JPH0332731B2 - - Google Patents

Info

Publication number
JPH0332731B2
JPH0332731B2 JP22837682A JP22837682A JPH0332731B2 JP H0332731 B2 JPH0332731 B2 JP H0332731B2 JP 22837682 A JP22837682 A JP 22837682A JP 22837682 A JP22837682 A JP 22837682A JP H0332731 B2 JPH0332731 B2 JP H0332731B2
Authority
JP
Japan
Prior art keywords
hole
printed board
light
rotating body
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22837682A
Other languages
Japanese (ja)
Other versions
JPS59126235A (en
Inventor
Moritoshi Ando
Kikuo Mita
Giichi Kakigi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP22837682A priority Critical patent/JPS59126235A/en
Priority to US06/554,543 priority patent/US4560273A/en
Priority to DE8383307291T priority patent/DE3377527D1/en
Priority to EP83307291A priority patent/EP0111404B1/en
Publication of JPS59126235A publication Critical patent/JPS59126235A/en
Publication of JPH0332731B2 publication Critical patent/JPH0332731B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95692Patterns showing hole parts, e.g. honeycomb filtering structures

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Description

【発明の詳細な説明】 〔概要〕 スルーホールの遮光方式の改良に関し、 プリント板のスルーホール遮光のための前処理
を不要とすることを目的とし、 プリント板を該プリント板の一側に設けた検査
用光源により照明したとき光透過性絶縁基板内を
拡散する拡散光がスルーホール内に漏れたことを
前記プリント板の他側に前記検査用光源と所定の
位置関係を保つて設けた光検知器で感知してスル
ーホールの欠陥を検出するスルーホール検査装置
において、前記プリント板の一側に、回転体面を
前記プリント板の一側面に圧接せしめられてお
り、前記プリント板との間の相対的移動と共に前
記回転体面の移動を生ぜしめられる回転体機構を
配設し、前記回転体面のスルーホールへの密着嵌
合で当該スルーホールを遮光するようにして構成
した。
[Detailed Description of the Invention] [Summary] Regarding the improvement of the through-hole light shielding method, the present invention aims to eliminate the need for pre-treatment for through-hole light shielding of a printed board, and a printed board is provided on one side of the printed board. A light provided on the other side of the printed board in a predetermined positional relationship with the inspection light source is used to detect that the diffused light that diffuses inside the light-transmissive insulating substrate leaks into the through hole when illuminated by the inspection light source. In a through-hole inspection device that detects defects in through-holes by sensing them with a detector, a surface of a rotating body is pressed against one side of the printed board, and there is a gap between the printed board and the printed board. A rotating body mechanism is provided that causes the rotating body surface to move with relative movement, and the rotating body surface is tightly fitted into the through hole to shield the through hole from light.

〔産業上の利用分野〕[Industrial application field]

本発明はプリント板のスルーホール検査装置に
関し、特にスルーホールの遮光方式の改良に関す
るものである。
The present invention relates to a through-hole inspection device for printed circuit boards, and more particularly to an improvement in a light shielding method for through-holes.

両面プリント板の表裏導体の接続、あるいは多
層プリント板の層間導体の接続には、スルーホー
ルメツキ法が広く用いられている。かかるスルー
ホールメツキ法は、導体を積層した絶縁基板に予
め孔あけ加工し、この透孔内壁面に化学的あるい
は電気的にメツキ層を形成することで導体間を電
気的に接続するものであるが、該メツキ層はミク
ロン単位の厚さであるとともに、透孔内壁面の凹
凸が激しく、かつ小径であるため、スルーホール
の形成メツキ層にピンホール、切れ目等の欠陥が
生じる場合が往々あり、そしてメツキ層の欠陥部
が大きいと、導体間の電気的導通の不良につなが
り、プリント板の信頼性の上で大きな問題とな
る。従つて、このようなスルーホールの欠陥を容
易にかつ確実に検査できることが望まれている。
Through-hole plating is widely used to connect front and back conductors of double-sided printed boards or to connect interlayer conductors of multilayer printed boards. In this through-hole plating method, holes are pre-drilled in an insulating substrate on which conductors are laminated, and a plating layer is chemically or electrically formed on the inner wall of the through-hole to electrically connect the conductors. However, since the plating layer has a thickness on the order of microns, the inner wall surface of the through hole is extremely uneven, and the diameter is small, defects such as pinholes and cuts often occur in the plating layer forming the through hole. If the defects in the plating layer are large, this leads to poor electrical continuity between the conductors, which poses a major problem in terms of the reliability of the printed board. Therefore, it is desired that defects in such through holes can be easily and reliably inspected.

〔従来の技術〕[Conventional technology]

従来、スルーホールの欠陥検査には、プリント
板の一面にスルーホール部を遮光するマスクを密
着させ、これによりプリント板のマスク密着面に
向けて照射される検査用光源からの光がスルーホ
ール内に入射されないようにしていた。
Conventionally, through-hole defect inspection involves attaching a mask that shields the through-hole from light to one side of the printed circuit board, which allows the light from the inspection light source that is directed toward the surface of the printed board that is in contact with the mask to enter the through-hole. I was trying to prevent it from entering.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかし、このようなスルーホール遮光方式で
は、プリント板に対するマスクの位置合せが必要
となり、このため、スルーホール検査に際しての
前準備が煩雑で検査作業能率に影響を及ぼす欠点
があつた。
However, such a through-hole light shielding method requires alignment of the mask with respect to the printed board, and therefore has the disadvantage that preparations for through-hole inspection are complicated and affect the efficiency of inspection work.

本発明は上記従来の欠点を解決したもので、従
来のようなスルーホール遮光のための前準備を不
要とし、かつ検査の高速及び作業能率の向上を図
り、併せてスルーホールのピツチ及び大きさ等に
関係なく利用できるようにしたプリント板のスル
ーホール検査装置を提供することを目的とする。
The present invention solves the above-mentioned conventional drawbacks, and eliminates the need for prior preparation for through-hole light shielding as in the prior art, and improves inspection speed and work efficiency. It is an object of the present invention to provide a through-hole inspection device for a printed board that can be used regardless of the circumstances.

〔課題を解決するための手段〕[Means to solve the problem]

本発明は、プリント板を該プリント板の一側に
設けた検査用光源により照明したとき光透過性絶
縁基板内を拡散する拡散光がスルーホール内に漏
れたことを前記プリント板の他側に前記検査用光
源と所定の位置関係を保つて設けた光検知器で感
知してスルーホールの欠陥を検出するスルーホー
ル検査装置の前記プリント板の一側に、回転体機
構を設けて前記回転体面のスルーホールへの密着
嵌合で当該スルーホールを遮光するようにして構
成される。その回転体機構は回転体面を前記プリ
ント板の一側面に圧接せしめられており、前記プ
リント板との間の相対的移動と共に前記回転体面
の移動を生ぜしめられるように構成して成る。
The present invention provides a method for detecting that when a printed board is illuminated by an inspection light source provided on one side of the printed board, diffused light diffused within a light-transmissive insulating substrate leaks into a through hole on the other side of the printed board. A rotating body mechanism is provided on one side of the printed board of the through-hole inspection device that detects defects in the through-hole by sensing with a photodetector provided in a predetermined positional relationship with the inspection light source, and detects defects on the rotating body surface. The through-hole is configured to be tightly fitted into the through-hole to shield the through-hole from light. The rotating body mechanism has a rotating body surface pressed against one side of the printed board, and is configured to cause relative movement between the rotating body surface and the printed board and movement of the rotating body surface.

〔作用〕[Effect]

プリント板と回転体機構との相対的移動が生ぜ
しめられて回転体機構の回転体面がスルーホール
以外のプリント板面へ圧接されている時に、検査
対象スルーホールを通過した検査用光源の光を光
検知器で検出することにより、当該スルーホール
位置検出信号が得られる。
When the rotating body surface of the rotating body mechanism is pressed against the surface of the printed board other than the through hole due to relative movement between the printed board and the rotating body mechanism, the light from the inspection light source that has passed through the through hole to be inspected is By detecting with a photodetector, the through-hole position detection signal can be obtained.

その後に、前記相対的移動が進んで前記回転体
面が前記検査対象スルーホールに密着嵌合してこ
れを遮光したときに当該スルーホール内へ漏れ込
む前記検査用光源の光があるか否かを前記光検知
器で検出する。このとき該光検知器からその有無
を表わす信号が出力される。
After that, when the relative movement progresses and the surface of the rotating body closely fits into the through hole to be inspected and blocks light, it is determined whether or not there is light from the inspection light source leaking into the through hole. Detected by the photodetector. At this time, the photodetector outputs a signal indicating its presence or absence.

この有無を表わす信号と前記スルーホール位置
検出信号とから前記検査対象スルーホールに欠陥
があるか否かの表示信号を出力する。
Based on the signal representing the presence or absence of the through hole and the through hole position detection signal, a signal indicating whether or not there is a defect in the through hole to be inspected is output.

このようなスルーホールの欠陥検査におけるス
ルーホール遮光に、従来のような前処理は、本発
明においては必要でなくなる。
The present invention does not require the conventional pretreatment for through-hole light shielding in such through-hole defect inspection.

〔実施例〕〔Example〕

第1図及び第2図は本発明にかかるスルーホー
ル検査装置の一実施例を示すもので、1は検査さ
れるプリント板であり、このプリント板1を構成
する基板材2は、例えばガラス繊維にエポキシ樹
脂を含浸させた光透過性の物質から成り、そして
この基板材2に穿設した透孔2aの内壁にメツキ
層3を形成することで表裏導体を電気的に接続す
るスルーホール4を設けている。
1 and 2 show an embodiment of the through-hole inspection device according to the present invention, 1 is a printed board to be inspected, and the substrate material 2 constituting this printed board 1 is made of glass fiber, for example. The substrate material 2 is made of a light-transmitting material impregnated with epoxy resin, and a plating layer 3 is formed on the inner wall of the through hole 2a drilled in the substrate material 2, thereby forming a through hole 4 for electrically connecting the front and back conductors. It is set up.

このようにしたプリンタ板1の一側面には、図
示しない欠陥検査用光源からの光5が照射される
ようになつているとともに、プリント板1の照明
側にはスルーホール遮光用のロール状回転体6が
配置され、この回転体6は第2図に示す如く複数
個のスルーホール4を同時に遮光する長さを有
し、そして、その支持軸7の両端は、固定部に回
動可能に取付けたアーム8により支持され、この
アーム8と固定部間に引張ばね9を張架すること
により前記回転体6をプリント板1の光照射面に
圧接せしめられるようになつている。また、前記
プリント板1は図示しないX−Yステージ上にセ
ツトされるものであり、このX−Yステージを矢
印A方向に移動させるときプリント板1のスルー
ホール4内に密着嵌合せしめられる回転体6でス
ルーホール4を蔽光し、照明光5がスルーホール
4内に入射しないようになつている。
One side of the printer board 1 is irradiated with light 5 from a defect inspection light source (not shown), and the illumination side of the printed board 1 is provided with a rotating through-hole in the form of a roll for light shielding. The rotary body 6 has a length that simultaneously shields a plurality of through holes 4 from light as shown in FIG. 2, and both ends of its support shaft 7 are rotatably attached to a fixed part. The rotating body 6 is supported by an attached arm 8, and a tension spring 9 is stretched between the arm 8 and the fixed part, so that the rotary body 6 can be brought into pressure contact with the light-irradiated surface of the printed board 1. The printed board 1 is set on an X-Y stage (not shown), and when the X-Y stage is moved in the direction of arrow A, the printed board 1 is rotated so that it is tightly fitted into the through hole 4 of the printed board 1. The body 6 shields the through hole 4 from light so that the illumination light 5 does not enter the through hole 4.

10は前記プリント板1の他面側に前記回転体
6と対向して配置された光検知器であり、この光
検知器10はCCD(Charge Coupled Device)、
ラインセンサ等から構成され、回転体6で遮光さ
れる数に応じたスルーホール4を同時にセンスで
きるようになつている。また、前記光検知器10
とこれに対向するプリント板1間にはスルーホー
ル4に漏れた透過光を光検知器10に集光させる
レンズ11が配設されている。
Reference numeral 10 denotes a photodetector disposed on the other side of the printed board 1 facing the rotating body 6, and this photodetector 10 includes a CCD (Charge Coupled Device),
It is composed of a line sensor, etc., and is designed to simultaneously sense through holes 4 corresponding to the number of light shielded by the rotating body 6. Further, the photodetector 10
A lens 11 is disposed between the printed board 1 and the opposite printed board 1 for condensing transmitted light leaking into the through hole 4 onto a photodetector 10.

前記構成の本実施例において、図示しないX−
Yステージの割出動作によりプリント板1が矢印
A方向に1ピツチ分移動されると、プリント板1
の光照射面、圧接せしめられている回転体6はス
ルーホール4内へ嵌合せしめられ、これによりス
ルーホール4の照明光5側開口を密閉し、照明光
5がスルーホール4内に入射するのを阻止する。
In this embodiment with the above configuration, X-
When the printed board 1 is moved one pitch in the direction of arrow A by the indexing operation of the Y stage, the printed board 1
The rotating body 6, which is pressed against the light irradiation surface of the rotor 6, is fitted into the through hole 4, thereby sealing the opening of the through hole 4 on the illumination light 5 side, and the illumination light 5 enters the through hole 4. to prevent

一方、回転体6の周囲からプリント板1の基板
材2内に入射した光5は基板材2内部で拡散す
る。このとき、スルーホール4にピンホール等の
欠陥3aがあると、拡散光は欠陥3aを通してス
ルーホール4内に漏れ、スルーホール内を輝光さ
せると同時に、該光はレンズ11により光検知器
10に集光され、光検知器10が光を検知するこ
とでスルーホール4に欠陥があることを判定す
る。
On the other hand, the light 5 that has entered the substrate material 2 of the printed board 1 from around the rotating body 6 is diffused inside the substrate material 2. At this time, if there is a defect 3a such as a pinhole in the through hole 4, the diffused light leaks into the through hole 4 through the defect 3a, causing the inside of the through hole to shine, and at the same time, the light is transmitted to the photodetector 10 by the lens 11. The light is focused, and the photodetector 10 detects the light, thereby determining that the through hole 4 is defective.

また、スルーホール4に欠陥がない場合は、基
板材2内で拡散した光がスルーホール4内に漏れ
ることがないので、光検知器10は動作しない。
Furthermore, if there is no defect in the through-hole 4, the light diffused within the substrate material 2 will not leak into the through-hole 4, so the photodetector 10 will not operate.

前記のような本実施例にあつては、プリント板
1の光照射面とへ圧接せしめられており、プリン
ト板1の移転につれて回転させられる回転体6に
よりスルーホール4の遮光を行なうようにしたも
のであるから、従来のマスクパターンを用いた方
式のようなマスクとスルーホールとの位置合せ作
業が不要となり、これに伴い検査のための前準備
も簡便になつて検査作業能率を向上できる。ま
た、スルーホール4の遮光はロール状回転体であ
るため、プリント板に形成されたスルーホール4
のピツチ及び大きさが変更されても必要とする遮
光を確実にでき、汎用性をもたせるとこができる
ほか、検査の高速化もできる。
In this embodiment as described above, the through hole 4 is shielded from light by the rotating body 6 which is pressed against the light irradiation surface of the printed board 1 and rotated as the printed board 1 is moved. This eliminates the need for alignment work between the mask and through-holes, which is required in the conventional method using a mask pattern, and accordingly, preparatory work for inspection is simplified, and inspection work efficiency can be improved. In addition, since the light shielding of the through hole 4 is a roll-shaped rotating body, the through hole 4 formed on the printed board
Even if the pitch and size of the image are changed, the required light shielding can be ensured, making it versatile, and also speeding up the inspection.

なお、上記実施例では回転体6をロール形状と
したが、これをボール形状としても良く、また、
プリント板を移動する代りに回転体6を移動させ
るようにしても良い。この場合は照明用の光源及
び光検知器が回転体と一体に移動させる必要があ
る。
In the above embodiment, the rotating body 6 is shaped like a roll, but it may also be shaped like a ball.
The rotating body 6 may be moved instead of moving the printed board. In this case, the illumination light source and photodetector must be moved together with the rotating body.

〔発明の効果〕〔Effect of the invention〕

以上、詳細に説明したように本発明によれば、
プリント板の光照射面へ圧接せしめられ、その移
動等が生ぜしめられてスルーホール内へ密着嵌合
したときの回転体面でスルーホールの遮光を行な
うようにしたので、従来のようなスルーホール遮
光のための前準備が不要となり、これに伴い検査
のための作業能率が向上し検査の高速化も可能に
なるほか、スルーホールのピツチ及び径の異なる
プリント板にも同一回転体を利用できるなどの効
果がある。
As described above in detail, according to the present invention,
When the through-hole is pressed against the light-irradiated surface of the printed board and is moved and tightly fitted into the through-hole, the through-hole is shielded from light by the surface of the rotating body. Preparation for inspection is no longer required, which improves inspection work efficiency and speeds up inspection, as well as allowing the same rotating body to be used for printed boards with different through-hole pitches and diameters. There is an effect.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す図、第2図は
本発明に使用される回転体の一例を示す斜視図で
ある。 第1図及び第2図において、1はプリント板、
2は基板材、4はスルーホール、5は照明光、6
は回転体、10は光検出器、11はレンズであ
る。
FIG. 1 is a diagram showing an embodiment of the present invention, and FIG. 2 is a perspective view showing an example of a rotating body used in the present invention. In Figures 1 and 2, 1 is a printed board;
2 is a substrate material, 4 is a through hole, 5 is an illumination light, 6
10 is a rotating body, 10 is a photodetector, and 11 is a lens.

Claims (1)

【特許請求の範囲】 1 プリント板を該プリント板の一側に設けた検
査用光源により照明したとき光透過性絶縁基板内
を拡散する拡散光がスルーホール内に漏れたこと
を前記プリント板の他側に前記検査用光源と所定
の位置関係を保つて設けた光検知器で感知してス
ルーホールの欠陥を検出するスルーホール検査装
置において、 前記プリント板の一側に、回転体面を前記プリ
ント板の一側面に圧接せしめられており、前記プ
リント板との間の相対的移動と共に前記回転体面
の移動を生ぜしめられる回転体機構を配設し、 前記回転体面のスルーホールへの密着嵌合で当
該スルーホールを遮光することを特徴とするプリ
ント板のスルーホール検査装置。
[Scope of Claims] 1. When a printed board is illuminated by an inspection light source provided on one side of the printed board, it is possible to detect that diffused light diffused within a light-transmissive insulating substrate leaks into a through hole of the printed board. In a through-hole inspection device that detects defects in through-holes by detecting them with a photodetector provided on the other side in a predetermined positional relationship with the inspection light source, the rotating body surface is printed on one side of the printed board. A rotating body mechanism is provided that is pressed against one side of the board and can cause the rotating body surface to move as well as relative movement with the printed board, and the rotating body surface is tightly fitted into the through hole. A through-hole inspection device for a printed circuit board, characterized in that the through-hole is shielded from light.
JP22837682A 1982-11-30 1982-12-27 Apparatus for inspecting through-hole of printed circuit board Granted JPS59126235A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP22837682A JPS59126235A (en) 1982-12-27 1982-12-27 Apparatus for inspecting through-hole of printed circuit board
US06/554,543 US4560273A (en) 1982-11-30 1983-11-23 Method and apparatus for inspecting plated through holes in printed circuit boards
DE8383307291T DE3377527D1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards
EP83307291A EP0111404B1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22837682A JPS59126235A (en) 1982-12-27 1982-12-27 Apparatus for inspecting through-hole of printed circuit board

Publications (2)

Publication Number Publication Date
JPS59126235A JPS59126235A (en) 1984-07-20
JPH0332731B2 true JPH0332731B2 (en) 1991-05-14

Family

ID=16875489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22837682A Granted JPS59126235A (en) 1982-11-30 1982-12-27 Apparatus for inspecting through-hole of printed circuit board

Country Status (1)

Country Link
JP (1) JPS59126235A (en)

Also Published As

Publication number Publication date
JPS59126235A (en) 1984-07-20

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