JPS6375544A - Through hole inspection device - Google Patents

Through hole inspection device

Info

Publication number
JPS6375544A
JPS6375544A JP21818686A JP21818686A JPS6375544A JP S6375544 A JPS6375544 A JP S6375544A JP 21818686 A JP21818686 A JP 21818686A JP 21818686 A JP21818686 A JP 21818686A JP S6375544 A JPS6375544 A JP S6375544A
Authority
JP
Japan
Prior art keywords
hole
lens
light
shielding body
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21818686A
Other languages
Japanese (ja)
Inventor
Kikuo Mita
三田 喜久夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP21818686A priority Critical patent/JPS6375544A/en
Publication of JPS6375544A publication Critical patent/JPS6375544A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95692Patterns showing hole parts, e.g. honeycomb filtering structures

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To improve defect detecting ability with a simple constitution by providing a lens with a shielding body which shields unnecessary light leaking from a gap formed at a part where the opening part of a through hole is shielded. CONSTITUTION:This inspection device is provided with a lens 1 for image formation, photodetectors 2 and 3 arranged on the image formation surface of the lens 1, and AND gate 5 and a light source which are connected from the detector 2 directly and from the detector 3 through a delay circuit 4, a mask 6 for shielding the through hole, etc. Further, the lens 1 is provided with the shielding body 11. This shielding body 11 is made beltlike in the same direction with the mask so as to prevent light from entering the lens 1 at a specific angle so that the light leaking from the gap between the through hole 8 and mask 6 does not reach the detector 2. Then the light leaking from the gap between the mask 6 and through hole 8 is shielded by the shielding body 11, so it never reaches the detector 2. Light leaking from a defect, on the other hand, tends to be intense in a slanting direction and almost all of components are image-formed on the detector 2 without being shielded by the shielding body 11.

Description

【発明の詳細な説明】 〔概 要〕 プリント板のスルーホールの一方の開口部を遮蔽してお
き、該プリント板の基材に光を当ててスルーホールの欠
陥部から漏れ出る光をレンズ及び光検知器からな゛る光
学系で検出するスルーホール検査装置であって、上記レ
ンズに前記スルーホールの遮蔽した開口部から漏れた不
要な光が光検知器に到達しない様にレンズの一部に遮蔽
体を設けることにより欠陥検出能力の向上を可能とする
[Detailed Description of the Invention] [Summary] One opening of a through hole in a printed board is shielded, light is applied to the base material of the printed board, and the light leaking from the defective part of the through hole is blocked by a lens and a This is a through-hole inspection device that detects with an optical system consisting of a photodetector, and the lens includes a part of the lens to prevent unnecessary light leaking from the shielded opening of the through-hole from reaching the photodetector. By providing a shield to the surface, it is possible to improve the defect detection ability.

〔産業上の利用分野〕[Industrial application field]

本発明は通信装置、電子計算装置等の電子装置に用いら
れるプリント板のスルーホールの欠陥を検出するための
スルーホール検査装置に関するものである。
The present invention relates to a through-hole inspection device for detecting defects in through-holes in printed circuit boards used in electronic devices such as communication devices and electronic computing devices.

電子計算機等各種装置に用いられるプリンI−基板には
多数のスルーホールが形成され、そのスルーホールには
導電手段を与えるメッキが施工されている。これらのメ
ッキは必ずしも良好な状態で形成されているとは限らず
、その検査をする必要性がある。
A large number of through holes are formed in printed circuit boards used in various devices such as electronic computers, and the through holes are plated to provide conductive means. These platings are not necessarily formed in good condition, and it is necessary to inspect them.

従来の検査手段は次のような2つの手段がある。There are two conventional inspection methods as follows.

その1つは人手による目視検査であるが、これはスルー
ホールの径が数百μm程度に極細になって来たり、基板
の厚さがスルーホール径の20〜30倍の厚さになって
来ると、その検査が困難になってしまうという検査上好
ましくない欠点を有する。
One of them is manual visual inspection, but this is difficult because the diameter of the through hole has become extremely thin, around several hundred μm, or the thickness of the board has become 20 to 30 times the diameter of the through hole. If this happens, the inspection becomes difficult, which is an undesirable drawback in terms of inspection.

又、他の1つはスルーホールのメッキ部に通電してその
導通を検査する如きものである。この手段はメッキ部の
一部に不良部分があってもその欠陥を検出し得す、又時
間もか\す、装置がコスト高になるという欠点を有する
。このため次に述べる如きスルーホール検査装置が開発
されている。
Another method is to apply electricity to the plated portion of the through hole to check its continuity. This method has the disadvantage that even if there is a defective part in a part of the plated part, the defect cannot be detected, and that it is time consuming and increases the cost of the apparatus. For this reason, a through-hole inspection device as described below has been developed.

〔従来の技術〕[Conventional technology]

従来のスルーホール欠陥検査装置を第4図に示す。これ
は結像用のレンズlと、光検知器2及び3と、遅延回路
4とANDゲート5と、図示なきプリント板送り装置及
び光源と、ローラ状のマスク6とを具備し、光検知器2
及び3はある距離を離してレンズ1の結像面に配置され
、その検知器2の出力は直接ANDゲート5へ、検知器
3の出力は遅延回路4を介してANDゲート5へそれぞ
れ接続されている。なお光検知器3はプリント板7を矢
印方向に移動したときスルーホール8が点線で示す位置
aにあるときの該スルーホールからの光を受光し、光検
知器2は実線で示す位置すにあるときのスルーホールか
らの光を受光できるようになっている。また遅延回路4
の遅延時間はスルーホールがaの位置からbの位置へ移
動する時間と同じにしである。
A conventional through-hole defect inspection device is shown in FIG. This includes an imaging lens l, photodetectors 2 and 3, a delay circuit 4, an AND gate 5, a printed board feeding device and a light source (not shown), and a roller-shaped mask 6. 2
and 3 are arranged at a certain distance on the imaging plane of the lens 1, and the output of the detector 2 is directly connected to the AND gate 5, and the output of the detector 3 is connected to the AND gate 5 via the delay circuit 4. ing. Note that when the printed board 7 is moved in the direction of the arrow, the photodetector 3 receives the light from the through hole 8 when it is at the position a shown by the dotted line, and the photodetector 2 receives the light from the through hole 8 at the position a shown by the solid line. It is designed to be able to receive light from a through hole. Also, delay circuit 4
The delay time is the same as the time it takes for the through hole to move from position a to position b.

そしてスルーホールの欠陥を検査するときは、プリント
板7を矢印方向に一定速度で移動させながら下方から光
9を照射する。そしてスルーホール8がa位置にあると
きのスルーホールを通過した光を光検知器3で受光し、
スルーホール8がb位置に来たときマスク6がスルーホ
ールの一方の開口部を遮蔽する。従ってスルーホールに
欠陥がないときは光検知器2は受光せずANDゲート5
からの出力は“L”で欠陥がないことを示す。もしスル
ーホール8に欠陥があればプリント板7の基材(エポキ
シ樹脂等で透光性があり、且つ内部で光を散乱させる)
に入射した光が欠陥10から漏れ、その光が光検知器2
で検出されANDゲート5より“H”が出力され欠陥の
あることを示す。
When inspecting the through holes for defects, the printed board 7 is moved at a constant speed in the direction of the arrow while the light 9 is irradiated from below. Then, when the through hole 8 is at position a, the light passing through the through hole is received by the photodetector 3,
When the through hole 8 comes to position b, the mask 6 covers one opening of the through hole. Therefore, when there is no defect in the through hole, the photodetector 2 does not receive light and the AND gate 5
The output from is "L" indicating that there are no defects. If there is a defect in the through hole 8, the base material of the printed board 7 (epoxy resin or the like is transparent and scatters light internally)
The incident light leaks from the defect 10, and the light is transmitted to the photodetector 2.
is detected, and "H" is output from the AND gate 5, indicating that there is a defect.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上記従来のスルーホール検査装置では、スルーホールの
照明側開口部に設けた遮蔽マスク6とスルーホール8と
の間に生ずるすき間から不要な光が漏れ、欠陥と誤認さ
れるという欠点があった。
The above-mentioned conventional through-hole inspection apparatus has a drawback that unnecessary light leaks from the gap created between the shielding mask 6 provided at the illumination side opening of the through-hole and the through-hole 8, and is mistakenly recognized as a defect.

本発明はこのような点に鑑みて案出されたもので、簡易
な構成で欠陥検出能力を向上したスルーホール検査装置
を提供することを目的としている。
The present invention was devised in view of these points, and an object of the present invention is to provide a through-hole inspection device with a simple configuration and improved defect detection ability.

〔問題点を解決するための手段〕[Means for solving problems]

このため本発明においては、プリント板7のスルーホー
ル8の一方の開口部を遮蔽しておき、該プリント板7の
基材に光9を当ててスルーホール8の欠陥部10から漏
れ出る光を、レンズ1及び該レンズの結像面に配置した
光検知器2からなる光学系で検出してスルーホールの欠
陥検査を行う装置において、上記スルーホール8の開口
部を遮蔽した部分に生ずるすき間から漏れた光が前記光
検知器2に到達しないように、特定の角度から前記レン
ズ1に入射する光を遮ぎる遮蔽体11をレンズ1の一部
に設けたことを特徴としている。
Therefore, in the present invention, one opening of the through hole 8 of the printed board 7 is shielded, and the light 9 is applied to the base material of the printed board 7 to prevent the light leaking from the defective part 10 of the through hole 8. , in a device that performs defect inspection of through holes by detecting them with an optical system consisting of a lens 1 and a photodetector 2 placed on the imaging surface of the lens, from the gap that occurs in the part where the opening of the through hole 8 is shielded. The lens 1 is characterized in that a shielding body 11 is provided in a part of the lens 1 to block light entering the lens 1 from a specific angle so that leaked light does not reach the photodetector 2.

〔作 用〕[For production]

スルーホール8の開口部を遮蔽した部分に生ずるすき間
から漏れた不要な光を遮ぎる遮蔽体11をレンズ1に設
けることにより、光検知器2にはスルーホールの欠陥部
以外からの不要な光が入射しないため、S/N比が大と
なり、欠陥検出能力の向上が可能となる。
By providing the lens 1 with a shielding body 11 that blocks unnecessary light leaking from the gap that occurs in the part where the opening of the through hole 8 is shielded, the photodetector 2 can prevent unnecessary light from leaking from other than the defective part of the through hole. Since no particles are incident, the S/N ratio becomes large, and defect detection ability can be improved.

〔実施例〕〔Example〕

第1図は本発明の実施例を示す図である。 FIG. 1 is a diagram showing an embodiment of the present invention.

本実施例は、結像用レンズ1、該レンズの結像面に配置
された光検知器2及び3、光検知器2から直接、及び光
検知器3から遅延回路4を介して接続されたANDゲー
ト5、図示なきプリント板送り装置及び光源、スルーホ
ール遮蔽用のマスク6等を具備することは第4図で説明
した従来例と同様であり、本実施例の要点は、レンズ1
に遮蔽体11を設けたことである。この遮蔽体11ばス
ルーホール8とマスク6とのすきまから漏れる光が光検
知器2に到達しないようにするため、特定の角度からの
光がレンズ1に入らないように図の如くマスク6と同方
向の帯状としている。なお前記特定角度とは、第2図に
おいて、はぼ、スルーホール8の長さ方向の中心と開口
部の縁部を結ぶ線が挾む角度θである。
In this embodiment, an imaging lens 1, photodetectors 2 and 3 arranged on the imaging surface of the lens, and a photodetector 2 connected directly to the photodetector 3 and a delay circuit 4 connected to the photodetector 3 are connected. It is the same as the conventional example explained in FIG.
The reason is that the shielding body 11 is provided in the. In order to prevent light leaking from the gap between the through hole 8 and the mask 6 from reaching the photodetector 2, the shield 11 is fitted with a mask 6 as shown in the figure to prevent light from a specific angle from entering the lens 1. They are shaped like strips in the same direction. In FIG. 2, the specific angle is the angle θ between the lines connecting the longitudinal center of the through hole 8 and the edge of the opening.

このように構成された本実施例は、第4図の従来例で説
明したと同様の作用によってスルーボール8の欠陥を検
出することができるが、そのとき、第2図に示すように
マスク6とスルーホール8とのすきまから漏れ出た光は
遮蔽体IIによって遮ぎられるため光検知器2には到達
しない。他方、欠陥から漏れる光は、より傾いた方向に
強く出る性質があり、はとんどの成分は遮蔽体11に遮
ぎられることなく光検知器2上に結像される。従ってノ
イズ光が抑制され、信号のS/Nが高められるため欠陥
検出能力は向上する。
This embodiment configured as described above can detect defects in the through ball 8 by the same effect as explained in the conventional example shown in FIG. The light leaking from the gap between the through hole 8 and the through hole 8 is blocked by the shielding body II, and therefore does not reach the photodetector 2. On the other hand, the light leaking from the defect has a property of being strongly emitted in a more inclined direction, and most of the components are imaged on the photodetector 2 without being blocked by the shielding body 11. Therefore, noise light is suppressed and the signal-to-noise ratio is increased, so that the defect detection ability is improved.

第3図は本発明の他の実施例を説明するための図であり
、同図において第1図と同一部分は同一符号を付して示
した。
FIG. 3 is a diagram for explaining another embodiment of the present invention, in which the same parts as in FIG. 1 are denoted by the same reference numerals.

本実施例が前実施例と異なるところは、遮蔽体11の形
状を前実施例の遮蔽体11の幅Wを直径とする円板状に
したことである。
This embodiment differs from the previous embodiment in that the shape of the shield 11 is a disk whose diameter is the width W of the shield 11 of the previous embodiment.

本実施例によれば、スルーホール8と遮i体11の位置
を合わせることによりライン方向に広がった漏光(欠陥
からの)も遮ぎることなく検出することができるため、
さらにS/N比が大となり欠陥検出能力は向上する。
According to this embodiment, by aligning the through hole 8 and the shielding body 11, leakage light (from defects) that spreads in the line direction can be detected without being blocked.
Furthermore, the S/N ratio becomes larger and the defect detection ability improves.

〔発明の効果〕〔Effect of the invention〕

以上述べてきたように本発明によれば、スルーホール欠
陥検出装置のレンズの一部に遮蔽体を設L:t S /
 N比を向上することにより欠陥検出能力を向上でき、
実用的には極めて有用である。
As described above, according to the present invention, a shielding body is provided in a part of the lens of the through-hole defect detection device L:t S /
By improving the N ratio, defect detection ability can be improved,
It is extremely useful in practical terms.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例を示す図、 第2図は本発明の実施例の動作を説明するための図、 第3図は本発明の他の実施例を示す図、第4図は従来の
スルーホール検査装置を示す図である。 第1図、第2図、第3図において、 1はレンズ、 2.3は光検知器、 4は遅延回路、 5はANDゲート、 6はマスク、 7・・・プリント板、 8はスルーホール、 9は光、 10はスルーホールの欠陥、 11は遮蔽体である。
Fig. 1 is a diagram showing an embodiment of the present invention, Fig. 2 is a diagram for explaining the operation of the embodiment of the present invention, Fig. 3 is a diagram showing another embodiment of the invention, and Fig. 4 is a diagram showing an embodiment of the present invention. FIG. 1 is a diagram showing a conventional through-hole inspection device. In Figures 1, 2 and 3, 1 is a lens, 2.3 is a photodetector, 4 is a delay circuit, 5 is an AND gate, 6 is a mask, 7... printed board, 8 is a through hole , 9 is a light, 10 is a through-hole defect, and 11 is a shield.

Claims (1)

【特許請求の範囲】 1、プリント板(7)のスルーホール(8)の一方の開
口部を遮断しておき、該プリント板の(7)の基材に光
(9)を当ててスルーホール(8)の欠陥部(10)か
ら漏れ出る光を、レンズ(1)及び該レンズの結像面に
配置した光検知器(2)からなる光学系で検出してスル
ーホールの欠陥検査を行う装置において、 上記スルーホール(8)の開口部を遮蔽した部分に生ず
るすき間から漏れた光が前記光検知器(2)に到達しな
いように、特定の角度から前記レンズ(1)に入射する
光を遮ぎる遮蔽体(11)をレンズ(1)の一部に設け
たことを特徴とするスルーホール検査装置。
[Claims] 1. One opening of the through hole (8) of the printed board (7) is blocked, and light (9) is applied to the base material (7) of the printed board to open the through hole. The through-hole defect is inspected by detecting the light leaking from the defective part (10) of (8) with an optical system consisting of a lens (1) and a photodetector (2) placed on the imaging plane of the lens. In the device, the light enters the lens (1) from a specific angle so that the light leaking from the gap created in the portion where the opening of the through hole (8) is shielded does not reach the photodetector (2). A through-hole inspection device characterized in that a shield (11) is provided as a part of a lens (1).
JP21818686A 1986-09-18 1986-09-18 Through hole inspection device Pending JPS6375544A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21818686A JPS6375544A (en) 1986-09-18 1986-09-18 Through hole inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21818686A JPS6375544A (en) 1986-09-18 1986-09-18 Through hole inspection device

Publications (1)

Publication Number Publication Date
JPS6375544A true JPS6375544A (en) 1988-04-05

Family

ID=16715960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21818686A Pending JPS6375544A (en) 1986-09-18 1986-09-18 Through hole inspection device

Country Status (1)

Country Link
JP (1) JPS6375544A (en)

Similar Documents

Publication Publication Date Title
KR940002503B1 (en) Soldering appearance inspection apparatus
JPS6375544A (en) Through hole inspection device
JPH0447782B2 (en)
Ando et al. Automatic optical inspection of plated through-holes for ultrahigh density printed wiring boards
Ando et al. Automatic opitcal through hole inspection method for printed wiring boards using leakage light detection
JPH02122246A (en) Through hole inspecting device for printed wiring board
JP2503201B2 (en) Through-hole inspection device
JPS6145955A (en) Inspecting method of through hole
JPH0340333B2 (en)
JPS5970947A (en) Method for detecting pattern of printed-wiring board
JPS6221045A (en) Through hole inspector
JPS62299747A (en) Inspecting instrument for through-hole
JPS6010156A (en) Through-hole inspecting apparatus
JPS6085308A (en) Through-hole-defect checking method
JPS637602B2 (en)
JPS6010158A (en) Through-hole defect inspecting apparatus
JPH02278105A (en) Inspecting apparatus for soldering
JPH0332731B2 (en)
JPH0263185B2 (en)
JPS6010157A (en) Through-hole inspecting apparatus
JPS63122229A (en) Inspecting device for pattern of thick film ic
JPS6426104A (en) Appearance inspecting device for semiconductor device
JPH0511001A (en) Inspecting method for wiring board
JPS6010155A (en) Through-hole inspecting apparatus
JPS61126405A (en) Position inspecting device