JPH049479B2 - - Google Patents
Info
- Publication number
- JPH049479B2 JPH049479B2 JP59248017A JP24801784A JPH049479B2 JP H049479 B2 JPH049479 B2 JP H049479B2 JP 59248017 A JP59248017 A JP 59248017A JP 24801784 A JP24801784 A JP 24801784A JP H049479 B2 JPH049479 B2 JP H049479B2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- stage
- spacer
- fixed base
- mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 125000006850 spacer group Chemical group 0.000 claims description 9
- 238000000034 method Methods 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59248017A JPS61127127A (ja) | 1984-11-26 | 1984-11-26 | ミラー取付け装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59248017A JPS61127127A (ja) | 1984-11-26 | 1984-11-26 | ミラー取付け装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61127127A JPS61127127A (ja) | 1986-06-14 |
| JPH049479B2 true JPH049479B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-02-20 |
Family
ID=17171958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59248017A Granted JPS61127127A (ja) | 1984-11-26 | 1984-11-26 | ミラー取付け装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61127127A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63195589A (ja) * | 1987-02-09 | 1988-08-12 | 工業技術院長 | 微小位置決め機構 |
-
1984
- 1984-11-26 JP JP59248017A patent/JPS61127127A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61127127A (ja) | 1986-06-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH07106516B2 (ja) | 位置決めステージ | |
| JP2886032B2 (ja) | 画像読取装置の光学調整機構 | |
| JPH07311314A (ja) | 光ファイバー端の研磨方法 | |
| JPH049479B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| JPH0537024A (ja) | 光半導体装置 | |
| US6898029B2 (en) | Optical bench with alignment subassembly | |
| JP2667324B2 (ja) | 光学装置を整合するために用いられる調節可能なパッドアセンブリ | |
| JP2002184339A (ja) | 制動機構および電子顕微鏡用試料ステージ | |
| JPH09161935A (ja) | 熱圧着装置 | |
| JP2543766Y2 (ja) | 可動鉄片形計器の零調整機構 | |
| JP2000110909A (ja) | 直線案内装置 | |
| JP3466402B2 (ja) | 測定器クランプ用ブラケットおよび測定器支持用スタンド | |
| JPH04127506U (ja) | 位置検出機構 | |
| JP7267659B1 (ja) | 変位測定装置及び変位測定方法 | |
| JP2718747B2 (ja) | ステージ移動機構 | |
| SU956248A1 (ru) | Устройство дл установки многогранных призм | |
| KR920007312Y1 (ko) | 코아블록 접합장치 | |
| JPH10220438A (ja) | 車体組立用基準定盤装置 | |
| JPH087140Y2 (ja) | 光学系における位置調整機構 | |
| JPH0894895A (ja) | キャリアのクランプ機構 | |
| JP4338278B2 (ja) | 光アレイ研磨用治具 | |
| JPH0355157A (ja) | ロッド研磨装置 | |
| JPS62105442A (ja) | 微小変位調整装置 | |
| JPH03293716A (ja) | マスク組立て方法 | |
| JPS62249001A (ja) | レ−ザ干渉計用ミラ−の支持装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |