JPS59125694A - Through hole inspecting device for printed board - Google Patents

Through hole inspecting device for printed board

Info

Publication number
JPS59125694A
JPS59125694A JP22867382A JP22867382A JPS59125694A JP S59125694 A JPS59125694 A JP S59125694A JP 22867382 A JP22867382 A JP 22867382A JP 22867382 A JP22867382 A JP 22867382A JP S59125694 A JPS59125694 A JP S59125694A
Authority
JP
Japan
Prior art keywords
hole
light
printed board
defect
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22867382A
Other languages
Japanese (ja)
Inventor
柿木 義一
三田 喜久夫
護俊 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP22867382A priority Critical patent/JPS59125694A/en
Priority to US06/554,543 priority patent/US4560273A/en
Priority to EP83307291A priority patent/EP0111404B1/en
Priority to DE8383307291T priority patent/DE3377527D1/en
Publication of JPS59125694A publication Critical patent/JPS59125694A/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 (1)1発明の技術分野 本発明はプリント板の基板材内に光を入射拡散サセ、ス
ルーホール欠陥部からスルーホール内に漏れる拡散光を
検知することで欠陥検出を行うプリント板のスルーホー
ル検査装置に関するものである。
Detailed Description of the Invention (1) 1 Technical Field of the Invention The present invention detects defects by inputting and diffusing light into the substrate material of a printed circuit board and detecting the diffused light leaking from the defective portion of the through hole into the through hole. This invention relates to a through-hole inspection device for printed circuit boards.

(2)、技術の背景 両面プリント板の表裏導体間の接続、あるいは多ノYプ
リント板の層間導体の接続VCは、スルーホールメッキ
法が広く用いられている。かかるスルーホールメンキ法
は、導体全積層した絶縁基板に予め孔あけ加工し、この
透孔内壁面に化学的あるいは電気的(Cメッキ層を生成
することで導体間を“電気的に接続するものであるが、
該メッキ層はミクロン単位の厚さであるとともに、透孔
内壁面の凹凸が激しく、かつ小径であるため、スルーホ
ールの生成メッキ層にピンホール、切れ目等の欠陥が生
じる場合が往々あり、そしてメッキ層の欠陥部が大きい
と、導体間の電気的導通の不良につなかっ、プリント板
の信頼性の上で大きな問題となる。従って、このような
スルーホールの欠陥を容易に〃・つ確実に検査できるこ
とが重重れでいる。
(2) Background of the Technology The through-hole plating method is widely used for connection between the front and back conductors of a double-sided printed board or for connection VC of interlayer conductors of a multi-node Y printed board. In this through-hole coating method, holes are pre-drilled in an insulating substrate on which all conductors are laminated, and a chemical or electrical (C plating layer is formed on the inner wall surface of the hole) to create an "electrical connection" between the conductors. Although it is a thing,
The plating layer has a thickness on the order of microns, the inner wall surface of the through hole is extremely uneven, and the diameter is small, so defects such as pinholes and cuts often occur in the plating layer that forms the through hole. Large defects in the plating layer lead to poor electrical continuity between conductors, which poses a major problem in terms of reliability of the printed board. Therefore, it is important to be able to easily and reliably inspect such through-hole defects.

(3)、従来技術と問題点 従来、プリント板のスルーホール検査方式としては、プ
リント板の片面から光源により照明し、これにより基板
材内に入射拡散された光がスルーホール欠陥部を通して
スルーホール内の透過した光を、プリント板の反対面に
設けた光検知器によシ検知することで欠陥の有無全検査
するようにしていた。
(3), Prior Art and Problems Conventionally, in the through-hole inspection method for printed circuit boards, one side of the printed board is illuminated by a light source, and the diffused light enters the board material and passes through the through-hole defects. By detecting the transmitted light using a photodetector installed on the opposite side of the printed board, the presence or absence of defects was fully inspected.

しかし、上記のような従来方式では、スルーホールに欠
陥部があるか合力・の判定は可能であるが、欠陥部がス
ルーホール内のどの位置に生じているのか判別できなか
った。
However, in the conventional method as described above, although it is possible to determine whether there is a defective portion in the through hole or not, it is not possible to determine where in the through hole the defective portion is located.

(4)0発明の目的 本発明は上記従来の問題全解決したもので、スルーホー
ル内の欠陥部の有無に加えて、欠陥部の位置をも検知で
きるようにしたプリント板のスルーホール検査装置を提
供することを目的とする。
(4) 0 Purpose of the Invention The present invention solves all of the above-mentioned conventional problems, and is a through-hole inspection device for printed circuit boards that is capable of detecting not only the presence or absence of a defective part in the through-hole, but also the position of the defective part. The purpose is to provide

(5)6発明の構成 上記目的を達成するために本発明のプリント板のスルー
ホール顎査装置は、プリント板の上下面力・らスルーホ
ールの外周部公金各別に照明する互いに波長の異なる照
明光源と、上記各照明光源から基板材内部に入射拡散さ
れた光がスルーホール内に漏れたときの双方の光及びそ
の量全各別に検知する光検知手段と、この両光検知手段
刀)らの光量に応じた信号に基づいてスルーホール内の
欠陥の位置を判別する回路手段とを備えてなるものであ
る。
(5) 6 Structure of the Invention In order to achieve the above object, the printed board through-hole jaw inspection device of the present invention provides illumination with mutually different wavelengths that illuminates the upper and lower surfaces of the printed board and the outer periphery of the through-hole separately. A light source, a light detection means for separately detecting both light and its amount when the light incident and diffused into the inside of the substrate material from each of the illumination light sources leaks into the through hole; and circuit means for determining the position of the defect within the through hole based on a signal corresponding to the amount of light.

(6)3発明の実施例 以下、本発明の実施例を図面に基づいて説明する。(6) Examples of three inventions Embodiments of the present invention will be described below based on the drawings.

第1図は不発明にかかるプリント板のスルーホール検査
装置の一例を示すもので、1は検査されるプリント板で
あシ、このプリント板1を構成する基板材2は、例えば
ガラス繊維にエポキシ樹脂を含浸させた光透過性の物質
からなり、そして、基板材2に穿設した透孔2aの内壁
にメッキ層3を生成することで表裏導体(ランド部)4
を電気的に接続するスルーポール5が形成されている。
FIG. 1 shows an example of a printed board through-hole inspection device according to the invention, in which 1 is a printed board to be inspected, and a substrate material 2 constituting this printed board 1 is made of, for example, glass fiber and epoxy. It is made of a light-transmissive material impregnated with resin, and a plated layer 3 is formed on the inner wall of a through hole 2a drilled in the substrate material 2, thereby forming a front and back conductor (land portion) 4.
A through pole 5 is formed to electrically connect the two.

このようにしたプリント板1の下面側には、スルーホー
ル5の下端開口をマスクするフィルタ6が配置されてお
ジ、このフィルタ6は特定波長の光、例えば青色の光の
みを透過するものである。捷た、上記フィルタ6の配置
側には、該フィルタ6を透〕υする光(例えば青色)と
、該フィルタ6を透過しない波長の光、例えば赤色の光
の双方を出す欠陥検出用の照明装置7が配設され、この
照明装置7からの照射光のうち、フィルタ6を透過する
・肯、色・の光はスルーホール5内に入射されてスルー
ホール位置検知用の光となるとともに、フィルタ6によ
ジ阻止されない赤の光はスルーホールの周囲部分全照明
する照明光として基板材2の裏面に照射される。8はプ
リント板1の上面側にあって、スルーホール5の周囲部
分に位置する基板材2の上面を照明する欠陥検出用の照
明光源で、この照明光源8は複数のものから成シ、そし
て上記照明装置7の照射光と異なる波長の光、例えば緑
色の光を出すものである。9は上記照明光源8で囲まれ
る中心部分にスルーホール5と対峙するよう配置した截
頭円錐筒状の遮光部材であり、この遮光部材9は照明光
源8からの照射光がスルーホール5内に入射するのを防
止するためのものである。10(はスルーホール5から
出射される光を集束するレンズであり、このレンズ10
の後段側光軸上には緑及び赤の光を透過し、青の光全反
射分離する色分離フィルタ11と、緑の光音透過し、赤
の色を反射分離する色分離フィルタ12が前後して配置
され、色分離フィルタ11の反射光軸上には青の光を検
出してスルーホール5の位置を検出する光検知器13が
設置されておシ、この光検知器13の光検知による出力
信号はコンパレーク14の一方の入力端に加えられ、コ
ンパレータ14の他方の入力端には基準電位Vrが加え
られている。また、上記色分離フィルタ120反射光軸
上VC,は赤色の光を検出することでスルーホール5内
の下部に欠陥があることを検知する光検知器15が設置
され、さらに色分離フィルタ12の透過光軸上には緑色
の光を検出することでスルーホール5内の上部に欠陥が
あることを検知する光検知器16が設置されておシ、そ
して各光検出器15.16の光検知による出力信号は各
別バッファアンプ17.18’e介してアナログ/デジ
タルコンバータ(以下A / Dコンバータと云う) 
19.20に加えられるようになっているとともに、こ
の両A、 / Dコンバーター9.20にはその出力信
号の大小関係を比較して欠陥の位tel k判別する比
較器2工が接続され、比較器2Jの出力信号は欠陥位置
表示部22に入力されるようになっている。また、上記
比較器21には上記コンパレータ14からの出力信号が
動作指令として与えらノ14、スルーホール5を検知し
たときのみ動作するものである。さらにまた、上記欠陥
位置表示部22には図示しないX−Yステージ制御手段
からステージ位置情報Sが加えられ七いる。
A filter 6 that masks the lower end opening of the through hole 5 is disposed on the lower surface side of the printed board 1, and this filter 6 only transmits light of a specific wavelength, for example, blue light. be. On the side where the filter 6 is disposed, there is a defect detection light that emits both light (e.g., blue) that passes through the filter 6 and light of a wavelength that does not pass through the filter 6 (e.g., red light). A device 7 is provided, and of the light emitted from the illumination device 7, the positive and colored light that passes through the filter 6 enters the through hole 5 and becomes light for detecting the through hole position. The red light that is not blocked by the filter 6 is irradiated onto the back surface of the substrate material 2 as illumination light that illuminates the entire surrounding area of the through hole. Reference numeral 8 denotes an illumination light source for defect detection, which is located on the upper surface side of the printed circuit board 1 and illuminates the upper surface of the substrate material 2 located around the through hole 5. It emits light of a different wavelength from the irradiation light of the illumination device 7, for example, green light. Reference numeral 9 denotes a truncated conical cylindrical light shielding member disposed in a central portion surrounded by the illumination light source 8 so as to face the through hole 5; this light shielding member 9 prevents the irradiated light from the illumination light source 8 from entering the through hole 5 This is to prevent it from entering. 10 (is a lens that focuses the light emitted from the through hole 5, and this lens 10
On the rear optical axis, there are a color separation filter 11 that transmits green and red light and separates the blue light by total reflection, and a color separation filter 12 that transmits the green light sound and reflects and separates the red color. A photodetector 13 is installed on the reflected optical axis of the color separation filter 11 to detect the position of the through hole 5 by detecting blue light. The output signal is applied to one input terminal of the comparator 14, and the reference potential Vr is applied to the other input terminal of the comparator 14. Further, a photodetector 15 is installed on the reflected optical axis of the color separation filter 120 to detect a defect in the lower part of the through hole 5 by detecting red light. A photodetector 16 is installed on the transmitted optical axis to detect a defect in the upper part of the through hole 5 by detecting green light. The output signals are sent through separate buffer amplifiers 17 and 18'e to analog/digital converters (hereinafter referred to as A/D converters).
19.20, and two comparators are connected to both A and /D converters 9.20, which compare the magnitudes of their output signals and determine the extent of defects. The output signal of the comparator 2J is input to the defect position display section 22. Further, the comparator 21 is provided with an output signal from the comparator 14 as an operation command, and operates only when the through hole 5 is detected. Furthermore, stage position information S is added to the defect position display section 22 from an X-Y stage control means (not shown).

次に上記のように構成された本実施例の動作について説
明する。
Next, the operation of this embodiment configured as described above will be explained.

警 プリント板1のスルーホール5の1つが図示しないX−
Yステージの動作で検査位置に割出された状態において
、照明装置7及び照明光源8からの赤、青及び緑の光が
プリント板1の上下両面に向は照射されると、基板利2
内に入射さね、た赤の光7a及び緑の光8aは基板(第
2内部で拡散きれる。ここで、基4fj、拐2の下面か
ら入射した赤の光7aは基板月内部に拡散されるが、こ
れによる基板材2内の厚さ方向の光量分布は、第2図の
実線lに示すように基板材20下面側が最も大きく、上
面側+fC行くにしたがり直線的に減少する特性を示し
、また、同様にして緑の光8aVこよる基板材2内の厚
さ方向の光量分布は、第2図の破線Hに示すように基板
材2の上面側が最も大きく、下面側に行くにしたがい直
線的に減少する特性を示す。
One of the through holes 5 of the printed board 1 has an X-
When the red, blue, and green lights from the illumination device 7 and the illumination light source 8 are irradiated onto both the upper and lower surfaces of the printed board 1 while the Y stage is indexed to the inspection position, the printed board 1 is
The red light 7a and green light 8a incident on the inside of the substrate (second interior) are diffused. However, the light intensity distribution in the thickness direction within the substrate material 2 due to this has the characteristic that it is largest on the lower surface side of the substrate material 20 and decreases linearly as it goes toward the upper surface side +fC, as shown by the solid line l in Fig. 2. Similarly, the light intensity distribution in the thickness direction within the substrate material 2 due to the green light 8aV is largest on the upper surface side of the substrate material 2, as shown by the broken line H in FIG. 2, and decreases toward the lower surface side. Therefore, it exhibits a linearly decreasing characteristic.

一方、フィルタ6を透過した青の光7bは、スルーホー
ル5が検査位置に割出されていれば、該スルーホール5
内を通過し、レンズ10により集光された後、色分離フ
ィルタ11によジ光検知器13方向に反射され、該青の
光を光検知器13によシミ負信号に変換し、かつこれ全
コンパレータエ4VC加えることにより、スルーポール
5が検査位置にあることを判定するとともに、コンパレ
ータエ4から信号を送出して比較?ユ21を作動状態に
セントする。
On the other hand, if the through hole 5 is indexed to the inspection position, the blue light 7b transmitted through the filter 6 will be transmitted through the through hole 5.
After passing through the blue light and being focused by the lens 10, it is reflected by the color separation filter 11 toward the blue light detector 13, and the light detector 13 converts the blue light into a negative signal. By adding 4 VC to all comparators, it is determined that the through pole 5 is at the inspection position, and a signal is sent from the comparator 4 for comparison. Set U21 to the operating state.

かかる状態において、検査位i岸に割出されたスルーホ
ール5の内壁下部に欠陥部3aがあったとすると、基板
材2内に入射拡散された赤及q緑の光は第2図に示す光
量分布特性■、Hに応じて下部欠陥部3aからスルーホ
ール5内に入射する。このうち赤の光はレンズエ0、色
分離フィルタエ1を透過した後色分離フィルタ12によ
り光検知器15方向に反射され、光検知器15に、lニ
ジ光量に応じた電気信号に変換され、かつバンファアン
プ17により増幅された後、A/Dコンバータ19によ
りディジタル信号に変換される。一方、緑の光はレンズ
10、色分離フィルタ11,1.2に透過した後、光検
知器工6により検知され、光量Vこ応じた電気信号に変
換されでバッファアンプ18全通しA/Dコンバータ2
0に加えられ、ディジタル量に変換される。
In such a state, if there is a defective part 3a in the lower part of the inner wall of the through hole 5 indexed at the inspection position i, the red and q green lights incident and diffused into the substrate material 2 will have the light intensity shown in FIG. The light enters the through hole 5 from the lower defective portion 3a according to the distribution characteristics (1) and (H). Among these, the red light passes through the lens element 0 and the color separation filter element 1, and then is reflected by the color separation filter 12 toward the photodetector 15, where it is converted into an electrical signal according to the amount of light, and After being amplified by the buffer amplifier 17, it is converted into a digital signal by the A/D converter 19. On the other hand, after the green light passes through the lens 10 and the color separation filters 11 and 1.2, it is detected by the photodetector 6 and converted into an electrical signal according to the light amount V, which is sent to the buffer amplifier 18 and sent through the A/D. converter 2
0 and converted to a digital quantity.

このとき、第2図の光量分布特性から明らかなように下
部欠陥部3aから漏れる光は赤の光の量の方が太きいた
め、A/Dコンバータ19から出力される信号Aの値が
A / Dコンバータ20から出力される信号Bの値よ
シ大きい。この結果、比較器2工は信号への方が信号B
工り太きいと判定して、その出力ラインLIK信号全送
出し、これを欠陥位置表示部22に加えるコトで、スル
ーホール5の下部に欠陥部3aがあることを表示する。
At this time, as is clear from the light intensity distribution characteristics shown in FIG. / larger than the value of signal B output from D converter 20. As a result, comparator 2 is more sensitive to signal B than it is to signal B.
It is determined that the hole is too thick, the entire LIK signal is sent out from the output line, and this signal is added to the defect position display section 22, thereby indicating that there is a defective portion 3a at the bottom of the through hole 5.

才だ、欠陥部3aがスルーホール4の内壁の上部にある
場合(は、欠陥部3a全通してスルーホール5内に入射
される光のうち、緑の光の量の方が太きいため、この光
量に応じてp、’/Dコンバータ19,20でディジタ
ル量に変換された信号A、Hの値はA<Bとなる。この
結果、比較器21がA<Bであると判定すると、その出
力ラインL2に信号が送出さrl、この信号を欠陥位置
表示F!1322に加えることでスルーホール5の内壁
上部に欠陥部3aがあることを表示する。
If the defective part 3a is located at the upper part of the inner wall of the through hole 4 (because the amount of green light is larger among the light that passes through the entire defective part 3a and enters the through hole 5, The values of the signals A and H converted into digital quantities by the p and '/D converters 19 and 20 according to this light intensity become A<B. As a result, when the comparator 21 determines that A<B, A signal rl is sent to the output line L2, and by adding this signal to the defect position display F!1322, it is indicated that there is a defective portion 3a on the upper part of the inner wall of the through hole 5.

さらKtた、欠陥部3aがスルーホール4の中間部にあ
る場合は、欠陥部3a全通してスルーホール5内に入射
される赤及び緑の光の量はほぼ同等となり、これに伴い
それぞれの光検知515.16で変換される信号レベル
はほぼ等しくなる。従って、これら両アナログ信号がそ
れぞれのA/Dコンバーター9.20によシディジタル
量に変換された後、比較器21Vこ加えられると、該比
較器21idA=Bと判定し、その出力ラインL3に信
号を送出すると同時に、欠陥位置表示部22に、スルー
ホール5の中間部に欠陥部3aがあることを表示するこ
とになる。
Furthermore, when the defective part 3a is located in the middle of the through hole 4, the amounts of red and green light that pass through the defective part 3a and enter the through hole 5 are almost equal, and accordingly The signal levels converted by the photodetectors 515.16 are approximately equal. Therefore, when both of these analog signals are converted into digital quantities by the respective A/D converters 9 and 20 and then applied to the comparator 21 V, the comparator 21 determines that idA=B and outputs the output line L3. At the same time as the signal is sent out, the defect position display section 22 displays that the defective portion 3a is located in the middle of the through hole 5.

従って、上記構成の本実施例によれば、スルーホールの
欠陥の有無に加えて、欠陥の発生位置をも検知すること
ができる。
Therefore, according to this embodiment having the above-mentioned configuration, it is possible to detect not only the presence or absence of a through-hole defect but also the position where the defect occurs.

龜 なお、本発明における欠陥位置の判定手段は上記実施例
に示す回路方式のものに限定されないことは勿論でちる
Note that it goes without saying that the means for determining the defect position in the present invention is not limited to the circuit system shown in the above embodiment.

(7)1発明の詳細 な説明した通り、本発明によれば、プリント板のスルー
ホールに対応した上下面全波長の異なる照明光により照
明し、この照明光が基板材内部を通してスルーホール内
に漏れたときの光量差全検知するようにしたものである
から、スルーホール内の欠陥部の有無に加えて、欠陥部
の位置をも検知できる。
(7) As described in detail in 1 of the invention, according to the present invention, the upper and lower surfaces corresponding to the through holes of the printed board are illuminated with illumination light having different wavelengths, and this illumination light passes through the inside of the board material and enters the through holes. Since it is designed to detect the entire difference in the amount of light when it leaks, it is possible to detect not only the presence or absence of a defective part within the through-hole, but also the position of the defective part.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明にががるプリント板のスルーホール検査
装置の一実施例を示す構成図、第2図は本発明における
プリント板基板材の厚さ方向の光量分布特性図である。 符号の説明 1はプリン)ffl、2は基板材、3はメッキ層、3a
li欠陥部、5はスルーホール、6はフィルタ、7は照
明装置、8は照明光源、1oけレンズ、11.12は色
分離フィルタ、13はスルーホール位置検出用の光検出
器、14はコンパレータ、15は下部欠陥検出用光検出
器、16は上部欠陥検出月光検出器、19.20はA/
Dコンバータ、21は比較器、22は欠陥位置表示部で
ある。 特許出願人 富士通株式会社
FIG. 1 is a block diagram showing an embodiment of a printed board through-hole inspection apparatus according to the present invention, and FIG. 2 is a characteristic diagram of light quantity distribution in the thickness direction of a printed board substrate material according to the present invention. Explanation of the symbols 1 is pudding)ffl, 2 is the substrate material, 3 is the plating layer, 3a
li defect part, 5 is a through hole, 6 is a filter, 7 is an illumination device, 8 is an illumination light source, 1o lens, 11.12 is a color separation filter, 13 is a photodetector for detecting the position of the through hole, 14 is a comparator , 15 is a lower defect detection photodetector, 16 is an upper defect detection moonlight detector, 19.20 is A/
A D converter, 21 a comparator, and 22 a defect position display section. Patent applicant Fujitsu Limited

Claims (1)

【特許請求の範囲】[Claims] プリント板の上下面からスルーホールの外周部分を各別
に照明する互いに波長の異なる照明光源と、上記各照明
光源から基板材内部に入射拡散された光がスルーホール
内に漏れたときの双方の光及びその量を各別に検知する
光検知手段と、この両党検知手段からの光量に応じた信
号に基づいてスルーホール内の欠陥の位置全判別する回
路手段とを備えてなるプリント板のスルーホール検査装
置。
Illumination light sources with different wavelengths that separately illuminate the outer circumference of the through hole from the top and bottom surfaces of the printed board, and both lights when the light that is incident and diffused into the board material from each of the above illumination light sources leaks into the through hole. A through-hole in a printed board, comprising a light detection means for detecting the amount of light and a light amount separately, and a circuit means for determining the entire position of a defect in the through-hole based on a signal corresponding to the light amount from the light detection means. Inspection equipment.
JP22867382A 1982-11-30 1982-12-28 Through hole inspecting device for printed board Pending JPS59125694A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP22867382A JPS59125694A (en) 1982-12-28 1982-12-28 Through hole inspecting device for printed board
US06/554,543 US4560273A (en) 1982-11-30 1983-11-23 Method and apparatus for inspecting plated through holes in printed circuit boards
EP83307291A EP0111404B1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards
DE8383307291T DE3377527D1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22867382A JPS59125694A (en) 1982-12-28 1982-12-28 Through hole inspecting device for printed board

Publications (1)

Publication Number Publication Date
JPS59125694A true JPS59125694A (en) 1984-07-20

Family

ID=16880015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22867382A Pending JPS59125694A (en) 1982-11-30 1982-12-28 Through hole inspecting device for printed board

Country Status (1)

Country Link
JP (1) JPS59125694A (en)

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