The thickness of the metal layer at this time is appropriately determined depending on workability and application, but the thickness of the metal layer is preferably 2 to 35 μm as the sum of the thickness of the electroless plating metal layer and the thickness of the electrolytic plating metal layer, and further 5 -18 μm is preferable. If the thickness is less than 2 μm, the metal layer is thin, so that the circuit is broken at the time of forming the circuit, or the circuit has a small cross-sectional area, resulting in insufficient electrical capacity. If the thickness exceeds 35 μm, the time required for electrolytic plating becomes long, the manufacturing efficiency deteriorates, and it becomes impossible to cope with the formation of high density in which the line width and the line interval of the circuit are reduced due to the miniaturization of the wiring board. In addition,
These electroless plating and electrolytic plating may be conventional methods and are not particularly limited. Examples of the plating metal include chromium, nickel, copper and the like, but it is preferable to use copper from the viewpoint of electric resistance and workability.

【0013】[0013]

【実施例】以下、本発明の実施態様を実施例を挙げて説
明するが、本発明はこれらに限定されるものではない。 (実施例1)厚さ25μmのカプトンフィルム(東レ・デ
ュポン社製ポリイミドフィルム商品名)を50℃、20重量
%水酸化ナトリウム水溶液中で60秒間アルカリ処理を行
ない約 0.2μmの改質層を得た。このフィルムを 120
℃、30分間乾燥した後、低温プラズマ処理を行なった。
この時のプラズマ処理時間は真空度 0.1Torr以下、酸素
流量を 2.0L/min で供給し、印加電圧2KW、周波数110K
Hzで30KWの電力を入力した。プラズマ発生装置は、電極
4本を円筒状に配置し、電極の外側40mmの距離でフィル
ムを電極の外側に沿って10m/min 、処理時間約25秒の
速度で移動させ処理した。次いでこのポリイミドフィル
ムに無電解銅メッキを行ない、0.05μmの銅層を得た。
さらに電解銅メッキにより総厚18μmの銅層を得た。な
お無電解銅メッキにはHS202B(日立化成製増感剤)、AD
P201(日立化成製密着促進剤)、CUST201(日立化成製無
電解銅メッキ液)を、電解銅メッキにはキューブライト
TH(荏原ユージライト製硫酸銅メッキ液)を標準的な条
件で用いた。このようにして得られたフレキシブル印刷
配線用基板の特性を表1に示した。
EXAMPLES The embodiments of the present invention will be described below with reference to examples, but the present invention is not limited thereto. (Example 1) A 25 μm thick Kapton film (trade name of polyimide film manufactured by Toray-Dupont Co., Ltd.) was alkali-treated for 60 seconds at 50 ° C. in a 20 wt% sodium hydroxide aqueous solution to obtain a modified layer of about 0.2 μm. It was This film 120
After drying at 30 ° C. for 30 minutes, low temperature plasma treatment was performed.
At this time, the plasma processing time is 0.1V or less vacuum, the oxygen flow rate is 2.0L / min, the applied voltage is 2KW and the frequency is 110K.
Input 30 KW power in Hz. In the plasma generator, four electrodes were arranged in a cylindrical shape, and the film was moved along the outside of the electrode at a distance of 40 mm outside the electrode at a speed of 10 m / min for about 25 seconds. Then, this polyimide film was subjected to electroless copper plating to obtain a 0.05 μm copper layer.
Further, a copper layer having a total thickness of 18 μm was obtained by electrolytic copper plating. For electroless copper plating, HS202B (Hitachi Kasei sensitizer), AD
P201 (Hitachi Kasei adhesion promoter), CUST201 (Hitachi Kasei electroless copper plating solution), electrolytic copper plating Cubelite
TH (Ebara Eugelite copper sulfate plating solution) was used under standard conditions. The characteristics of the flexible printed wiring board thus obtained are shown in Table 1.

【0014】(実施例2)厚さ25μmのカプトンフィル
ム(前出)を70℃、20重量%水酸化ナトリウム水溶液で
60秒間アルカリ処理を行ない約 0.5μmの改質層を得
た。以下実施例1と同一条件で処理し、フレキシブル印
刷配線用基板を得、その特性を表1に示した。
Example 2 A Kapton film having a thickness of 25 μm (described above) was treated at 70 ° C. with a 20% by weight aqueous sodium hydroxide solution.
Alkaline treatment was performed for 60 seconds to obtain a modified layer of about 0.5 μm. Subsequent processing under the same conditions as in Example 1 was carried out to obtain a flexible printed wiring board, the characteristics of which are shown in Table 1.

【0015】(実施例3)厚さ25μmのカプトンフィル
ム(前出)を70℃、20重量%水酸化ナトリウム水溶液で
120秒間アルカリ処理を行ない約 0.9μmの改質層を得
た。以下実施例1と同一条件で処理し、フレキシブル印
刷配線用基板を得た。この特性を表1に示した。
Example 3 A Kapton film having a thickness of 25 μm (described above) was treated at 70 ° C. with a 20 wt% sodium hydroxide aqueous solution.
Alkali treatment was performed for 120 seconds to obtain a modified layer of about 0.9 μm. Then, the substrate was processed under the same conditions as in Example 1 to obtain a flexible printed wiring board. This characteristic is shown in Table 1.

【0016】(実施例4)実施例1においてプラズマ処
理速度を10m/min から30m/min に変更した以外は同
一条件で処理し、フレキシブル印刷配線用基板を得た。
この特性を表1に示した。
Example 4 A substrate for flexible printed wiring was obtained by the same conditions as in Example 1, except that the plasma processing rate was changed from 10 m / min to 30 m / min.
This characteristic is shown in Table 1.

【0017】(実施例5)実施例1においてプラズマ処
理ガスを酸素から窒素に変更した以外は同一条件で処理
し、フレキシブル印刷配線用基板を得た。この特性を表
1に示した。
(Example 5) A substrate for flexible printed wiring was obtained by the same process as in Example 1, except that the plasma treatment gas was changed from oxygen to nitrogen. This characteristic is shown in Table 1.

【0018】(実施例6)実施例1において無電解銅メ
ッキ厚さ0.05μmを 0.5μmに変更した以外は同一条件
で処理し、フレキシブル印刷配線用基板を得た。この特
性を表1に示した。
Example 6 A substrate for flexible printed wiring was obtained by the same treatment as in Example 1, except that the thickness of the electroless copper plating was changed from 0.05 μm to 0.5 μm. This characteristic is shown in Table 1.

【0019】(比較例1)実施例1においてカプトンフ
ィルム(前出)にアルカリ処理を施さなかったこと以外
は同一条件で処理し、フレキシブル印刷配線用基板を得
た。この特性を表1に示したが、十分な接着強度が得ら
れなかった。
Comparative Example 1 A substrate for flexible printed wiring was obtained by treating under the same conditions as in Example 1 except that the Kapton film (described above) was not subjected to alkali treatment. This property is shown in Table 1, but sufficient adhesive strength was not obtained.

【0020】(比較例2)厚さ25mmのカプトンフィルム
(前出)を30℃、20重量%水酸化ナトリウム水溶液で5
秒間処理を行ない約0.02μmの改質層を得た。以下実施
例1と同一条件で行ないフレキシブル印刷配線用基板を
得た。この特性を表1に示した。アルカリ改質層の厚み
が薄いので十分な接着強度が得られなかった。
(Comparative Example 2) A Kapton film having a thickness of 25 mm (described above) was treated with a 20% by weight aqueous sodium hydroxide solution at 30 ° C.
The treatment was performed for a second to obtain a modified layer of about 0.02 μm. A flexible printed wiring board was obtained under the same conditions as in Example 1 below. This characteristic is shown in Table 1. Since the thickness of the alkali-modified layer was thin, sufficient adhesive strength could not be obtained.

【0021】(比較例3)実施例1においてカプトンフ
ィルム(前出)に低温プラズマ処理を施さなかったこと
以外は同一条件で行ないフレキシブル印刷配線用基板を
得た。この特性を表1に示したが十分な接着強度が得ら
れなかった。
Comparative Example 3 A substrate for flexible printed wiring was obtained under the same conditions as in Example 1 except that the Kapton film (described above) was not subjected to the low temperature plasma treatment. This property is shown in Table 1, but sufficient adhesive strength was not obtained.

【0022】(比較例4)実施例1において無電解メッ
キによる銅層0.05μmを 2.0μmに変更した以外は同一
条件で処理し、フレキシブル印刷配線用基板を得た。こ
の特性を表1に示した。接着強度及び耐熱性共に満足し
得るものではなかった。
(Comparative Example 4) A flexible printed wiring board was obtained under the same conditions as in Example 1 except that the copper layer 0.05 μm formed by electroless plating was changed to 2.0 μm. This characteristic is shown in Table 1. Neither adhesive strength nor heat resistance was satisfactory.

【0023】以上の実施例、比較例に用いたフレキシブ
ル印刷配線用基板の物性測定方法は次の通りである。 1.引き剥し強度:JIS C 6481に準拠。基板に1mm幅の
回路を形成しこれを90°方向に50mm/minの速度で銅側か
ら引き剥す。 2.半田耐熱性:JIS C 6481に準拠。25mm角のサンプル
をフロー半田上に30秒間浮かべ、フクレ、ハガレ等を目
視により確認する。 表1の評価: ○:異常なし。 ×:フクレ、ハガレあ
り。
The methods for measuring the physical properties of the flexible printed wiring boards used in the above Examples and Comparative Examples are as follows. 1. Peel strength: Conforms to JIS C 6481. A circuit with a width of 1 mm is formed on the board, and this is peeled from the copper side in the 90 ° direction at a speed of 50 mm / min. 2. Solder heat resistance: Complies with JIS C 6481. Float a 25 mm square sample on the flow solder for 30 seconds and visually check for blister and peeling. Evaluation of Table 1: ◯: No abnormality. ×: There are blisters and peeling.

【0024】[0024]

【表1】 [Table 1]

【0025】[0025]

【発明の効果】本発明により、ポリイミドフィルムと金
属層との優れた接着性を有するフレキシブル印刷配線用
基板を提供することが可能であり、産業上その利用価値
は極めて高い。
Industrial Applicability According to the present invention, it is possible to provide a flexible printed wiring board having excellent adhesion between a polyimide film and a metal layer, and its industrial utility value is extremely high.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】予めアルカリ処理を行なったポリイミドフ
ィルム表面に低温プラズマ処理を施し、さらに湿式メッ
キ法により金属層を形成させることを特徴とするフレキ
シブル印刷配線用基板の製造方法。
1. A method for manufacturing a substrate for flexible printed wiring, which comprises subjecting a polyimide film surface which has been previously subjected to an alkali treatment to a low temperature plasma treatment, and further forming a metal layer by a wet plating method.
JP3298023A 1991-10-18 1991-10-18 Manufacture of board for flexible printed wiring Pending JPH05110247A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3298023A JPH05110247A (en) 1991-10-18 1991-10-18 Manufacture of board for flexible printed wiring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3298023A JPH05110247A (en) 1991-10-18 1991-10-18 Manufacture of board for flexible printed wiring

Publications (1)

Publication Number Publication Date
JPH05110247A true JPH05110247A (en) 1993-04-30

Family

ID=17854118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3298023A Pending JPH05110247A (en) 1991-10-18 1991-10-18 Manufacture of board for flexible printed wiring

Country Status (1)

Country Link
JP (1) JPH05110247A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0786928A1 (en) * 1994-11-30 1997-07-30 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Novel flexible copper-coated laminate and flexible printed circuit board
JPH10219465A (en) * 1997-02-05 1998-08-18 Hitachi Chem Co Ltd Electroless plating method
JP2003008179A (en) * 2001-06-18 2003-01-10 Yazaki Corp Patterning method of printed circuit and flexible wiring
JP2006054357A (en) * 2004-08-13 2006-02-23 Nippon Steel Chem Co Ltd Laminate for flexible printed-wiring board, and its manufacturing method
WO2007010778A1 (en) * 2005-07-21 2007-01-25 Toyo Aluminium Kabushiki Kaisha Strip-shaped sheet and method for manufacture thereof
KR100831760B1 (en) * 2006-09-29 2008-05-23 한국생산기술연구원 RFID circuit substrates using wet surface treatment and electroless plating treatment
US7739789B2 (en) * 2004-03-24 2010-06-22 Fujifilm Corporation Method for forming surface graft, conductive film and metal patterns
WO2023053647A1 (en) * 2021-09-30 2023-04-06 三井化学株式会社 Method for manufacturing composite material to be plated and method for manufacturing anisotropic electroconductive sheet

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53135840A (en) * 1977-04-30 1978-11-27 Sumitomo Electric Ind Ltd Metal coating method for non-electroconductive material
JPS60200967A (en) * 1984-03-24 1985-10-11 C-Ren Kk Method for plating organic polymer sheet with metal
JPH036382A (en) * 1989-06-02 1991-01-11 Hitachi Chem Co Ltd Method for sticking metal to polyimide film

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53135840A (en) * 1977-04-30 1978-11-27 Sumitomo Electric Ind Ltd Metal coating method for non-electroconductive material
JPS60200967A (en) * 1984-03-24 1985-10-11 C-Ren Kk Method for plating organic polymer sheet with metal
JPH036382A (en) * 1989-06-02 1991-01-11 Hitachi Chem Co Ltd Method for sticking metal to polyimide film

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0786928A1 (en) * 1994-11-30 1997-07-30 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Novel flexible copper-coated laminate and flexible printed circuit board
JPH10219465A (en) * 1997-02-05 1998-08-18 Hitachi Chem Co Ltd Electroless plating method
JP2003008179A (en) * 2001-06-18 2003-01-10 Yazaki Corp Patterning method of printed circuit and flexible wiring
JP4669631B2 (en) * 2001-06-18 2011-04-13 矢崎総業株式会社 Printed circuit and flexible wiring patterning method
US7739789B2 (en) * 2004-03-24 2010-06-22 Fujifilm Corporation Method for forming surface graft, conductive film and metal patterns
JP2006054357A (en) * 2004-08-13 2006-02-23 Nippon Steel Chem Co Ltd Laminate for flexible printed-wiring board, and its manufacturing method
JP4647954B2 (en) * 2004-08-13 2011-03-09 新日鐵化学株式会社 Method for producing laminate for flexible printed wiring board
WO2007010778A1 (en) * 2005-07-21 2007-01-25 Toyo Aluminium Kabushiki Kaisha Strip-shaped sheet and method for manufacture thereof
KR100831760B1 (en) * 2006-09-29 2008-05-23 한국생산기술연구원 RFID circuit substrates using wet surface treatment and electroless plating treatment
WO2023053647A1 (en) * 2021-09-30 2023-04-06 三井化学株式会社 Method for manufacturing composite material to be plated and method for manufacturing anisotropic electroconductive sheet

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