JPH049252B2 - - Google Patents

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Publication number
JPH049252B2
JPH049252B2 JP22867682A JP22867682A JPH049252B2 JP H049252 B2 JPH049252 B2 JP H049252B2 JP 22867682 A JP22867682 A JP 22867682A JP 22867682 A JP22867682 A JP 22867682A JP H049252 B2 JPH049252 B2 JP H049252B2
Authority
JP
Japan
Prior art keywords
light
hole
printed board
defect
defect detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22867682A
Other languages
Japanese (ja)
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JPS59125695A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP22867682A priority Critical patent/JPS59125695A/en
Priority to US06/554,543 priority patent/US4560273A/en
Priority to DE8383307291T priority patent/DE3377527D1/en
Priority to EP83307291A priority patent/EP0111404B1/en
Publication of JPS59125695A publication Critical patent/JPS59125695A/en
Publication of JPH049252B2 publication Critical patent/JPH049252B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】 〔概要〕 プリント板の基板材内に光を入射拡散させ、ス
ルーホール欠陥部からスルーホール内に漏れる拡
散光を検知することで欠陥検出を行うプリント板
のスルーホール検査装置に関し、 プリント板のスルーホール欠陥検査における片
面照明に存在する技術的課題の解決を目的し、 プリント板の光透過性基板の所定位置に、内壁
面一面に導電層を形成したスルーホール近傍の前
記光透過性基板への光の入射及び検査対象スルー
ホールへの光の入射、並びに該検査対象スルーホ
ールへの光の入射に応答してスルーホール位置信
号、及び前記光透過性基板への光の入射に応答し
てスルーホール欠陥表示信号を出力するための検
出系と欠陥検出対象スルーホールとの位置付けを
各欠陥検出対象スルーホール毎に為してスルーホ
ールの欠陥検出を行なうスルーホール検査装置に
おいて、前記光透過性基板への光の入射を前記プ
リント板の両面から同時に為すための前記プリン
ト板の両面側に設けられた欠陥検出用照明光源
と、該両欠陥検出用照明光源から入射される各光
の欠陥検出対象のスルーホールへの入射を遮蔽す
る遮光手段とを設けて構成した。
[Detailed Description of the Invention] [Summary] Through-hole inspection for printed boards that detects defects by diffusing light into the substrate material of the printed board and detecting the diffused light leaking into the through-holes from defective parts of the through-holes. Regarding the equipment, in order to solve the technical problems that exist with single-sided illumination in through-hole defect inspection of printed circuit boards, we have developed a system in which a conductive layer is formed on the entire inner wall of a printed board at a predetermined position on a light-transmissive substrate near the through-holes. In response to the incidence of light on the light-transmitting substrate and the through-hole to be inspected, and the incidence of light on the through-hole to be inspected, a through-hole position signal and the light to the light-transmitting substrate A through-hole inspection device detects defects in through-holes by positioning a detection system for outputting a through-hole defect display signal in response to the incidence of a through-hole and a through-hole to be detected for each defect. , a defect detection illumination light source provided on both sides of the printed board for simultaneously making light incident on the light-transmitting substrate from both sides of the printed board; and a defect detection illumination light source provided from both of the defect detection illumination light sources. A light shielding means for shielding each light beam from entering the through hole of the defect detection target is provided.

〔産業上の利用分野〕[Industrial application field]

本発明は、プリント板の基板材内に光を入射拡
散させ、スルーホール欠陥部からスルーホール内
に漏れる拡散光を検知することで欠陥検出を行な
うプリント板のスルーホール検査装置に関するも
のである。
The present invention relates to a through-hole inspection device for a printed board that detects defects by diffusing light into the substrate material of the printed board and detecting the diffused light leaking into the through-hole from a defective portion of the through-hole.

両面プリント板の表裏導体間の接続、あるいは
多層プリント板の層間導体の接続には、スルーホ
ールメツキ法が広く用いられている。かかるスル
ーホールメツキ法は、導体を積層した絶縁基板に
予め孔あけ加工し、この透孔内壁面に化学的ある
いは電気的にメツキ層を形成することで導体間を
電気的に接続するれのであるが、該メツキ層はミ
クロン単位の厚さであるとともに、透孔内壁面の
凹凸が激しく、かつ小径であるため、スルーホー
ルの形成メツキ層にピンホール、切れ目等の欠陥
が生じる場合が往々あり、そしてメツキ層の欠陥
部が大きいと、導体間の電気的導通の不良につな
がり、プリント板の信頼性の上で大きな問題とな
る。従つて、このようなスルーホールの欠陥を容
易にかつ確実に検査できることが望まれている。
Through-hole plating is widely used to connect front and back conductors of double-sided printed boards or to connect interlayer conductors of multilayer printed boards. In this through-hole plating method, holes are pre-drilled in an insulating substrate on which conductors are laminated, and a plating layer is chemically or electrically formed on the inner wall of the through-hole to electrically connect the conductors. However, since the plating layer has a thickness on the order of microns, the inner wall surface of the through hole is extremely uneven, and the diameter is small, defects such as pinholes and cuts often occur in the plating layer forming the through hole. If the defects in the plating layer are large, this leads to poor electrical continuity between the conductors, which poses a major problem in terms of the reliability of the printed board. Therefore, it is desired that defects in such through holes can be easily and reliably inspected.

〔従来の技術〕[Conventional technology]

従来、プリント板のスルーホール検査方式とし
ては、プリント板の片面から光源により照明し、
これにより基板材内に入射拡散された光がスルー
ホール欠陥部を通してスルーホール内の透過した
光を、プリント板の反対面に設けた光検知器によ
り検知することで欠陥の有無を検査するようにし
ていた。
Conventionally, the through-hole inspection method for printed circuit boards involves illuminating one side of the printed board with a light source.
As a result, the light diffused into the board material passes through the through-hole defective part, and the light transmitted through the through-hole is detected by a photodetector installed on the opposite side of the printed board, thereby inspecting for the presence or absence of defects. was.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかし、このような従来方式では、基板材が厚
く、これに伴いスルーホールの径が細くかつ長く
なつたり、あるいは多層プリント板のように基板
内部に面積の広い配線パターンがあると、プリン
ト板の片面照明のみでは、光源と反対側の表面近
くにある欠陥を検出することが困難となり、この
ため、一度検査したプリント板を裏返して再度検
査する必要があつた。
However, with this conventional method, if the board material is thick and the diameter of the through hole becomes narrower and longer, or if there is a wiring pattern with a wide area inside the board such as a multilayer printed board, the printed board will be damaged. With only single-sided illumination, it is difficult to detect defects near the surface opposite to the light source, and it is therefore necessary to turn over the printed board once inspected and inspect it again.

本発明は上記従来の問題を解決したもので、プ
リント板基板材の厚さ方向における入射拡散光の
光量分布をほぼ均等化し、内層導体パターンの有
無及び基板材の厚さに関係なくスルーホール欠陥
の有無を確実に検知できるようにしたプリント板
のスルーホール検査装置を提供することを目的と
する。
The present invention solves the above-mentioned conventional problems, and makes the light intensity distribution of the incident diffused light almost uniform in the thickness direction of the printed circuit board material, and eliminates through-hole defects regardless of the presence or absence of an inner layer conductor pattern and the thickness of the board material. An object of the present invention is to provide a through-hole inspection device for a printed board that can reliably detect the presence or absence of a printed board.

〔課題を解決するための手段〕[Means to solve the problem]

本発明は、プリント板の光透過性基板の所定位
置に、内壁面一面に導電層を形成したスルーホー
ル近傍の前記光透過性基板への光の入射、及び該
光透過性基板への光の入射に応答してスルーホー
ル欠陥表示信号を出力するための系と、欠陥検出
対象スルーホールとの位置付けを欠陥検出対象ス
ルーホール毎に為してスルーホールの欠陥検出を
行なうスルーホール検査装置に、前記光透過性基
板への光の入射を前記プリント板の両面から同時
に為すための前記プリント板の両面側に設けられ
た欠陥検出用照明光源と、該両欠陥検出用照明光
源から入射される各光の欠陥検出対象のスルーホ
ールへの入射を遮蔽する遮光手段とを設けて構成
される。
The present invention provides for the incidence of light into the light-transmissive substrate near the through-hole in which a conductive layer is formed on the entire inner wall surface of the light-transmissive substrate at a predetermined position of the light-transmissive substrate of a printed board, and the transmission of light to the light-transmissive substrate. A system for outputting a through-hole defect display signal in response to an incident light, and a through-hole inspection device that detects defects in through-holes by positioning each through-hole to be detected as a defect. a defect detection illumination light source provided on both sides of the printed board for simultaneously making light incident on the light-transmissive substrate from both sides of the printed board; A light shielding means for shielding light from entering the through hole of the defect detection target is provided.

〔作用〕[Effect]

プリント板の検査対象スルーホール内へ光を入
射させる光入射決とその光検出系とを位置付けて
当該検査対象スルーホール内へ入射された光を前
記光検出系で行なうことにより、前記検出対象ス
ルーホールの位置検出信号が、本発明装置で用い
る公知の方式で得られるが、その際に前記位置検
出と同時に、又はそれと異なる時刻に、プリント
板両側に設けられた欠陥検出用照明光源からプリ
ント板の光透過性基板内へ光を、同時に入射させ
てその光をスルーホール欠陥検出として作用する
光検出系に達するか否かで該光検出系からスルー
ホールの欠陥有無を表すスルーホール欠陥表示信
号が出力される。
By positioning a light input device that makes light enter the through-hole to be inspected in a printed board and its photodetection system, and using the light detection system to detect the light that has entered the through-hole to be inspected, the through-hole to be detected can be detected. A hole position detection signal is obtained by a known method used in the device of the present invention, and at the same time as the position detection or at a different time, a defect detection illumination light source provided on both sides of the printed board is sent to the printed board. A through-hole defect display signal is generated from the photo-detection system indicating the presence or absence of a defect in the through-hole based on whether or not the light reaches the photo-detection system that acts as a through-hole defect detection by simultaneously inputting light into the light-transmissive substrate of the through-hole. is output.

このスルーホール欠陥表示信号と前記位置検出
信号とから目下検査中の検査対象スルーホールに
欠陥が生じているか否かを示す信号を出力する。
Based on this through-hole defect display signal and the position detection signal, a signal indicating whether or not a defect has occurred in the through-hole to be inspected is outputted.

この信号を出力させるための各動作は、各欠陥
検出対象スルーホール毎に行なう。
Each operation for outputting this signal is performed for each defect detection target through hole.

従つて、プリント板片面から照明してスルーホ
ールの欠陥検査を行なう場合等で生ずる欠陥検査
の不確実性、検査作業量の増大等の解決に大いに
役立つ。
Therefore, it is very useful for solving problems such as uncertainty in defect inspection and an increase in the amount of inspection work that occur when through-hole defects are inspected by illuminating one side of a printed board.

〔実施例〕〔Example〕

第1図は本発明にかかるプリント板のスルーホ
ール検査装置の第1実施例を示すもので、1は検
査されるプリント板であり、このプリント板1を
構成する基板材2は、例えばガラス繊維にエポキ
シ樹脂を含浸させた光透過性の物質から成り、そ
して基板材2に穿設した透孔2aの内壁にメツキ
層3を形成することで表裏導体(ランド部)4及
び内層導体パターン5を電気的に接続するスルー
ホール6を設けている。
FIG. 1 shows a first embodiment of a printed board through-hole inspection apparatus according to the present invention, in which 1 is a printed board to be inspected, and a substrate material 2 constituting this printed board 1 is made of glass fibers, for example. By forming a plating layer 3 on the inner wall of a through hole 2a drilled in the substrate material 2, the front and back conductors (land parts) 4 and the inner layer conductor pattern 5 are formed. A through hole 6 for electrical connection is provided.

このようにしたプリント板1の上下両面側に
は、それぞれ基板材2の両面を部分照明する欠陥
検出用照明光源7及び8が表裏導体4の周囲に沿
うようにして複数個ずつ配置され、この各光源7
及び8には基板材2内部を透過し易い赤色のもの
が利用される。また、前記光源7及び8で囲まれ
る中心部分には、外周面を鏡にした台形筒状のプ
リズム9,10が軸線を一致させて配置され、こ
の各プリズム9はそれぞれの光源7及び8からの
光がスルーホール6に入射するのを防止するため
のものであり、そして上記下部プリズム10の下
側面側にはスルーホール検出用の光源12が配置
され、この光源12からの光12aは下部プリズ
ム10、スルーホール6及び上部プリズム9を順
次透過するようになつている。前記光源12には
光源7,8と異なる波長の光、例えば緑色の光が
使用される。
A plurality of defect detection illumination light sources 7 and 8 for partially illuminating both sides of the board material 2 are disposed on both upper and lower sides of the printed board 1 in such a manner as to extend along the periphery of the front and back conductors 4, respectively. Each light source 7
For 8 and 8, a red color that easily passes through the inside of the substrate material 2 is used. Furthermore, in the center area surrounded by the light sources 7 and 8, trapezoidal cylindrical prisms 9 and 10 whose outer circumferential surfaces are mirrors are arranged with their axes aligned, and each prism 9 is connected to the light sources 7 and 8. A light source 12 for detecting the through hole is arranged on the lower side of the lower prism 10, and light 12a from this light source 12 is used to prevent the light 12a from entering the through hole 6. The light passes through the prism 10, the through hole 6, and the upper prism 9 in order. The light source 12 uses light of a different wavelength from that of the light sources 7 and 8, for example, green light.

また、前記上部プリズム9の光出射側には色分
離フイルタ13が45゜の角度に傾けて配置され、
この色分離フイルタ13は赤色の光を透過し、緑
色の光を反射するもので、色分離フイルタ13の
透過光軸上には欠陥検知用の光検知器14が配置
され、さらに色分離フイルタ13の反射光軸上に
はスルーホール検知用の光検知器15が配置され
ているとともに、各光検知器14,15の出力側
には、これから入射光の有無に応じて送出される
信号を「1」、「0」に2値化する2値化回路1
6,17がそれぞれ接続され、この2値化回路1
6,17の2値信号はアンド回路18に入力さ
れ、アンド回路18の論理条件が成立したとき、
欠陥信号Sを送出するようになつている。
Further, a color separation filter 13 is arranged at an angle of 45° on the light exit side of the upper prism 9,
This color separation filter 13 transmits red light and reflects green light, and a photodetector 14 for defect detection is arranged on the transmission optical axis of the color separation filter 13. A photodetector 15 for through-hole detection is arranged on the reflected optical axis of the photodetector 15, and the output side of each photodetector 14, 15 receives a signal that will be sent out depending on the presence or absence of incident light. Binarization circuit 1 that binarizes into “1” and “0”
6 and 17 are connected to each other, and this binarization circuit 1
The binary signals 6 and 17 are input to the AND circuit 18, and when the logical condition of the AND circuit 18 is satisfied,
A defect signal S is sent out.

次に前記のように構成された本実施例の動作に
ついて説明する。
Next, the operation of this embodiment configured as described above will be explained.

プリント板1のスルーホール6の1つが検査位
置に割出された状態において、光源7及び8から
赤色の光7a,8aがプリント板1の両面に向け
照射されると、該光7a,8aは基板材2内に入
射し拡散される。ここで、基板材2の上面から入
射された光7aは基板材2内部に拡散されるが、
この光7aによる基板材2内の厚さ方向の光量分
布は、第2図の実線に示す如く基板材2の上面
側が最も大きく、下面側に行くにしたがい直線的
に減少する特性を示し、また、同様にして光8a
による基板材2内の厚さ方向の光量分布は、第2
図の破線に示す如く基板材2の下面側が最も大
きく、上面側に行くにしたがい直線的に減少する
特性を示す。したがつて、基板材2を光源7,8
により上下両面から照明した場合は実線及び破
線の特性が合成された1点鎖線に示す光量分
布特性となり、スルーホール6の欠陥検出に必要
十分な光量を確保できる。
When one of the through holes 6 of the printed board 1 is indexed to the inspection position, when red lights 7a and 8a are irradiated from the light sources 7 and 8 toward both sides of the printed board 1, the lights 7a and 8a The light enters the substrate material 2 and is diffused. Here, the light 7a incident from the upper surface of the substrate material 2 is diffused inside the substrate material 2, but
The light intensity distribution in the thickness direction within the substrate material 2 due to this light 7a has the characteristic that it is largest on the upper surface side of the substrate material 2 and decreases linearly toward the lower surface side, as shown by the solid line in FIG. , Similarly, light 8a
The light intensity distribution in the thickness direction within the substrate material 2 is
As shown by the broken line in the figure, it exhibits a characteristic that it is largest on the lower surface side of the substrate material 2 and decreases linearly toward the upper surface side. Therefore, the substrate material 2 is connected to the light sources 7 and 8.
When the illumination is performed from both the upper and lower sides, the light intensity distribution characteristic shown by the dashed-dotted line is obtained by combining the characteristics of the solid line and the broken line, and a sufficient amount of light can be secured for detecting defects in the through hole 6.

ここで、スルーホール6の内壁にピンホール等
の欠陥部3aがあると、基板材2内で拡散した光
の一部が欠陥部3aを通してスルーホール内に漏
れ、この光19は上部プリズム9及び色分離フイ
ルタ13を透過して光検知器14により検知され
るとともに電気信号に変換され、さらに2値化回
路16により2値化されてアンド回路18の一方
の入力端に加えられる。
Here, if there is a defective part 3a such as a pinhole on the inner wall of the through hole 6, a part of the light diffused within the substrate material 2 leaks into the through hole through the defective part 3a, and this light 19 is transmitted to the upper prism 9 and The signal passes through the color separation filter 13 and is detected by the photodetector 14 and converted into an electrical signal, which is then binarized by the binarization circuit 16 and applied to one input terminal of the AND circuit 18.

一方、光源12からの緑色の光は、スルーホー
ル6が検査位置に到達すれば、下部プリズム10
を透過した後、スルーホール6内に通過し、さら
に上部プリズム9を透過した後、色分離フイルタ
13により光検知器15方向に反射され、該光検
知器15で検知される。これにより、検査位置に
スルーホール6があることを光検知器15により
電気信号に変換された後、2値化回路17により
2値化され、アンド回路18の他方の入力端に加
えられる。アンド回路18の2入力が共に「1」
になると、検査位置に割出されたスルーホール6
に欠陥部3aがあると判定して欠陥信号Sを送出
する。
On the other hand, when the through hole 6 reaches the inspection position, the green light from the light source 12 is transmitted to the lower prism 10.
After passing through the through hole 6 and further passing through the upper prism 9, the light is reflected by the color separation filter 13 toward the photodetector 15 and detected by the photodetector 15. Thereby, the presence of the through hole 6 at the inspection position is converted into an electrical signal by the photodetector 15, which is then binarized by the binarization circuit 17 and applied to the other input terminal of the AND circuit 18. Two inputs of AND circuit 18 are both “1”
, the through hole 6 indexed to the inspection position
It is determined that there is a defective part 3a in the area, and a defect signal S is sent out.

従つて、前記のような構成の本実施例にあつて
は、プリント板1の上下両面から照明するように
したので、内層導体パターンがあつても、又欠陥
部3aがスルーホール内壁のいずれの部分にあつ
ても、該欠陥部6aを確実に検知することがで
き、従来のように一度検査したプリント板を裏返
して再度検査する必要がなく、一度の検査で欠陥
検出が可能となる。
Therefore, in this embodiment having the above-mentioned configuration, since the printed board 1 is illuminated from both the upper and lower surfaces, even if there is an inner layer conductor pattern, the defective portion 3a is not exposed to any of the inner walls of the through hole. Even if the defective portion 6a is present in the defective portion, it is possible to reliably detect the defective portion 6a, and there is no need to turn over the printed board that has been inspected once and inspect it again as in the conventional method, and it is possible to detect the defect with a single inspection.

第3図は本発明の第2の実施例を示すものであ
る。本実施例においては、スルーホール6を有す
るプリント板1はガラス板からなるX−Yステー
ジ20上に截置され、このプリント板1の上部に
配置した欠陥検出用の光源7から出た光(赤色)
はレンズ21により平行光線にして上面からスル
ーホール6の部分を部分照明するようになつてい
るとともに、レンズ21とプリント板1間には光
源7からの光がスルーホール6内に入射を阻止す
るマスク22が配置されている。また、X−Yス
テージ20の下面側に設置した欠陥検出用光源8
から出た光はレンズ23により平行光線に変換さ
れ、この平行光線はミラー24によりプリント板
1の下面に向け前記光源7からの照射光と対向し
て照射されるようになつているとともに、ミラー
24による照射光方向の途中には、スルーホール
6内への平行光線の入射を阻止し、かつスルーホ
ール6の欠陥部3aから漏れる光19を反射させ
るミラー25に配置され、さらにミラー25によ
り反射された光はミラー26及びレンズ27を通
して欠陥検出用光検知器28に結像されるように
なつている。
FIG. 3 shows a second embodiment of the invention. In this embodiment, a printed board 1 having through holes 6 is placed on an X-Y stage 20 made of a glass plate, and light ( red)
The light from the light source 7 is prevented from entering the through hole 6 between the lens 21 and the printed board 1, while the lens 21 converts the light into parallel light to partially illuminate the through hole 6 from the top surface. A mask 22 is placed. In addition, a defect detection light source 8 installed on the lower surface side of the X-Y stage 20
The light emitted from the light source 7 is converted into a parallel light beam by a lens 23, and this parallel light beam is irradiated by a mirror 24 toward the lower surface of the printed board 1, facing the irradiation light from the light source 7. A mirror 25 is disposed midway in the direction of the light irradiated by the mirror 24 to prevent parallel light from entering the through hole 6 and to reflect the light 19 leaking from the defective portion 3a of the through hole 6. The emitted light passes through a mirror 26 and a lens 27 and is imaged onto a defect detection photodetector 28.

このように構成された本実施例によれば、前記
第1図の実施例と同様な効果が得られるほか、プ
リント板1とその照明用光源手段との間隔をあけ
ることができ、これに伴いガラス板からなるX−
Yステージ20を介在でき、プリント板1の支持
が容易になる。
According to this embodiment configured in this way, in addition to obtaining the same effects as the embodiment shown in FIG. X- made of glass plate
The Y stage 20 can be interposed, and the printed board 1 can be easily supported.

また、第4図は本発明の第3図に対応するプリ
ント板照明手段を変形例を示すもので、プリント
板1のX−Yステージ20を兼ねたガラス板の一
部に切断面をガラス板(X−Yステージ20)の
平面に対し斜めにしたガラス20aを接合し、そ
の接合面には反射膜29,30を介在せしめ、こ
の両反射膜29,30によりスルーホール6の欠
陥部3aから漏れた光19を図示しない欠陥検出
用光検知器に導く反射系として機能させるととも
に、前記一方の反射膜29をプリント板照明光3
1がスルーホール6内に入射するのを阻止するマ
スクとして機能させるようにしたものである。
Further, FIG. 4 shows a modified example of the printed board illumination means corresponding to FIG. A glass 20a that is oblique to the plane of the (X-Y stage 20) is bonded, and reflective films 29 and 30 are interposed on the bonded surface. In addition to functioning as a reflection system that guides the leaked light 19 to a defect detection photodetector (not shown), the one reflective film 29 is used as a reflection system to guide the printed board illumination light 3.
1 is made to function as a mask to prevent the intrusion into the through hole 6.

この実施例においては、第3図に示すミラー2
5,26を少なくとも省略できる。
In this embodiment, the mirror 2 shown in FIG.
5 and 26 can be omitted at least.

〔発明の効果〕〔Effect of the invention〕

以上、詳述した通り、本発明によれば、プリン
ト板両面から照明するようにしたので、プリント
板基板材の厚さ方向における入射拡散光の光量分
布をほぼ均等化でき、このため、内層導体パター
ンの有無及び基板材の厚さに関係なくスルーホー
ルの欠陥の有無を一度の検査で確実に検知できる
とともに、プリント板のスルーホール検査能率も
向上できる効果がある。
As described in detail above, according to the present invention, since the printed board is illuminated from both sides, the light intensity distribution of the incident diffused light in the thickness direction of the printed board substrate material can be almost equalized, and therefore, the inner layer conductor Regardless of the presence or absence of a pattern and the thickness of the board material, the presence or absence of defects in through-holes can be reliably detected in a single inspection, and the efficiency of through-hole inspection of printed circuit boards can also be improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の第1の実施例を示す図、第2
図は本発明におけるプリント板基板材の厚さ方向
の光量分布特性図、第3図は本発明の第2の実施
例を示す図、第4図は第3図に対応するプリント
板照明手段の変形例を示す説明図である。 第1図乃至第4図において、1はプリント板、
2は基板材、3はメツキ層、3aは欠陥部、6は
スルーホール、7,8は欠陥検出用の照明光源、
14,15は光検知器である。
FIG. 1 is a diagram showing a first embodiment of the present invention, and FIG.
The figure is a characteristic diagram of the light intensity distribution in the thickness direction of the printed board substrate material according to the present invention, FIG. 3 is a diagram showing the second embodiment of the present invention, and FIG. It is an explanatory view showing a modification. In Figures 1 to 4, 1 is a printed board;
2 is a substrate material, 3 is a plating layer, 3a is a defective part, 6 is a through hole, 7 and 8 are illumination light sources for defect detection,
14 and 15 are photodetectors.

Claims (1)

【特許請求の範囲】 1 プリント板の光透過性基板の所定位置に、内
壁面一面に導電層を形成したスルホール近傍の前
記光透過性基板への光の入射、及び該光透過性基
板への光の入射に応答してスルーホール欠陥表示
信号を出力するための系と、欠陥検出対象スルー
ホールとの位置付けを欠陥検出対象スルーホール
毎に為してスルーホールの欠陥検出を行なうスル
ーホール検査装置において、 前記光透過性基板への光の入射を前記プリント
板の両面から同時に為すための前記プリント板の
両面側に設けられた欠陥検出用照明光源と、 該両欠陥検出用照明光源から入射される各光の
欠陥検出対象スルーホールへの入射を遮蔽する遮
光手段とを設けたことを特徴とするプリント板の
スルーホール検査装置。
[Scope of Claims] 1. Incidence of light into the light transmissive substrate near the through-hole in which a conductive layer is formed on the entire inner wall surface of the light transmissive substrate at a predetermined position on the light transmissive substrate of the printed board; A system for outputting a through-hole defect indication signal in response to incident light, and a through-hole inspection device that detects defects in through-holes by positioning each through-hole to be detected as a defect. , a defect detection illumination light source provided on both sides of the printed board for simultaneously making light incident on the light-transmissive substrate from both sides of the printed board; and a defect detection illumination light source provided from both of the defect detection illumination light sources. A through-hole inspection apparatus for a printed circuit board, comprising a light shielding means for shielding each light beam from entering a through-hole to be detected for a defect.
JP22867682A 1982-11-30 1982-12-28 Through hole inspecting device for printed board Granted JPS59125695A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP22867682A JPS59125695A (en) 1982-12-28 1982-12-28 Through hole inspecting device for printed board
US06/554,543 US4560273A (en) 1982-11-30 1983-11-23 Method and apparatus for inspecting plated through holes in printed circuit boards
DE8383307291T DE3377527D1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards
EP83307291A EP0111404B1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22867682A JPS59125695A (en) 1982-12-28 1982-12-28 Through hole inspecting device for printed board

Publications (2)

Publication Number Publication Date
JPS59125695A JPS59125695A (en) 1984-07-20
JPH049252B2 true JPH049252B2 (en) 1992-02-19

Family

ID=16880061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22867682A Granted JPS59125695A (en) 1982-11-30 1982-12-28 Through hole inspecting device for printed board

Country Status (1)

Country Link
JP (1) JPS59125695A (en)

Also Published As

Publication number Publication date
JPS59125695A (en) 1984-07-20

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